3

Without arm Q R M MK MK 20 MK2T 8 19 CK1 17 0.1 0.2 Q (mm) CLK2 Q (mm) Rod state Clamp stroke 10 mm Model Q 10 mm 20 mm Clamp stroke CLKG Rod state Bore size 50 mm 20 mm 30 mm 50 mm Retracted 146.5 175.5 166.5 205.5 186.5 235.5 226.5 295.5 R M Q 82 82 83 83 91.5 91.5 85 85 96.5 96.5 100 100 R 33.5 63 35.5 65 50 85 57.5 92.5 65.5 104.5 65 104 M Q 126.5 126.5 130 130 R 95.5 164.5 95 164 M MK63

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Fieldbus System

Connector for unit (Plug) 5 t r t r EX600-AXA EX600-AYA EX600-AMB End Plate q t No.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Disassembly 1) After loosening the screw q, then if the housing r is pulled in the direction of the screw q, the connector will be removed from the body of equipment (solenoid, etc.). 2) Pull out the screw q, then remove the gasket or . 3) On the bottom part of the terminal block e, theres a cut-off part (indication of an arrow) .

Mechanically Jointed Rodless Cylinders

7 q y @2 @3 !8 !3 @4 r o !1 !

Modular Type Filter Regulator Series AW

q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

AR20-B to AR60-B

IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Prevents Micro-Bubbles

Caution e Insert bushing VXA When the tubing r is curved, straighten it out before using it. VN The tubing r may slip if there is oil or dust, etc. on the holder assembly y. Remove the contamination using alcohol or another suitable cleaner. LVC Press the insert bushing e into the tubing r by turning the lever q.

Membrane Air Dryer

Q r Q1 Inlet air Series IDGr 206, therefore YES 10 1.35 3.00 proceed to Step 6 15 1.22 2.17 Step 6 20 1.10 1.52 Confirmation of pressure drop $P1 [MPa] Step 6 25 1.00 1.00 30 0.92 0.65 Single unit (Refer to pages 7 and 8.)

Process Valve Series VNA

0 e e u u r i !1 r t !1 !0 Port 1 Port 2 Port 1 Port 2 Valve element A t q q o o w Valve element B y w Port 3 3 Port valve 2 Port valve How to Order Pilot Solenoid Valves Working Principle When the pilot operated solenoid valve !2 is not energized, the valve element A t connected to the piston u is closed by the return spring i.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Base material: Aluminum Fluid: Air Base material: Aluminum Fluid: Air Common SUP type Individual SUP type Common SUP type Individual SUP type u u e t u e t u w w t e y r q y i OUT t e y r q y i w i w i y r q y r q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com o

30

nickel plated) Special FKM (Fluoro coated) u o i w e r t q !

Compact Manifold Regulator Series ARM5

i w t y ARJ w r AR425 to 935 t AMR e ARM u y u q i ARP r IR o Replacement Parts Component Parts IRV Description Material Part no.

MK

w e r t No. !

ITV

Working Principle Diagram Power supply and error LED indication Power supply Output signal r Control circuit Input signal P e Pressure sensor w Exhaust solenoid valve q Air supply solenoid valve SUP EXH OUT Block Diagram Supply pressure q Air supply solenoid valve Output pressure Input signal + r Control circuit w Exhaust solenoid valve Discharged to atmosphere e Pressure sensor 808 Compact

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

3 (R) 1 (P) 5 (R) 3 (R) 1 (P) e t q r w w q t r A B A B SY SYJ u u R P R R P R SX y VK 3 position closed center/exhaust center/pressure center VZ 3 position closed center VF (A) 4 (B) 2 w t q r VFR 5 (R) 3 (R) 1 (P) 3 position exhaust center A B (A) 4 (B) 2 VP7 5 (R) 3 (R) 1 (P) VP4 3 position pressure center u (A) 4 (B) 2 R P R (This construction shows a closed center.) 5 (R) 3 (R) 1 (P

Free Mount Cylinder Series CU

x 0.8 R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2-P through A1 H E 4-T counter bore 0.5 B S Z (mm) S Z T QA R Q A A1 P GB MM B C D E GA L J H GC Bore size 5 30 40 50 5 10 15 20 25 30 40 50 15 20 25 10 4.5 2 16 12 9 4 20 16 12 11 5.5 4.5 26 20 40 32 8 6 30 27 6 5 16 14 19 16 22 19 21.5 19 116 126 135 145 M6 x 1.0 M5 x 0.8 14 12.5 40 36.5 81 72.5 86 77.5 91 82.5 96 87.5 101

1.1

This operation display panel is common to all models. t w e r y u i o q !0 !1 !2 !3 !4 !5 No. Description Function Displays the circulating fluid temperature. Displays the alarm code when an alarm is active. PV q Digital display PV/SV Displays the set temperature of the circulating fluid.

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !