39

19 19 19 Weight kg 0.5 0.6 0.7 Weight kg 0.5 0.6 0.7 NAAMS code ACA206M ACA207M ACA208M NAAMS code ACA216M ACA217M ACA218M A B C D E F G H I A B C D E F G H I Part no.

VM

VHS20/30 VHS40/40-06/50 2-10 I 10 I G H F E X H .

0.4

The electrical entry port {VQ1000: G 1/2, VQ2000: G 3/4} permits connection of conduit fittings.

Modular Type Filter Regulator Series AW

to Order 03 BG 30 AW F 2 N X430 03 BG 30 AW F 2 N X425 Filter regulator Filter regulator For high/low temperature For high pressure Body size 30 40 Body size X430 X440 Low temperature 20 30 40 High temperature Thread type Thread type Nil N Note 1) Rc NPT G Nil N Note 1) Rc NPT G Port size Port size F Note 2) F Note 2) Body size Symbol Body size Port size Port size Note 1) Drain guide is

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Auto switch Key Direction indicating label Key Direction indicating label Magnet A Magnet B +4 0 +4 0 0 90 18 90 ve 00 ve o ve o 1 o ro A port B port gr o e A port B port g v o y y o e gr e o k k r f g o f y o e y g e e n e Auto switch R ra g k k n n io ra at f ot f o o n e io g at e Angle adjustment range 3 ot

Table of Contents

Movement Load : Angular acceleration F: Pressing force (N) T f = F x l (Nm) . 2 = (rad/s 2) Load Static torque calculation t 2 g = 9.8 m/s2 Ts = F x l (Nm) l : Rotation angle (rad) Lever t : Rotation time (S) Axis Rotary actuator Axis Allowable Load Application of the load on the axial direction is tolerated if no dynamic load is generated and the values are within what is shown in the

VS 8-2/VS 8-4

9 D-Side End Plate Assembly @0 U-Side End Plate Assembly MES80 D 03 2 MES80 U 03 2 Size 2 4 Size 18 mm Size 26 mm Option Size 2 4 Size 18 mm Size 26 mm Option Nil Nil None External pilot Built-in silencer External pilot + Built-in silencer -S None Built-in silencer -R -S Thread type -RS Nil Rc G NPTF F T Thread type Nil Rc G NPTF F T Port size Symbol 03 04 Port size 3/8" 1/2" Size 18 mm

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Movement Load : Angular acceleration F: Pressing force (N) T f = F x l (Nm) . 2 = (rad/s 2) Load Static torque calculation t 2 g = 9.8 m/s2 Ts = F x l (Nm) l : Rotation angle (rad) Lever t : Rotation time (S) Axis Rotary actuator Axis Allowable Load Application of the load on the axial direction is tolerated if no dynamic load is generated and the values are within what is shown in the

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Movement Load : Angular acceleration F: Pressing force (N) T f = F x l (Nm) . 2 = (rad/s 2) Load Static torque calculation t 2 g = 9.8 m/s2 Ts = F x l (Nm) l : Rotation angle (rad) Lever t : Rotation time (S) Axis Rotary actuator Axis Allowable Load Application of the load on the axial direction is tolerated if no dynamic load is generated and the values are within what is shown in the

SMC

K 35 45 55 65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 NA 2 2 2 2 2 2 4 4 4 G 22 22 22 22 20 26 32 40 30 KA 162 218 258 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 FF 40 40 40 50 35 60 70 75 80 F 50 50 50 60 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Speed Controller with One-touch Fitting

Note 2) G thread is not available. 564 Speed Controller with One-touch Fitting Face seal AS Series Elbow Universal Brass Electroless nickel plated How to Order * Only G thread AS-F AS-F TMH ASD Type AS Thread type 2 Elbow 3 Universal G G AS-FE 2 2 0 F G A 1 AS 01 06 G thread KE AS-FG P F A 1 AS 2 0 2 01 06 R, NPT thread AS-FP AS-FM Body size Made to Order For details, refer to page 571. 2

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Auto switch Key Direction indicating label Key Direction indicating label Magnet A Magnet B +4 0 +4 0 0 90 18 90 ve 00 ve o ve o 1 o ro A port B port gr o e A port B port g v o y y o e gr e o k k r f g o f y o e y g e e n e Auto switch R ra g k k n n io ra at f ot f o o n e io g at e Angle adjustment range 3 ot

CRB2/CRBU2/CRB1

F = mg Mass m Movement I: Inertial moment Refer to page 100. Static torque calculation Tf = F x L (Nm) Load . g = 9.8m/s2 F: Pressing force (N) : Angular acceleration Load .

NCA1

1/4 2.72 2 5/8 5 53/64 400 (4) 1 3/4-16 1 1/8 4.7 1 1/2 1 1/2 1/2 7/8 3/8-24 4.5 2 1/4 0 1/2 1.57 1.18 5/8 1/2-13 2 1/16 1 3/8 2 7/16 2.34 4 1/4 2.72 2 5/8 5 53/64 Detachable Rear Clevis Type NC A1D (MP2 Mounting Style) (in) Bore (in) MM KK A AA B C CB CD CW D DD E EA EE F G J L LR M WF XD Y LF P ZD 150 (1.5) 5/8 7/16-20 3/4 2.02 1 1/8 3/8 3/4 1/2 1/2 9/16 1/4-28 2 0.3 3/8 3/8 1.26 1.1 3/

VZ100/300/500

1 2 Spool spring Stainless steel Nil F N T Rc G NPT NPTF 4-6-31 32 Series VZ500 Body Ported Grommet (G), (H) VZ52-01(-F) G H Manual override (Non-locking) (Mounting hole for manifold) (Lead wire length) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com G: 300 mm H

REA/REB

-X 20Stop Data 10-2-11 11 Series REA Dimensions REA25/32/40 Effective thread depth J L 0 0.1 B NN G 4-MM H G 2-port size X D I NB NB T N K W N S + Stroke F NA F R ZZ + Stroke (mm) B D F G H I K L MM x J N NA NB NN Model Port size REA25 REA32 REA40 Rc 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15 M26 x 1.5 Rc 1/4 70 43 16

CJ2

D-A7 D-A80 D-A73C D-A80C 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 D-C7 D-C80

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

d (H8) M A B C D G L F E K J H N Applicable cylinder type Bore size (mm) Spring pin P Order no.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

) 258-9200-www.stevenengineering.com F S + Stroke F CX ZZ + Stroke D-X H 20B E G Mounting nut Data NN NA F N CY3B15 (mm) B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10