Air Preparation Equipment

Symbol Number of arranged elements 4 7 13 19 Number of arranged elements 30 36 55 83 04 07 13 19 30 36 55 83 Symbol Nominal filtration accuracy (m) Note) Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 Symbol Nominal filtration accuracy (m) 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Element length Element length L250 L500 (L250 x 2) L750 (L250

PF2D

+0.5 0 PFMB -1 PNP (2 outputs) PFMC 36 +0.5 0 Load OUT2 8 PFMV 4 Sensor input Load Black OUT1 Main circuit 7 3 PF2A Sensor DC(+) DC(+) Brown 2 6 + 12 to 24 VDC DC() DC() Blue 1 5 PF3W A Note) LFE PF2D PF2D IF R3.5 or less Note) Decide the length of A taking into account the size of terminal you use.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

2.8 depth 8.4 8 PF2M705/710/725/750W -F1(-L) 86.2 13 14 18.2 2.8 depth 8.4 2 x P PF2M711/721W-02(-L) 88 13 17 20 2.8 depth 6.2 PF2M711/721W-N2(-L) 88 13 17 20 2.8 depth 6.2 PF2M711/721W-F2(-L) 88 17 21 20 2.8 depth 6.2 22 PF2M7(-L) Series Dimensions PF2M701/702/705/710/725/750/711/721(-L) Panel mounting/Without flow adjustment valve/Straight With bracket/Without flow adjustment valve 48 36

7.4

Dual 3-port valve S07 A B C2 0.57 0.39 0.15 0.55 0.37 0.15 25 or less 44 2-position Single S0715 0.39 0.39 0.11 0.37 0.39 0.10 12 or less 28 Single Unit Base Mounted Page 747 Double S0725 0.39 0.39 0.11 0.37 0.39 0.10 10 or less 36 Manifold 3-pos. 3-position closed center S0735 0.29 0.29 0.07 0.26 0.21 0.06 28 or less 38 Bar Base Page 750 4-pos.

IIIIIIIIII

SPECIFICATIONS INPUTS VCC 5 12 VDC Vm 12 VDC DIR TTL, DTL, MOS Compatible Low (0) = Decrease High (1) = Increase CLK TTL, DTL, MOS Compatible 225 Hz Fixed frequency Positive Edge Triggered SPECIFICATIONS SUPPLY VOLTAGE 12 VDC SUPPLY CURRENT Min. 400 mA SELECTABLE STEP RANGE 8 8148 steps STEP RATE 225 PPS OUTPUTS 1 MOTOR 170 mA/coil @ 12 VDC, 36 ohms/coil STEP RATE Motor step rate = Clock

Table of Contents - Tubing

Colors indication Longer lengths available upon request Color Black White Red Blue Yellow Green Symbol B W R BU Y G T0645 6 4.5 36 T1613 16 13 100 T0604 6 4 24 T1209 12 9 75 T0425 4 2.5 13 T0806 8 6 48 T0403 4 3 25 T1075 10 7.5 60 Model O.D. mm I.D. mm Min. bending radius mm Length 20m 100m Roll Reel Specifications Operating fluid Max. operating pressure Burst pressure Air, Water 218psi

VCC

For 3 port (2 stations, one-piece type) 254 g For gate valve 300 g For 2 port 409 g End plate For 3 port 495 g For 2/3 port mixed mounting 452 g 24 g 6 25 g 8 VCKH 33 g 10 36 g 12 25 g 6 26 g 8 VCKK Fittings 32 g 10 37 g 12 29 g 6 30 g 8 VCKL 37 g 10 41 g 12 648 Valve for Water and Chemical Base Fluids VCC Series Dimensions Mounting hole dimensions (When valve is built in to the device.)

VDW30/40-XF

Caution One-touch fitting Dimensions VDW30-G--P7 / P7 Quick Fastener VDW40-G--P10 / P10 Quick Fastener 30 36 Approx. 300 21 23 32 18 20 27 Approx. 300 56 48 10 9 P7 1 (IN) port P7 2 (OUT) port 50 21 P10 1 (IN) port P10 2 (OUT) port 56 VDW40-5G--P10--N VDW30-5G--P7--N 16 12 2 x M3 x 0.5 thread depth 4 2 x M3 x 0.5 thread depth 5 Male Quick Fastener Dimensions Quick Fastener Clip Dimensions

Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 66, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Prototype, Table Size Width W(mm): 36, Table Size Height H(mm): 36, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 1.1, Port Screw Type: Rc, Cushion: Rubber cushion, Custom-made

Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 66, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Prototype, Table Size Width W(mm): 36, Table Size Height H(mm): 36, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 1.1, Port Screw Type: Rc, Cushion: Rubber cushion, Custom-made

Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 66, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Prototype, Table Size Width W(mm): 36, Table Size Height H(mm): 36, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 1.1, Port Screw Type: Rc, Cushion: Rubber cushion, Custom-made

Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 66, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Prototype, Table Size Width W(mm): 36, Table Size Height H(mm): 36, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 1.1, Port Screw Type: Rc, Cushion: Rubber cushion, Custom-made

Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 66, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Prototype, Table Size Width W(mm): 36, Table Size Height H(mm): 36, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 1.1, Port Screw Type: Rc, Cushion: Rubber cushion, Custom-made

Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 66, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Prototype, Table Size Width W(mm): 36, Table Size Height H(mm): 36, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 1.1, Port Screw Type: Rc, Cushion: Rubber cushion, Custom-made

Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 66, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Prototype, Table Size Width W(mm): 36, Table Size Height H(mm): 36, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 1.1, Port Screw Type: Rc, Cushion: Rubber cushion, Custom-made

Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 66, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Prototype, Table Size Width W(mm): 36, Table Size Height H(mm): 36, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 1.1, Port Screw Type: Rc, Cushion: Rubber cushion, Custom-made

Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 66, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Prototype, Table Size Width W(mm): 36, Table Size Height H(mm): 36, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 1.1, Port Screw Type: Rc, Cushion: Rubber cushion, Custom-made

Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 66, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Prototype, Table Size Width W(mm): 36, Table Size Height H(mm): 36, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 1.1, Port Screw Type: Rc, Cushion: Rubber cushion, Custom-made

Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 66, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Prototype, Table Size Width W(mm): 36, Table Size Height H(mm): 36, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 1.1, Port Screw Type: Rc, Cushion: Rubber cushion, Custom-made

Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 66, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Prototype, Table Size Width W(mm): 36, Table Size Height H(mm): 36, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 1.1, Port Screw Type: Rc, Cushion: Rubber cushion, Custom-made