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: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

How to Find the Flow Rate (At air temperature of 20C) Choke flow: (P2 + 0.1)/(P1 + 0.1) ) 0.5 293 273 + t Q = 120 x S x (P1 + 0.1) x Subsonic flow: when (P2 + 0.1)/(P1 + 0.1) > 0.5 Q = 240 x S x (P1 P2)(P2 + 0.1) x 293 273 + t Q: Air flow rate [ /min (ANR)] S: Effective area (mm2) P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] t: Air temperature [C] Note 1) Formulas above are

Nw5z5-ar-(X)r ' NW5Z5-.2.L_rCr (D NVZ5000 Grommet/ 1,25120-OGOO-017 l{v:25120-oHoo41T DIN connctor (D)/ NVZsl2GODOO-017 flfi 6 .e .g With Bracket : NVZ512O-OG-O|T-F 0.18(4.5)Oia I .irri , l r q I r l l+l I _.1-_ r181(3OO) ruo wiii-unerrri , r , r ' . r r l , , . ' , . r . 1 . . ; , t 1 ' . . : r 1 . : , . . ' i a i ' L type plug connector/N\Zsl2GOLOO-olT . , . : , , r r . . t , 1 . , ' .

(Displays 0 when the value is (Displays 0 when the value is below 10 L/min) below 20 L/min) 20 to 1050 L/min 40 to 2100 L/min 2.0 0 to 2%F.S. (Displays 0 when the value is (Displays 0 when the value is below 20 L/min) below 40 L/min) 30 to 1050 L/min 60 to 2100 L/min 3.0 0 to 3%F.S.

(Displays 0 when the value is below 10 L/min) 40 to 2100 L/min 20 to 1050 L/min (Displays 0 when the value is below 40 L/min) 2.0 0 to 2%F.S. (Displays 0 when the value is below 20 L/min) 60 to 2100 L/min 30 to 1050 L/min (Displays 0 when the value is below 60 L/min) 3.0 0 to 3%F.S.

www.stevenengineering.com I 5.9 AIR PREPARATION MODULAR TYPE MIST SEPARATOR SERIES (N)AFM T E C H N I C A L SPECIFICATIONS Port Size 18 34Rc R e m o v e s m o re t h a n 9 9 . 9 % of oil mist 0.3m filter element Q u i c k r e l e a s e m e t a l b o w l guard on some sizes Automatic or manual drain Model NAFM2000 NAFM3000 NAFM4000 Port Size 18 14 14 38 38 12 34 Flow Rate ln/min* 200 450

s NVZ3000 Symbol With Subplate Body porled Vpe Base mounted type with subplate NVZ3r20 NVZ340 Cv0.25 1 1 / l \ l h u d l / l \ L E l ff NVZ32?

IZTP43(-L) and IZTN43 (2pcs.), IZTP41(-L) and IZTB40 (2pcs.) Separate connection Example of connecting IZTC41(-L), IZTP43(-L) andIZTN43 Example of connecting IZTC41(-L), IZTP43(-L) and IZTN43 (4pcs.) Example of connecting IZTC41(-L), IZTP43(-L) and IZTN43 (2pcs.) , IZTP41(-L) and IZTB40 (2pcs.) 1-2.

8.0] 8.0 L/min (16 L type) [ 20.0] 20.0 L/min (40 L type) [ 50] 50 L/min (100 L type) [ 126] 126 L/min (250 L type) [ P_1] Set value (OUT1) [F 1]/[ oUt1] Page 33 5% of maximum rated flow [ 0.20] 0.20 L/min (4 L type) [ 0.8] 0.8 L/min (16 L type) [ 2.0] 2.0 L/min (40 L type) [ 5] 5 L/min (100 L type) [ 12] 12 L/min (250 L type) [ H_1] Hysteresis (OUT1) [ CoL] Display colour (OUT1) [ SoG] ON

't;"iii:l:lr:'ir'i' .l l:r':].l:'.:ri:]"r''irr':''i ' r.i' 'r "i "" ' r' ,.it:.i:ur,,r':.,'l:.,t:i:rr'].i:,i::.!t'.:.,i,l.:a,,l'.::ra,'.i,," " . r' i l ,,,.:,:].::.i::.::rl::]rr:,;,:::t,:,,,t,.i:.i:t.:fi:l':,rill..ia,it,"l'-'.:l:...:', ,'l.it:la:::lt]i:ri:t,:i;:i.:i:.,'i:r':::l'.'rt:ail.:r'.,t'...':.':r:'ir . ,,,lri:,,j:li:.l'..i.,i',i.].'..i'1.'rt...i.i.1,.j,.: j..i riir',: .,,, I . .

A N D R E S I S TA N C E L O A D H O W T O O R D E R P R E S S U R E S W I T C H GS40 GS40-01 W I R I N G E X A M P L E S U S E D W I T H A S E Q U E N C E C O N T R O L L E R (COM T E R M I N A L I S V E) Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 ! Main Office: (650) 588-9200 ! Outside Local Area: (800) 258-9200 !

f C B h + l A K N N H F F ZZ + l + 2 x strokes S + Stroke H + Stroke ZZ + 2 x strokes V W Cushion valve Port 4 x J G G 2 x P (Rc, NPT, G) M Width across flats KA Width across flats KA MM MM With rod boot (Both sides) E E D D e e C B l + Stroke l AL AL C B f f A K N N A K h + l h + l + Stroke S + Stroke ZZ + 2 x l + 2 x strokes (mm) Bore size (mm) Stroke range (mm) P S N MM M K KA W V J G

50 or less Sulfuric acid ion (SO42) [mg/L] 50 or less p p p p p Acid consumption amount (at pH4.8) [mg/L] 50 or less Total hardness [mg/L] 70 or less [mg/L] 50 or less Calcium hardness (CaCO3) Ionic state silica (SiO2) [mg/L] 30 or less p p p p p p [mg/L] 0.3 or less Iron (Fe) Copper (Cu) [mg/L] 0.1 or less Should not be detected.

w s t a o l F e g a t l o V A 5 2 . 0 V 0 0 1 A 5 2 . 0 V 0 0 1 l e v e l h g i h r o f 2 , ) N O n w o d t a o l F ( l e v e l w o l a r o f 1 x i f f u S d d A . e l b a l i a v a s i h c t i w s t a o l f l e v e l h g i h d n a l e v e l w o l a h t o B : h c t i w s t a o l F * . ) F F O n w o d t a o l F ( h c t i w s 177 Return to Menu NALF Series Specialty Lubricators Auto Feed

R A: 0.19 A P: 0.13 VP VG Grommet (G) Body Ported Base Mounted VZ300 VP S070 M5 x 0.8 0.66 2 3 (A R) VQ L plug connector (L) VKF (Standard) VQZ 100 VAC 50/60 Hz With surge voltage suppressor (G) (L) (M) (D) With light/ surge voltage suppressor (L) (M) (D) VZ500 200 VAC 50/60 Hz 24 VDC VZ VS 2.5 2 3 (A R) (Option) N. C. N. O.

-6 Part no. 105 140 175 210 245 280 315 Description ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 L R L R L R L R L R L R No.

min 216 L/min 540 L/min 10100 L/min 50250 L/min 3.555.0 L/min ( 3.5 L/min 0.0) 1.722.0 L/min ( 1.7 L/min 0.0) 0.355.50 L/min ( 0.35 L/min 0.00) 20350 L/min ( 20 L/min 0) 7140 L/min ( 7 L/min 0) 0.355.50 L/min 1.722.0 L/min 3.555.0 L/min 7140 L/min 20350 L/min 0.01 L/min 0.1 L/min 1 L/min 2 L/min (50 ms) 0.05 L/pulse 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2 L/pulse 090 () 070 ( ) L/minL

ZSM PF2 IF Sensor Flow range Data 4 l/min 20 l/min 40 l/min 1.8 l/min 0.4 l/min 10 l/min 0.4 l/min 4 l/min PF2D504 4.5 l/min 0.25 l/min 1.8 l/min 20 l/min PF2D520 1.3 l/min 21 l/min 4 l/min 40 l/min PF2D540 2.5 l/min 45 l/min Rated flow rate range of sensor Set flow rate range of sensor 16-11-47