SMC Corporation of America
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Function: 2 Position Single, Piping: Base Mounted, Exhaust: Individual, Voltage: 220VAC 50/60HZ, Lead Wire: DIN Terminal w/Connector, Surge Suppressor: -, Manual Override: -, Port Size: -, Option: -

Function: 2 Position Double, Piping: Base Mounted, Exhaust: Individual, Voltage: 220VAC 50/60HZ, Lead Wire: DIN Terminal w/Connector, Surge Suppressor: -, Manual Override: -, Port Size: -, Option: -

Function: 3 Position Closed Center, Piping: Base Mounted, Exhaust: Individual, Voltage: 220VAC 50/60HZ, Lead Wire: DIN Terminal w/Connector, Surge Suppressor: -, Manual Override: -, Port Size: -, Option: -

Function: 3 Position Exhaust Center, Piping: Base Mounted, Exhaust: Individual, Voltage: 220VAC 50/60HZ, Lead Wire: DIN Terminal w/Connector, Surge Suppressor: -, Manual Override: -, Port Size: -, Option: -

Function: 3 Position Pressure Center, Piping: Base Mounted, Exhaust: Individual, Voltage: 220VAC 50/60HZ, Lead Wire: DIN Terminal w/Connector, Surge Suppressor: -, Manual Override: -, Port Size: -, Option: -

Type of Actuation: 3 Position Exhaust Center, Manifold Type: Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base, Pilot: Internal Pilot, Specifications: Standard, Voltage: 220VAC 50/60HZ, Electrical Entry: DIN Terminal w/Connector, Lead Wire Length: -, Surge Suppressor: -, Manual Override: -, A, B Port Size: -, Thread: -, Option: -

Type of Actuation: 2 Position Single, Manifold Type: Base Mounted, Pilot: Internal Pilot, Specifications: Standard, Voltage: 220VAC 50/60HZ, Electrical Entry: DIN Terminal w/Connector, Lead Wire Length: -, Surge Suppressor: -, Manual Override: -, Port Size: -, Thread: -, Option: -

Type of Actuation: 2 Position Double, Manifold Type: Base Mounted, Pilot: Internal Pilot, Specifications: Standard, Voltage: 220VAC 50/60HZ, Electrical Entry: DIN Terminal w/Connector, Lead Wire Length: -, Surge Suppressor: -, Manual Override: -, Port Size: -, Thread: -, Option: -

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: 4 (220VAC 50/60HZ), Electrical Entry: D (DIN Terminal w/Connector)

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

3 o q q o !0 !1 !0 !1 !2 w !2 w !3 !4 !5 With reducer Tube extensions e t y r i u q o !1 !0 !2 w Component parts No.

Construction VHS20/30 VHS40/40-06/50 y i u w w t t r q IN OUT OUT IN q e o EXH. EXH. VM Component Parts No.

Drain outlet Evaporation thermometer Drain separator Volume control valve Capillary tube Compressor for refrigeration Pressure switch Condenser Fan motor Circuit for air, refrigerant 6 8 Series IDU E Dimensions IDU3E to 6E B E D A Q Illuminated switch Evaporation thermometer Ventilation air outlet Compressed air inlet F G Port size Compressed air outlet C Ventilation direction Ventilation

0 u #0 $2 #6 t #8 q y $0 $1 20 r !1 e @2 #7 #3 #1 !2 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 i @1 @4 @6 !0 @7 @9 !6 t i !7 q !8 #8 $1 Single acting (TL, TM) Double acting built-in spring (BL, BM) $0 y r !1 #7 e #4 #7 !

5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts MB No. q w e r t y u i o !0 !1 No.