RQ

7 28.5 M6 x 1.0 10 20 L CU CW RR 40 18 36 7 28.5 M6 x 1.0 10 22 CX +0.4 +0.2 0.1 0.3 CZ B + Stroke CL + Stroke A + Stroke 50 22 44 8 33.5 M8 x 1.25 14 28 Refer to page 7-7-14 for details on rod end nut and accessories.

CXT

Reed switch Solid state switch A B HS D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL D-A7H D-A80H 32, 40 D-F7, D-J79W D-J79, D-F7BAL D-F7W, D-F79F D-F7NTL Auto switch model D-A7H D-A80H A B Hs A B Hs A B Hs Symbol Standard Stroke Bore size (mm) 32 40 9.5 13.5 32.5 36 6.5 9 6.5 9 32.5 36 9.5 13.5 10.5 13 32.5 36 14.5 18.5 Long Stroke Bore size (mm) 32 40 10 13.5 32.5 36 18 24 10 13.5 18 24

MLU

I-MU02 I-MU03 I-MU04 I-MU05 CNS E1 16 18 20 28 A1 10.5 12 14 18 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 A1 10.5 12 14 18 L1 27 31 36 46 E1 14 18 20 28 L1 27 31 36 46 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 NDH10 8 10 10 14 Size 25 32 40 50 Size 25 32 40 50 +0.058 0 +0.058 0 +0.058 0 +0.070 0 CLS CLQ Applicable pin no.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

36 41 20 74 65 90 50 20 8-8-27

DOC1001322

Piping port size Table 3.4-1 Piping port size Description Port size Recommended Recommended piping tightening torque specifications Circulating fluid outlet port Rc1 36 to 38Nm 1.0 MPa or more Circulating fluid return port Rc1 36 to 38Nm 1.0 MPa or more 1.0 MPa or more Automatic fluid fill port Rc1/2 20 to 25Nm (Automatic fluid fill pressure: 0.2 to 0.5 MPa Overflow port Rc1 36 to 38Nm ID

HRX-OM-W060

Description Port size tightening piping torque specifications Chiller side 1 union 178 to 185Nm Circulating fluid outlet port Filter side Rc1 1 36 to 38Nm 1.0MPa or more CH1 Circulating fluid return port Rc1 2 36 to 38Nm 1.0MPa or more Tank drain port Rc3/4 2 28 to 30Nm Chiller side 1/2 union 64 to 70Nm Circulating fluid outlet port Filter side Rc1/2 1 20 to 25Nm 0.8MPa or more CH2 Circulating

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Table (17) Parts where grease is to be applied Application of grease Grease 1 Body (inner sliding surface) Piston(Seal groove) 4 Slider(Sliding surface) 7 GR-S-010 9 Tube gasket Piston seal 10 Cushion sealFor with air cushion 36 O-ring 25 26 33 36 9 10 10 1 9 36 4 4 26 33 25 33 26 25 37 - 2. Mount the tube gasket 9 to the left cover 3 to mount to the body 1 .

Electric Actuator Miniature Rod Type Miniature Slide table Type

If when only the actuator is purchased separately, confirm that the combination of the controller, which you have and the actuator is compatible. / See 6.3 Caution(1) on p.36 (1) Check that actuator label for model number.

MHF2

36 36 4H9 +0.030 0 depth 3 4-M5 x 0.8 thread depth 12 Mounting thread 6 127.5 5 Finger closing port M5 x 0.8 50 142 2-M5 x 0.8 thread depth 5.5 122 26 10.6 Mounting thread E 20 20 24 33 E 0 -0.1 1.2 4-4.3 through (Mounting hole) 27 37 1.2 37 M5 x 0.8 Finger opening port 4-7.5 +0.1 0 Close: 0 E-E Open: 641 8-M4 x 0.7 thread depth 4 106 Attachment mounting thread 4-M5 x 0.8 thread depth 5.5

MHF2

36 36 4H9 +0.030 0 depth 3 4-M5 x 0.8 thread depth 12 Mounting thread 6 127.5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Finger closing port M5 x 0.8 50 142 2-M5 x 0.8 thread depth 5.5 122 26 10.6 Mounting thread E 20 20 24 33 E 0 -0.1 1.2 4-4.3 through (Mounting

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5

Guide Cylinder/Compact Type Series MGC

) 23 (32) 24.5 (33.5) 23.5 (32.5) 17.5 (26.5) 20.5 (29.5) 22.5 (31.5) 19 (28) 40 40 34.5 35 37.5 38 35 39 36.5 35.5 29.5 32 34.5 31 32 (36) 28 (40) 29.5 (41.5) 28.5 (40.5) 22.5 (34.5) 25.5 (37.5) 27.5 (39.5) 24 (36) 50 50 40 40.5 43 43.5 42 46 43.5 42.5 36.5 39.5 41.5 38 ( ): Set values for long stroke, double rod Note) Adjust the auto switch after confirming the operating conditions in

Digital Flow Switch (Integrated display type)

Selection of display colour SoG/SoR/REd/GRN (Page 36) 5. Completed [F 1] Setting of OUT1 is completed. -31No.PF-OMM0005-N 1. Selection of output mode Press the or button in function selection mode to display [F 1] on the main screen. The sub screen displays [oUt1] and the currently set output mode alternately. Press the button.

Rotary Table/Rack & Pinion Style Series MSQ

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 101 102 100h9 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 119 120 116h9 118h9 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

Low Profile Air Gripper Series MHF2

36 36 4H9 +0.030 0 depth 3 4 x M5 x 0.8 thread depth 12 (Mounting thread) 6 127.5 5 M5 x 0.8 50 Finger closing port 142 2 x M5 x 0.8 thread depth 5.5 122 26 10.6 (Mounting thread) E 20 20 24 33 E 4 x 4.3 through (Mounting hole) 0 0.1 1.2 27 37 1.2 37 M5 x 0.8 4 x 7.5 +0.1 0 Finger opening port Close: 0 E-E Open: 641 8 x M4 x 0.7 thread depth 4 4 x M5 x 0.8 thread depth 5.5 106 (Attachment

Thermo-chiller

breaker K Note) With uid ll port W Water-cooled refrigeration Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Specications Model HRS100-W -20HRS150-W -20Cooling method Water-cooled refrigeration Refrigerant R410A (HFC) Control method PID control Ambient temperature Note 1) 36

4/5 Port Air Operated Valve Series SYJA3000

SA Manual override B P R R (35) 7 7 36 (2) VA 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 VM 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2-1.8 2-M3 x 0.5 (Pilot port) A B 11 1.5

EX120/121/122

Therefore, the possible supply current to the sensor is 120 [mA] 84 [mA] = 36 [mA] Use of low-wattage type valves by minimizing the maximum number of simultaneous outputs, and low current consumption sensors (2-wire sensor, etc.) is recommended.

Hygienic Design Cylinder Series HY

DBore size X Y LD LH LC LQ LT LX LY LZ ZA ZB 107 115.5 133.5 134 ZC 129 139.5 165.5 166 ZB 122 130.5 148.5 149 ZC 144 154.5 180.5 181 HY-L032SUS HY-L040SUS HY-L050SUS HY-L063SUS 32 40 50 63 M6 x 1 x 18L M6 x 1 x 18L M8 x 1.25 x 20L M8 x 1.25 x 20L 100 120 210 260 24 28 32 32 11 10 11 11 7 9 9 9 32 36 45 50 142 161 170 185 109 121.5 140.5 141 4 4 5 5 32 36 45 50 57 65 80 92 49.5 57.5 69 84