Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Blue A 40 5 1 UNIT 12 to 24VDC Series PF2D5 RESET SET PF2D300-A(-M) Panel fitting dimension 3 x 7.2(=21.6) 8-M3 36 +0.5 0 6.4 OUT2 NC Sensor 8 Load 4 OUT1 Black 1 2 3 4 7 3 Load +0.5 0 Brown + 6 2 19.4 Blue 5 1 12 to 24VDC 5 6 7 8 Series PF2D5 PF2D301-A(-M) The applicable panel thickness is 1 to 3.2mm.

Antistatic One-touch Fittings Series KA

13.4 13.4 18 40 26 Uni thread 1 8 1 4 KAU08-U01 KAU08-U02 50.5 52 46.5 46 27 25 15.2 8 15.2 KAU08-U03 17 18.5 17.7 17.7 3 8 51.5 45.5 28 1 4 3 8 KAU10-U02 KAU10-U03 38 51.5 19 18.5 57.5 10 18.5 36 21 28.4 28.4 1 2 KAU10-U04 59 51 51 22 1 4 3 8 KAU12-U02 KAU12-U03 53 52 55 61 12 20.9 20.9 22 22 45.4 45.4 1 2 KAU12-U04 62.5 54.5 52 Reference dimensions after Uni thread installation.

Guide Table Series MGF

1570 3926 3141 7853 OUT 2356 100 36 6835 6151 5468 4784 4101 1367 3417 2734 6835 IN 2050 Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm) Weights (kg) Standard stroke (mm) Bore size (mm) Model 100 75 30 50 MGF 40 3.8 3.2 2.1 2.6 40 MGF 63 7.1 6.1 4.3 5.1 63 MGF100 11.0 9.6 7.0 8.2 100 2 Series MGF Clean Room Series 50 Z73 MGF 40 10 Stroke Number of auto switches Bore size

Electric Actuators

Model IX IY W H Sectional secondary moment Top entry Linear guide LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 Slider guide 24.7 44.8 55 36 56.3 73.3 7 40 84 15 60 177 48 374 836 52 402 1000 70 122 151 70 122 151 Left entry Brake Right entry Axial entry Bottom entry Table traveling accuracy T-slots enable highly flexible mounting.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

parts. 5 Series XMC, XYC Dimensions XMC/Angle type C D L2 (KF flange) Fd Fc Fn C (Fc) L1 (K flange) (CF flange) J H B G A A L2 (mm) Model A 110 120 171 183 209 250 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H J P.C.D L1 6-4.4 6-6.6 8-8.4 XMC-16 XMC-25 XMC-40 XMC-50 XMC-63 XMC-80 40 50 65 70 88 90 26 28 36

Multistage Ejector Series ZL

vacuum adapter ZL112-GN P V 61 2-5.4 Mounting hole Vacuum pressure switch Exhaust with silencer With digital vacuum pressure switch ZL112-E P V RESET SET Approx. 500 (L: Approx. 2900) Section A Pressure supply port One-touch fitting 6 Vacuum port One-touch fitting 12 2-5.4 Mounting hole Label MULTISTAGE EJECTOR 59.5 59 56 8.5 30 Section A with digital vacuum pressure switch 4.5 166 175 36

AC Servo Motor Driver (MECHATROLINK-III type)

The recommended the parameter for each actuator . 34 6.1 The recommended value of the parameter [LEF] . 34 6.2 The recommended value of the parameter [LEJ] . 35 6.3 The recommended value of the parameter [LEY] . 36 7.

ZK2-C

NO.ZK2-OM00801-B // ZK2-ZSV-A A 2 9 10 11 14 14 15 16 16 17 17 20 20 20 F0 22 F1 OUT1 23 F2 OUT2 25 F3 27 F4 28 F6 30 F11 31 F80 32 F81 33 F90 34 F96 36 F98 37 F99 39 40 B 43 44 45 51 52 52 -1NO.ZK2-OM00801-B (ISO/IEC)(JIS)1)2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems.

Pressure switch for energy-saving control ejector with N.O. type valve

wiring example 16 Mounting and Installation 17 Installation 17 Easy Setting 18 Measurement mode 18 Function Setting 22 Function selection mode 22 Default setting 22 F0 Unit selection function 24 F1 OUT1 25 F2 OUT2 27 F3 Response time 29 F4 Auto-preset 30 F6 Fine adjustment of display value 32 F11 Display resolution 33 F80 Power saving mode 34 F81 Security code 35 F90 Setting of all functions 36

Digital pressure switch for energy-saving control ejector

wiring example 16 Easy Setting 17 Measurement mode 17 Function Setting 20 Function selection mode 20 Default setting 20 F0 Unit selection function 22 F1 OUT1 23 F2 OUT2 25 F3 Response time 27 F4 Auto-preset 28 F6 Fine adjustment of display value 30 F11 Display resolution 31 F80 Power saving mode 32 F81 Security code 33 F90 Setting of all functions 34 F96 Check of suction command signal 36

Digital pressure switch for energy-saving control ejector

Press the button to set. 36 - NO. ZQ-OM01501 OUT2 check of output Press the or button to select check of output2. Press the After returning to [n](normal output), press the button to complete the button for 2 seconds or longer. output check. Setting of [F98] Check of output completed. Measurement mode.

Suction cups with flange

4.7 8.0 12 18 29 48 [kPa] -55 2.7 4.3 7.3 11 17 27 44 -50 2.5 3.9 6.7 10 15 24 40 -45 2.2 3.5 6.0 9.0 14 22 36 -40 2.0 3.1 5.3 8.0 12 19 32 -6No.

Magnet Gripper for Collaborative Robots

Magnet Gripper Integration Window 1.On the Job Contents review screen, tapping [MAGNETGRIPPER] on the navigation bar opens the Magnet Gripper Integration Window. 36 - 2. Insert Commands Tab (1) Selection Operation Select the behaviour of the Hold or Release operations.

IDX-OM-U021

L PRR PRS1 PRS2 PRS3 PLC HM GFCI EDV IDF100150F 6-4 6 5 IDX-OM-U021 6 IDF150F-30R () CM OLR MC1,2 THR THS1,2,3 V TB1,2 FM1,2,3 SWL SW L PRR PRS1 PRS2 PRS3 PLC HM GFCI EDV IDF100150F 6-4 6 6 IDX-OM-U021 6 6-5 ,, IDF100150F 6-5 6 7 IDX-OM-U021 6 6-6 () (1) IDF-FL219 (IDF100F,125F ) 1 IDF-FL220 (IDF150F ) 1 ADH-E400 V 1 -(2) 1 1 ) 1 2 ) Y92S-36

IDX-OM-W017

/4E IDF-S0001 IDF-S0002 1 IDFA6E15E1 1 IDFA3E/4E C32FP-260S C42FP-260S 1 IDFA6E15E1 1 IDFA3E/4E IDF-S1932 2 IDF-S1933 1 IDFA6E15E1 4-2 44 IDFA Series IDX-OM-W017 5 5 5-1 3 ON OFF 600mm 1 10% () ( 60cm 1 ) 10% 3 IDFA Series 5-1 5 1 IDX-OM-W017 5 () 60cm 1 2 INOUT INOUT () IDFA Series 5-1 5 2 IDX-OM-W017 6 6 6-1 IDFA3E IDFA4E IDFA6E IDFA8E IDFA11E IDFA15E1 3 12 24 36

IDX-OM-W020

/h) (120 m 3/h) 11 SCFM 16 SCFM 26 SCFM 43 SCFM 62 SCFM 80 SCFM 45 F (7.2C) (19 m 3/h) (27 m 3/h) (45 m 3/h) (74 m 3/h) (106 m 3/h) (136 m 3/h) 17 SCFM 28 SCFM 45 SCFM 65 SCFM 86 SCFM 12 SCFM 50 F (10C) (20 m 3/h) (28 m 3/h) (47 m 3/h) (77 m 3/h) (110 m 3/h) (147 m 3/h) 100psig (0.7MPa) 100 F (37.8C) 100 F (37.8C) 115V 60Hz 41-122 F (5-50C) 22psig (0.15MPa) 150psig (1.0MPa) () 36

IDX-OM-W035

IDFB55E-46 IDFB75E-46 107SCFM 161SCFM 226SCFM 300SCFM 37 F (2.8) 3/h) 3/h) 3/h) 3/h) (182m (273m (384m (510m (ANR) (1) 120SCFM 173SCFM 258SCFM 353SCFM 45 F (7.2) 3/h) 3/h) 3/h) 3/h) (205m (294m (438m (600m 130SCFM 181SCFM 297SCFM 406SCFM 50 F (10) 3/h) 3/h) 3/h) 3/h) (221m (308m (504m (690m 100psi (0.7MPa) 100 F (37.8) 100 F (37.8) 41122 F (550) 22 150psi (0.15 ~ 1.0MPa) 36

Mechanically Jointed Rodless Cylinder/Linear Guide Type Series MY1H-Z

Replacement Parts: Seal Kit (15, 16, 25, 36 and 37 are not included in the seal kit. Order them as required with by individual part numbers.) Description Material Qty. MY1H25 No.

Air Preparation Equipment

Symbol Number of arranged elements 4 7 13 19 Number of arranged elements 30 36 55 83 04 07 13 19 30 36 55 83 Symbol Nominal filtration accuracy (m) Note) Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 Symbol Nominal filtration accuracy (m) 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Element length Element length L250 L500 (L250 x 2) L750 (L250

PF2D

+0.5 0 PFMB -1 PNP (2 outputs) PFMC 36 +0.5 0 Load OUT2 8 PFMV 4 Sensor input Load Black OUT1 Main circuit 7 3 PF2A Sensor DC(+) DC(+) Brown 2 6 + 12 to 24 VDC DC() DC() Blue 1 5 PF3W A Note) LFE PF2D PF2D IF R3.5 or less Note) Decide the length of A taking into account the size of terminal you use.