ZMA

min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) ZMA10H ZMA13H Exhaust Characteristics Exhaust Characteristics Flow Characteristics Flow Characteristics Max. suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Max. suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure (kPa) Vacuum pressure

EX245-FPS1_2_3_eng

Required screws are as follows: 2 x M5 (End plate: torque = 1.5 Nm) 2 x M5 (SI unit: torque = 1.5 Nm) 4 x M(Valve manifold: refer to valve manifold catalogue) OFF US1 is not present or is below the dropout level (< approx. 17 VDC). Refer to the product catalog or operation manual to obtain more detailed information about outline dimensions.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Table Displacement (Reference Value) L W 0.02 LEJ40 (L = 52.5 mm) LEJ63 (L = 64.5 mm) Displacement [mm] 0.01 0 0 100 200 300 400 500 Load W [N] Note) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

HRX-OM-X071

Connect the stripped cable to the L, N, PE terminals(For 400V, L1, L2, L3, PE) of the female connector. (Recommended tightening torque: 0.7 Nm) Female connector Screw (Recommended thightening torque : 0.7Nm) PE 2(N) 1(L1) 1(L) 2(L2) PE 3(L3) 200V type 400V type Fig 3-5 Cable connection HRR Series 3.3 Installation 3-11 HRX-OM-X071 Chapter 3 Transport and Setting Up 5.

IDX-OM-O004C

(17)(30) 2 2 11.4 IDF15E1-10-M IDF15E1-20-M PC L N PE TB ILS ILS OLR PTC OLR PTC CM CM C02 C01 C11 FM C11 PRS FM PRS P MOV P MOV CM PTC PTC C01 FM PRS C02 OLR PC C11 ILS TB MOV 11 2 12.R R 12 12.1 12.2 1 AC100V AC200V INOUT IDF15E1-10-R IDF15E1-20-R (A) 10 (mA) 30 12.3 M5 9.5mm 1.25mm 2 L ,N N L () () 12 1 12.R AC100V M4 () AC200V (M3) 12.4 () () ONOFF 12 2

IDX-OM-U022

[IDFA150F] R R GFCI PE TB1 THR MC1 CM OLR MC2 FM1 PRR FM2 FM3 T SWL PLC TB2 Y0 1 MC1 COM0 2 MC1 Y3 3 Y1 MC2 COM3 PRS1 4 P X4 5 () PRR COM1 X0 6 THR X1 THS3 THS2 THS1 X2 L N CM PRS2 PRS3 X3 EDV OLR PE P P MC1,2 24V THR THS1,2,3 V V TB1,2 T FM1,2,3 SWL PRR PRS1 PRS2 PRS3 PLC GFCI EDV IDFA100F150F 6 7 6.4 IDX-OM-U022 6. 6.5 ,, IDFA100F150F 6 8 6.5 IDX-OM-U022 6. 6.6

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Air Cylinder/End Lock Series MBB 32, 40, 50, 63, 80, 100 How to Order MBB L 32 50 H N Standard H N L 32 50 A53 MDBB With auto switch Number of auto switches Built-in magnet S 3 n 2 1 3 n Mounting Manual release Basic/Without bracket Axial foot Front flange Rear flange Single clevis Double clevis Center trunnion B L F G C D T Bore size N L Non-locking Locking 32 40 50 63 80 100 Without auto

7

S n Thread type Nil Rc1/4 NPT1/4 G1/4 TN TF Bore size Made to Order MK 40 50 63 40 mm 50 mm 63 mm Refer to page 422 for details.

HRX-OM-W032

min 45 ( 0.31 / 0.45 MPa) Pump capacity 50/60Hz Maximum flow rate L/min 110 / 130 Maximum lifting height m 36 / 50 Circulating fluid system Minimum operating flow rate6 L/min 25 Tank capacity L 25 Port size Rc1 (Symbol F: G1, Symbol N: NPT1) Tank port size Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Supply side pressure range MPa 0.2 to 0.5 Automatic water fill function (Standard) Supply side

Digital Flow Switches Series PF2A

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Note 3) For dimensions of round-type pressure gauge for special application, please contact SMC. 10 Options Digital Pressure Switch ISE35 N 25 M L A Digital Pressure Switch Construction Symbol Description Lock pin M3 x 0.5 x 7 (Aluminum materials screw) N Wiring bottom entry Digital pressure switch (Body only) Electrical entry R Adapter Wiring top entry O-ring Example) Regulator Wiring bottom

HRX-OM-X037

or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/

CJ2

Dd9 d L m t CJ2 l Applicable bore (mm) Applicable snap ring Part no.

2/3 Port Valve

(No need to add options "S" and "L".)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Piping Specification: R 1/8, Option 1: -, Option 2: -, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Piping Specification: NPT 1/8, Option 1: -, Option 2: -, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Piping Specification: ø4 One-touch Fitting, Straight Type, Option 1: -, Option 2: -, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Piping Specification: ø6 One-touch Fitting, Straight Type, Option 1: -, Option 2: -, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Piping Specification: ø6 One-touch Fitting, Elbow Type, Option 1: -, Option 2: -, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Piping Specification: ø1/4" One-touch Fitting, Straight Type, Option 1: -, Option 2: -, Option 3: -