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Note No. q w e r t y u i o !0 !1 !2 !3 !

ENT 84 13 Series LC1 Options T-nuts and T-brackets for Mounting Be sure to use when mounting the controller. Note) The controller unit includes either T-nuts or T-brackets.

VQ0 (VV5Q04)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ1000 (VV5Q14)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ2000 (VV5Q24)-Plug Lead Unit, Flip Type (F, P, T, S kit) .

30 31 52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRS090 Series 5-14 HRX-OM-T004 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

30 31 52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRSH Series 5-14 HRX-OM-R028 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

(Only for EX510-S 02 ) : Only mounting direction of the SI unit to the mounting bracket is different between EX510-S A and EX510-S B. Mounting direction can be changed from horizontal to vertical by changing the screws which construct the mounting bracket.

(A serial-to-parallel converting unit) SI unit T A resistor mounted on both ends of wiring for connecting equipment to field bus. It prevents reflection of a signal at the end and subsequent disturbance of the signal.

T A resistor mounted on both ends of wiring for connecting equipment to field bus. It prevents reflection of a signal at the end and subsequent disturbance of the signal.

AR-OMT0015 PRODUCT NAME REGULATOR MODEL/ Series AR20K-(F,N)01 (F,N)02(B,E,G,H,M)(-1,N,R,Y,Z)-B AR25K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR30K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)02 (F,N)04(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)06(B,E,G,H,M)(-1,N,R,Y,Z)-B AR50K-(F,N)06 (F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B AR60K-(F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B Contents PAGE 1.

Materials Thread type Symbol Nil A G H Manifold material Seal material NBR FKM NBR FKM Rc G NPT Nil F N Brass 1 D side 2 3 4 5 U side Stainless steel OUT port size Stations Series 20 Port size M5 1/8 (6A) 1/4 (8A) Symbol 02 : 10 2 stations : 10 stations 30 10 M5 01 02 Note) IN port sizes are as follows. 10: 1/8 (6A) 20: 1/4 (8A) 30: 3/8 (10A) How to Order Valves (for Manifold) VDW 2 3 5

Regulator with Mist Separator AMR3000 to 6000 Series (Part number for one piece) How to Order Adapter Assembly 03 AMR 4 0 00 02 E 3 Auto-drain Pressure gauge mounting Port size 02 03 04 06 10 ARJ 1 None With auto drain 0 MR unit Flow direction: Right to left Nil Flow direction: Left to right Applicable model 1/4 3/8 1/2 3/4 1 Nil E2 E3 E4 E6 E10 R 3 4 5 6 AMR3 00-02 to 03 AMR4 00-02 to 04

AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 20 10 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 10 5 20 10 0 5 20 10 10 0 5 0 10 Number of needle rotations Number of needle rotations Number

IP65 enclosure is standard Easy to use terminal block type Terminal block How to Order Valve + Sub-plate VQ2 1 0 0 5 W 02 Entries are the same as for standard. Thread type Nil RC N NPT T NPTF Enclosure F G Dustproof Nil IP65 (dusttight/splash proof) W Note) Note) Valve specifications are IP65.

30 31 52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRS Series 5-14 HRX-OM-M091 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

30 31 52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRSH Series 5-14 HRX-OM-Q033 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

30 31 52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRS100/150 Series 5-14 HRX-OM-S010 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

8 H O W T O O R D E R (N)VM400 A C T U AT O R O N LY P A R T N O.

kit r (3) AXT100-2-TA2 Terminal block assembly (8 terminals) T kit t Note 1) A S kit is composed of a flat ribbon cable housing assembly (AXT100-2-PS20) of q SI unit and w P kit (20 pins).

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at knob locked) 55 (at knob locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side IN