Type: Relay Device, Type: Rotary type, Connection Port Size: Rc1/4, Input pressure(MPa): 0.02 to 0.06 / 0.06 to 0.1, Pressure(MPa): 1.0, Pilot valve: N/A, Fork lever type fitting: N/A, Lever unit: N/A, Position feedback signal: Available, Ambient temperature(°C): -20 to 80 (standard)
Fluoropolymer Piping Equipment 8 30 26 18 36 41 78 74 49 Inch Size Model Applicable tubing O.D.
P R S P R R port 1/8 R port 1/8 A, B port size Nil Rc A B B A A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 M5 F G M5 x 0.8 A, B port M5 x 0.8, C4 N C4 NPT 4 One-touch fitting T NPTF N3 5/32" One-touch fitting Type 41 (5 port/Base mounted) How to Order 10 SS5YJ3 41 05 C4 Type 41 Type S41 ( ) Single solenoid pilot valve is on same side as the A, B port.
34 38.5 46.5 55 63 Hs 30 34 41 48.5 56 Ht 30.5 35 42.5 51 59 Hs 30 34 41 48.5 56 40 50 63 80 100 30 34 41 49.5 58.5 B 32 A Operating Range Bore size Auto switch model 40 8 50 7 63 9 80 9.5 100 10.5 D-Z7/Z80 D-A3/A44/A3C/A44C D-A5/A6 D-B5/B64 9 10 11 11 11 D-A59W D-B59W D-Y59/Y69/Y7P/Y7V/Y7W/Y7WV D-Y7BAL D-F5/J5/F5W/J59W/F5BAL/F5NTL D-F59F D-G5/K59/G5W/K59W/G5BAL/G5NTL/G59F D-G39/K39/G39C
Applicable solenoid valve Refer to the p.1.2-41.
3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds
3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds
XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric
O After a few seconds at 10-6Torr 41
port 1/8" External pilot port 27.5 27.5 41 41 41 41 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3-position type. 495 Base Mounted Plug-in Unit VQ5000 Series [Option] Note) CE-compliant: For DC only.
(ZX1A) K1 [82] K5 [73] D1 [77] D2 [100] D3 [41] D2 [100] None K3 [132] K2 [73] K6 [58] K4 [119] J2 [100] J1 [77] J3 [41] Release valve None [ ]: Weight (g) How to Order Refer to page 13-2-4 for details.
IZS 41 IZS 42 IZF Sensor not connected Offset voltage (V) 30 Total number of ionizers that may be connected IZS41: Max. 8 units. IZS42: Max. 5 units.
22 110 19 27 19 34 10 18 9 41 73 3/8 32 50 25 to 800 75 75 52.3 14 69 12 M20 x 1.5 M12 x 1.25 9 105 28 52 28 130 24 26 25 42 16 18 11 41 74 1/2 33 63 25 to 800 90 90 64.3 14 84 12 M27 x 2 M12 x 1.25 13 117 36 65 36 145 30 23 32 50 16 17 13 39 80 1/2 33 80 25 to 800 115 115 82.7 18 96 16 M33 x 2 M16 x 1.5 9 149 45 83 45 180 41 26 41 60 20 20 17 46 93 3/4 40 100 25 to 1000 130 130 96.9 18
Kl 9.8 19.5 20 16.5 21 11 KQ2ZF04-M5 8 21 24 47 32 49 54 M5 X 0.8 8 10.4 16 10.4 4 13.4 1 8 1 8 1 4 1 8 1 4 1 4 3 8 3 8 1 2 15.5 29.5 25.5 KQ2ZF04-01S 14 Ml 15.5 22 17 22 22 29.5 25.5 35 27 35 35 39 39 42 KQ2ZF06-01S 13.4 22 14 6 12.8 17 12.8 41 KQ2ZF06-02S 20.6 25.5 19 31 41 41 17 KQ2ZF08-01S 17.6 25.5 Hl 8 15.2 15.2 18.5
(mm) Model Connection thread M5 x 0.8 L1 KQ2ZF04-M5 9.8 19.5 21 11 15.5 15.5 22 17 22 22 20 29.5 29.5 16.5 25.5 25.5 35 27 35 35 39 39 42 M5 x 0.8 8 21 21 47 32 49 54 8 4 10.4 16 10.4 1 8 1 8 1 4 1 8 1 4 1 4 3 8 3 8 1 2 KQ2ZF04-01S 13.4 14 KQ2ZF06-01S 13.4 22 14 6 12.8 17 12.8 KQ2ZF06-02S 41 20.6 25.5 19 D1 L3 L2
R2 R1 18.5 P 41 41 41 41 27.5 27.5 Rc 1/8 PE port Rc 1/8 external pilot port 5-Rc 1/2 5-Rc 1/2 (P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3 position type 1(P), 4(A), 2(B), 5(R1), 3(R2) port 2-6-6 7 Base Mounted Series VQ5000 Plug-in/Plug Lead: Single Unit Plug Lead Type Grommet 2 position single: VQ5150 1-G H 194.5 121.3 73.2 194.5 121.3 73.2 53 59.5 59.5 27.5
-40 VV5Z5-41 VV5Z5-42 Before using, refer to page 3-3-8.
32 25 16 12.5 20 M16 x 1.5 16 M5 x 0.8 M6 x 1.0 76 60 41 32 25 16 12.5 20 M20 x 1.5 16 l M5 x 0.8 M6 x 1.0 90 70 50 40 31.5 20 16 20 M24 x 1.5 20 C B series rod M6 x 1.0 M8 x 1.25 145 115 75 60 E 40 30 20 24 M30 x 1.5 31.5 dH10 L L M6 x 1.0 M8 x 1.25 145 115 75 60 40 30 20 24 M39 x 1.5 31.5 M8 x 1.25 M10 x 1.5 185 145 95 80 50 40 25 26 M48 x 1.5 40 H+0.4 +0.1 D M5 x 0.8 M6 x 1.0 76 60 41
Body Size 21 31, 41 Description Metal Bowl Metal Bowl With Sight Glass Residual Pressure Relief Valve Symbol Nil V NPT Threads Applicable Model Combo All All Description Without Valve With Downstream Valve Port Size Symbol 02 03 04 Applicable Body Size 21 31 41 Port Size 1/4 3/8 1/2 Accessories Symbol Nil C D Applicable Body Size All 31, 41 31, 41 Description None Float Auto Drain (N.C.)
Spacer with Bracket: (Z) G F.R.L. body center C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X A G Seal Y200T Y400T F J H K D Applicable models F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50 EE 27 33 G 4.5