LC6D/LC6C

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 LJ1 LG1 LC1 LX LC6D/LC6C Switches View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

Magnetically Coupled Rodless Cylinder

13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 13 20 20.5 22 29 I 12 15 18 23 J 6 6 8 8 10 K 11 8 10 15 16 L 57 66 70 80 92 P (Piping port) Model Mounting nut/Included in the package (2 pcs).

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 13 20 20.5 22 29 I 12 15 18 23 J 6 6 8 8 10 K 11 8 10 15 16 L 57 66 70 80 92 P (Piping port) Model Mounting nut/Included in the package (2 pcs).

Information

(mm) ASG32F-01 4 ASG42F-02 6, 8 ASG52F-03 6 ASG62F-04 Sealant: Special FKM Seat ring: Stainless steel 303 8 12 4, 6 8, 10 10, 12 460 790 920 1580 100 180 230 390 Flow rate (l/min (ANR)) Controlled (free) flow 7 12 14 24 1.5 2.7 3.5 6 Effective area (mm2) Applicable tubing materials Note) Flow rate is measured at 0.5 MPa and 20C.

IDX-OM-U010

Option R . 10-1 10.1 SAFETY INSTRUCTIONS FOR USE . 10-1 10.2 EARTH LEAKAGE BREAKER SPECIFICATION . 10-1 10.3 CONNECTION OF POWER SUPPLY. 10-2 Chapter 11 Option T . 11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 OPERATION / ERROR SIGNAL OUTPUT . 11-1 11.3 REMOTE OPERATION . 11-2 11.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 11-3 11.5 ELECTRIC CIRCUIT . 11-4 Chapter 12 Option V . 12-1

PSxx-OMV0008CN

No.3 No.4 No.5 No.6 -77No.PS-OMV0008CN-E No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -78No.PS-OMV0008CN-E No.

3

For a 10 orifice (VXS23/Port size 1/4), P 0.05 MPa The optimum size for a pressure differential of P 0.2 MPa and a flow of 50 L/min will be the VXS23 (10 orifice, port size 3/8). 500 400 VXS26 25 Cv = 12 300 VXS25 20 Cv = 9.2 200 VXS24 15 Cv = 5.3 Flow rate Q [L/min] 100 VXS23 Port size 3/8 10 Cv = 2.8 VXS23 Port size 1/4 10 Cv = 2.4 50 40 30 25 20 10 0.01 0.02 0.03 0.04 0.05 0.1 0.2 0.3

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

ASP630F 1500 1000 14 Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) 20 Flow rate (l/min (ANR)) 10 11,12,13 12 10,11 08,09 1000 10 15 8 500 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-10-2 3 Series ASP

EXxx-OMS0026CN

Enable Val165000 4 ON 8 ON/OFF 3 Disable ON/OFF 0 83 9 ON/OFF Auto 10 HDX 10 BUS IN BUS IN 10 FDX 100 HDX 100 FDX Auto 10 HDX 11 BUS OUT BUS OUT 10 FDX 100 HDX 100 FDX 1Hold/Clear Via software 2PLC 330 4x1000 -44No.EX-OMS0026CN No.

HEC-OM-S008

Name Alarm flag 1,2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Unused 1 ERR01 System error 1 2 ERR02 System error 2 3 ERR03 Back-up data error Alarm flag 1 4-10 Unused 11 ERR11 DC power supply failure 12 ERR12 Internal temperature sensor High temperature failure 13 ERR13 Internal temperature sensor Low temperature failure 14 ERR14 Thermostat alarm Alarm given off status

Information

Bore size Stroke range head cap screw for Model Bracket CW CT CL CX CD M CZ R mounting pivot bracket (Accessory) Without auto switch With auto switch 15.5 20 25.5 28 15.5 20 25.5 28 4.5 4.5 6.6 6.6 4.5 4.5 6.6 6.6 M4 x 10 L M4 x 10 L M6 x 12 L M4 x 10 L M4 x 10 L M4 x 10 L M6 x 12 L M 6 x 12 L 5 6.5 8 10 5 6.5 8 10 5 to 30 5 to 30 5 to 50 5 to 50 5 to 30 5 to 30 5 to 50 5 to 50 14 15 18 20

Clean Air Module

AMD LLB4-1-PRVSF AMH V2 AME 72.1 Mounting hole for 4 x M5 AMF ZFC 58 70 SF 1 A Valve open and locked position 508 10 10 SFD 95 (Lever operating direction) Max. 132 Connection part Rc 3/8 (NPT 3/8) LLB LLB A Hand valve Valve closed position AD Air operated valve 3.5 GD Clean regulator With flow adjuster Pressure outlet port Rc 1/8 One-touch fitting 12 Digital flow switch PA pilot port Rc 1

30

-150 JC32-10-100 JC40-12-125 JC40-12-150 JC40-12-175 JC50-16-150 JC63-16-200 8 10 10 12 12 12 16 16 1 1.5 1 1.25 1.5 1.75 1.5 2 D-X Technical Data 1139 JC Series Dimensions of Accessories Rod end nut (mm) d: Thread nominal size Model Order number M8 x 1 M8 x 1.25 M10 x 1 M10 x 1.25 M10 x 1.5 M12 x 1.25 M12 x 1.5 M12 x 1.75 M14 x 1.5 M16 x 1.5 M16 x 2 M18 x 1.5 H 5 5 6 6 6 7 7 7 8 10 10 11

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

7.5 Up to 300 16.5 17 10 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5

PF2D

1 q t i 10 FKM O-ring PF2D540 o !0 u !0 !2ywr e 11 Stainless steel 304 Thread 12 PVC Lead wire !

PSE530/200

ZS-26-E (4 pcs. per set) Connector 16-3-6 6 Series PSE200 Multi-channel Controller Specifications Model PSE200 NPN open collector PSE201 PNP open collector Output specification 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With power supply polarity protection) Power supply voltage 55 mA or less (Current consumption for sensor is not included.)

IC

Switch range error 1 12 VDC 4 to 20mA 2 12 VDC 0 to 10 VDC Pressure exceeding upper limit of set pressure is applied. Pressurization error 3 24 VDC 4 to 20mA 4 24 VDC 0 to 10 VDC 14-8-38 5 Series IC Controller for Electro-pneumatic Regulator Descriptions Description OUT display Displays output specification to electro-pneumatic regulator. RUN display Displays control status.

P

14.7 19.5 3.8 Deep style (D) ZP10Dl to 40Dl Model Nom.size U02 A 2 B 2.6 C 1.2 D 7 E F 12 Y 0.8 _ _ _ _ ZP02Ul ZP04Ul ZP06Ul ZP08Ul ZP10Ul ZP13Ul ZP16Ul ZP20Ul ZP25Ul ZP32Ul ZP40Ul ZP50Ul U04 4 4.8 1.6 7 12 0.8 U06 6 7 2.5 7 12 0.8 U08 8 9 2.5 7 12 1 U10 10 12 4 13 7.7 12 3 U13 13 15 4 13 7.7 12 3 U16 16 18 4 13 8.2 12.5 3.5 U20 20 23 4 15 9.5 14 4 U25 25 28 4 15 9.5 14 4 U32 32 35 4 15

Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 D VP Color: White VG VP L DIN rail 12.5 (Pitch) 5.25 7.5 AXT100-DR-l VQ Enter suffix the number from DIN rail dimensions table below.