Air Preparation Equipment

, 100 Fiber 65 x L250 1, 5, 10, 20 5, 10, 20, 40 74, 105 Micromesh 65 x L250 Refer to pages 256 and 257 for the replacement element type.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Nil Standard P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.

LEH_C

L H L H L H 15 - 1020 /2 713 3 () 30%(F.S.) 25%(F.S.) 20%(F.S.) LEHZ(J) 10,16 20,25 32,40 LEHF 10 20 32,40 LEHS 10 20 32,40 / () 8.2 !

PF2A/PF2W

535 1 5 10 20 50 1 5 10 20 50 16-11-13 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Floating Joint

JB140-22-250 JB160-24-300 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 3 4 5 6 8 10 16 20 22 24 3 4.5 5 6 8.5 10 16 21 17 20 4 6 6.5 8 11 13 20 26 22 26 16 16 21 24 31 41 50 59.5 79 96 2 2 4.5 5 6 7.5 9.5 11.5 14 16 6 6 7 8 11 14 19 24 30 36 5 5 7 8 11 13.5 16 20 22 24 10 10 13 17 22 27 32 41 46 55 13 15 19.5 22.5 29 35.5 47.5 59 71.5 83 0.02 0.02 0.04 0.07 0.15 0.29 0.56 1.04 2.6 4.5 0.5

HRX-OM-Y098

-A-20 CH1) 8.5.2 HRL200-A-20 CH1 0.6 60 Circulating fluid outlet 0.5 50 Lifting head [m] 0.4 40 Pressure [MPa] 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow[L/min] Fig. 8-10 Pump capacity(HRL200-A-20 CH1) HRL Series Documents 8-9 HRX-OM-Y098 Chapter 8 Documents 8.5.3 HRL300A20 CH1 0.7 70 Circulating

MVGQ

-X 20Since there are other applicable auto switches than listed, refer to page 10-16-20 for details. For details about auto switches with pre-wire connector, refer to page 10-20-66.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order/Clean Room Specification Series LJ1H10 Dimensions/LJ1H10 (X60) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting

HRX-OM-R016

0.2 20 0.1 10 Availavel area 0.0 0 0 5 10 15 20 25 Circulating fluid flow[L/min] Fig. 9-9 Pump capacity(HRS030--20-MT) 9.7 Required facility water flow (for water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet temperature[] *The amount of the facility water for the operation with rated circulating fluid, cooling capacity which is described

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

MHR2-10/MDHR2-10 MHR2-20/MDHR2-20 50 60 Overhang distance H (mm) Overhang distance H (mm) 50 40 Pressure 0.2 MPa Pressure 0.2 MPa 40 30 30 0.3 MPa External grip 0.3 MPa 0.4 MPa 20 0.4 MPa 20 0.5 MPa 0.5 MPa 0.6 MPa 10 0.6 MPa 10 0 10 20 30 40 50 0 10 20 30 40 50 60 Gripping point L (mm) Gripping point L (mm) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-

HRX-OM-W060

return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow [L/min] Fig. 8-10 Pump capacity(HRL200-A-20 CH1) HRL Series 8.5 Pump Capacity 8-9 HRX-OM-W060 Chapter 8 Documents 8.5.3 HRL300A20 CH1 0.7 Circulating 0.6 fluid outlet 0.5 Pressure [MPa] Lifting head [m] Lifting head [m] Usable flow rate range 0.4 0.3 Circulating fluid return 0.2 0.1 0 0 20 40 60 80 100 120

MRHQ

0 10 20 30 40 50 60 0 10 20 30 40 50 F F Gripping point L mm Gripping point L mm MRHQ16D MRHQ16D Pressure 0.7MPa External gripping 60 50 0.6MPa 50 Pressure 0.7MPa Gripping force N Gripping force N 0.5MPa 40 0.4MPa 0.5MPa 0.6MPa 40 0.4MPa 30 30 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 10 10 L L 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20D MRHQ20D Internal

Compact Cylinder

Minimum Auto Switch Mounting Stroke (mm) Auto switch model Bore size (mm) D-A9 A9V D-M9 D-M9V D-F9W D-F9WV D-F9BAL Number of auto switches 2 pcs. 10 5 15 10 20 10 15 20 1 pc. 5 5 15 5 20 10 15 2 pcs. 10 5 10 10 20 10 10 25,32,40,50 1 pc. 5 5 10 5 20 10 10 2 pcs. 10 5 10 10 15 10 10 63 1 pc. 5 5 10 5 15 5 5 Besides the models listed in How to Order, the following auto switches are applicable

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

MHR2-10/MDHR2-10 MHR2-20/MDHR2-20 50 60 Overhang distance H (mm) Overhang distance H (mm) 50 40 Pressure Pressure 40 30 External hold 0.2MPa 0.2MPa 30 0.3MPa 0.3MPa 0.4MPa 20 0.4MPa 20 0.5MPa 0.5MPa 0.6MPa 10 0.6MPa 10 0 10 20 30 40 50 0 10 20 30 40 50 60 Holding point L (mm) Holding point L (mm) MHR2-15/MDHR2-15 MHR2-30/MDHR2-30 80 50 H 70 Overhang distance H (mm) Overhang distance H (mm

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

24 Series MGZR Double Power Cylinder (Without non-rotating mechanism) Double Clevis Bracket DX B Z + Stroke DB DD 4-DT B DS DH MX MTS 4-DR DA DU DU DL DC DE DO DO MY Bore size (mm) 22 22 30 30 45 45 60 CY DX DS DH Z DDH10 DC DT DU DR DO DL DE B DA DB Model 20 25 32 40 50 63 80 14 14 20 20 30 30 32 7 7 8 8 10 10 14 44 44 60 60 86 86 110 15 15 18 18 22 22 24 10 10 11.5 11.5 14 14 15 6.6 6.6

LEF-OM002xx

to 760 10 to 300 701800 Note2) Stroke 30 to 930 20 to 620 10 to 300 801900 Speed range [mm/s] 30 to 780 20 to 520 10 to 250 9011000 30 to 660 20 to 440 10 to 220 10011100 Actuator specification 30 to 570 20 to 380 10 to 190 11011200 20 to 500 30 to 500 10 to 250 1000 Driver type LECPA Note2) Stroke 30 to 500 20 to 440 10 to 220 Speed 10011100 range [mm/s] 30 to 500 20 to 380 10 to 190 11011200

MY1

20 30 100 2 3 4 5 10 20 30 0.5 40 50 100 Load mass (kg) Load mass (kg) 40 Horizontal collision: P = 0.5 MPa 20 Horizontal collision: P = 0.5 MPa 2000 1500 2000 1500 Collision speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 100 1 2 3 4 5 10 20 30 1002 3 4 5 10 20 50 Caution 40 50 Load mass (kg) Load mass (kg) 1.

Stability of suction position,

CL 2 5 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50BM ZP3E-125BM ZP3 12 30 S, F S, F 25 Displacement [mm] Displacement [mm] ZP3E ZP3E 20 8 N N ZP2 15 U U 10 4 ZP2V CL CL 5 ZP 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZPT ZPR ZP3E-63BM XT661 16 N, S, F Displacement [mm]

Thermo-chiller

) Ambient temperature 104F (40C) 10 10 8 8 Ambient temperature 113F (45C) Ambient temperature 113F (45C) 6 6 4 4 2 2 0 0 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] HRS150-W -20/40(50 Hz) HRS150-W -20/40(60 Hz) 20 20 Facility water temperature 90F (32C)

CXWM/CXWL

10 15 15 20 MS4-10 MS5-10 MS6-15 MS6-15 MS8-20 Left Right Left Right Operating direction of the housing Operating direction of the housing Manufactured by Misumi Trading Ltd.