SMC Corporation of America
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Features 2 Model Selection 1 Obtain the correction factor for the temperature from data A or B and the correction factor for the air pressure from data C. Temperature Data A or B = Series IDU: Data A IDF1D to 240D: Data B-1 IDF 370B: Data B-2 Air pressure Data C = Series IDU and Series IDF: Data C 2 Calculate corrected air flow by using A or B and C.

Applicable model HRR012/018--10-T/MT*1 HRR012/018/024/030--20-T HRR012/018/024/030--20-MT1 Pump Rated flow (50/60 Hz)2, 3 L/min 7 (0.36 MPa)/10 (0.42 MPa) 10 (0.42 MPa)/14 (0.40 MPa) 10 (0.32 MPa)/14 (0.32 MPa) Maximum pump head (50/60 Hz) m 50 50 50 Output W 350 550 Circuit protector A 15 15 (10 A for standard) Recommended earth leakage breaker capacity A 15 Cooling capacity4 W The cooling

Setting: Operate the NFC-B preferentially using the protocol used. Select the icon. (Windows7 is used in this Operation Manual) (2) Double-click the [NFC port/PaSoRi] icon on the control panel to display the setting window. Select [NFC-B] only for [Detectable cards].

AL-31S JIS B 2401G35 5 pcs. u O-ring NBR JIS B 2401G35 1 pc. JIS B 2401G35 1 pc. JIS B 2401G35 3 pcs.

Q (Depth) 90 100 R P E(g6) A F(h9) B C D G1 G2 J K L M N Model RQ1 M3 (10) RQ2 3.4 (6) (Q3 M3 (5) CRB1BW15-lD CRB1BW15-lDE CRB1BW20-lD CRB1BW20-lDE CRB1BW30-lD CRB1BW30-lDE 5 11 9 14 10 15.5 25 10 25 13 25 14 0.004 0.012 0 0.043 29 5 34 12 20 9 18 4 1.5 6 10 0.5 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0.004 0.012 0 0.043 36 6 42 14 29 10 20 4.5 1.5 7 10 0.5 M5 M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014

12 15 EB 20 25 31 EC 6.5 8.5 9.5 ED 60 74 94 EY 53.5 67 81.5 FA 46.7 67.3 67.3 FB 33 43 43 FC 13 17 17 FF 6 6 6 FH 12 16 16 TA 7 12 12 TT Max. 16.5 Max. 20 Max. 25 Applicable cylinder ML2B25 ML2B32 ML2B40 D-X 717 ML2B Series Dimensions Side support A MY-SA 2 x G F E 2 x H A B C D Side support B MY-SB 2 x J A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

N01 NPT1/8 12 C4HC6HN7H 2.5 A B C4H 15.6 8 C6H 16.5 10 N7H 16 10.3 C4LC6LN7L C A B C D C4L 15.2 17.5 4 8.2 C6L 15.2 18.3 4 10.4 N7L 20.9 20.6 6 11.1 -78No.PS-OMU0002CN-D A B -79No.PS-OMU0002CN-D 0.57 + 0.57 -80No.PS-OMU0002CN-D 2 (n ) <> <> 31n +3.5n -1 31n +3.5n -1 -81No.PS-OMU0002CN-D Revision history A [2018 7 ] B [2020 2 ] C [2021 2 ] D [2022 2 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo

-2No.PS-OML0002CN-G 1 1.5 3) 3) 1 1 () [] -3No.PS-OML0002CN-G () () () () -4No.PS-OML0002CN-G () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL (100 10 ) JIS B 8392-1 11.1.21.6.2:2003 () -5No.PS-OML0002CN-G * / / ,FG (35N ) () () * () 6 33 () () 10 m DC(-)() () * -6No.PS-OML0002CN-G ( ) () CE 050(5), * ON , 1015 10 /1 2146 LCD * -7No.PS-OML0002CN-G 01 N ISE30A

DC+COM A(-) C(+) COM B(-) 1N.C.ON 2 ZNR/ 3AB 23 - No.ZB-OM00301 (10ms ) 1 210ms 2 330m/s 4() A-C ON B-C ON N.C. A-C ON OFF 10msec ON 10 A B OFF 50 A B 10 1 50 3 3 24 - No.ZB-OM00301 ZB / / Assy /HNBR Assy //HNBR 25 - No.ZB-OM00301 2 ()() 5kPa () ZFAZFBZFC ON ZB1-VQ110U N.C (0.3 0.4 0.5 0.6) ZB1-VQ110L (0.30.4) ZB1-VQ120U N.C ZB1-VQ110N.C.

3 Stainless steel Needle y Aluminum Spool u Resin Piston i 13-8-10 11 Ejector Valve Unit Series ZYY/ZYX Construction ZYX3000 EXH. ZX B B' A B ZR A B P1 A A' ZM !0 o r t ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com e ZL ZY ZQ ZF ZP !

8370: JIS B 8361: JIS B 9960-1: (1 ) JIS B 8433-1993: 2) : : : 1. 2. 3. 1. 2. 3. 4

Adjustment: Max. 8.2 6 B port A port 0.5 +0.025 0 3-3H9 long groove depth 2.5 ( A , B , C ) 5g6 0.004 0.012 12h9 0 0.043 4-M4 x 0.7 depth 8 34 0 0.062 42h9 Top ports/MSUA3-SE 36 10 A port B port 2-M3 x 0.5 11 5 Rotary Table High Precision Type Series MSUA These drawings indicate the condition when the B port is pressurized.

flats 17 Clearance for maintenance G 1/4 Drain A Metal bowl 10-/21-AF20-A 10-/21-AF30-A to 60-A With bowl guard Metal bowl with level gauge Metal bowl Applicable model Semi-standard specifications Dimensions B B B B Metal bowl with level gauge Bracket mounting size Semi-standard specifications Standard specifications Model B Metal bowl With bowl guard B B V U T R Q N M J G D E C B A P S

A B B A B A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 4.5 8 6 10 9 3 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 4.5 8 6 10 9 3 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 5.5 9 7 11 10 4 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30) 23 (32) 19.5 (28.5) 40 10 13.5 35 37.5 38

A B B A B A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 4.5 8 6 10 9 3 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 4.5 8 6 10 9 3 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 5.5 9 7 11 10 4 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30) 23 (32) 19.5 (28.5) 40 10 13.5 35 37.5 38

Enable Val165000 4 ON 8 ON/OFF 3 Disable ON/OFF 0 83 9 ON/OFF Auto 10 HDX 10 BUS IN BUS IN 10 FDX 100 HDX 100 FDX Auto 10 HDX 11 BUS OUT BUS OUT 10 FDX 100 HDX 100 FDX 1Hold/Clear Via software 2PLC 330 4x1000 -44No.EX-OMS0026CN No.

1.30) 220 V 1.27 (With indicator light: 1.46) 23(P2) D b b Air operated External pilot solenoid Internal pilot solenoid Power consumption [W] DC G, L, M 1.0 (With indicator light: 1.1) D 1.0 (With indicator light: 1.1) * Allowable voltage fluctuation for S and Z types 24 VDC: 7% to +10% 12 VDC: 4% to +10% Flow Rate Characteristics/Weight Caution Flow rate characteristics Weight [kg] 1(P)

[C] 5 10 15 20 25 30 35 Circulating fluid temperature [C] HRS090-W-20/40 (50 Hz) HRS090-W-20/40 (60 Hz) 14 12 12 10 Facility water temperature 32C Facility water temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 8 8 6 Facility water temperature 40C Facility water temperature 40C 6 4 4 2 2 0 0 5 10 15 20 25 30 35 Circulating fluid temperature [C] 5 10 15 20 25 30 35 Circulating

3 SOL. 4 stations 4 SOL. 5 stations 5 SOL. 6 stations 6 SOL. 7 stations 7 SOL. 8 stations 8 SOL. 9 stations 9 A Black White SOL. 10 stations 10 w SOL. 11 stations 11 SOL. 12 stations 12 B SOL. 13 stations 13 q SOL. 14 stations 14 SOL. 15 stations 15 SOL. 16 stations 16 SOL. 17 stations 17 SOL. 18 stations 18 COM 19 COM 20 Electrical wiring specifications 2.9-5 3 Port Solenoid Valve Series