Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Connector Type: S (M12 connector type)

Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Connector Type: S (M12 connector type)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Connector Type: S (M12 connector type)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type)

Series 10-MGF ø40, ø63, ø100 Guide Table

Fittings & Tubing Air Cylinders Rotary Actuators V D C D C E F H A + Stroke B + Stroke GB GA T X PP (Rc, NPT, G): Relief port 2 x P (Rc, NPT, G) Port for extension Port for retraction When the cylinder is extended KA: T-slot for hexagon bolt 4 x M K KB KC 6-K (6 positions) 10 10 M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) GB D A 170 140 10 10 38 38 36.5 E B F KC 11 11

ITVH

The pressure in the pilot chamber r increases and operates on the upper surface of the diaphragm t. As a result, the air supply valve y linked to the diaphragm t opens, and a portion of the supply pressure becomes output pressure. This output pressure feeds back to the control circuit i via the pressure sensor u.

Series 10-MGF Guide table ø40, ø63, ø100

When actually mounting an auto switch, adjust the position after confirming the operating state of the auto switch. 95 Guide table10-MGF Dimensions 10-MGF40/63/100 4-N V D C D C E F H A + Stroke B + Stroke GB GA T X PP (Rc, NPT, G): Relief port 2-P(Rc, NPT, G) Port for extension Port for retraction When the cylinder is extended KA: T-slot for hexagon bolt 4-M K KB KC 6-K (6 positions) 9 9

Microspeed Cylinder: Double Acting/Single Rod Series CJ2X ø 10, ø 16 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Note 16 CJ-L016B CJ-F016B CJ-T016B 10 16 Foot bracket Flange bracket T-bracket Common for models D-C7, D-C8, and D-H7 BJ2-010 BJ2-016 Caution 1. For Series CJ2X, up to 0.1Nl/min (ANR) of internal leakage is anticipated due to cylinder structure. T-bracket is applicable to double clevis type (D). 2

Super Mist-Separator NAME Series

Tebxi 27-2184 1't [,/l 3/94 Spectfications subiect to clunge wilhout notce.

VF1000-OMP0001

DIN (D) L (L) M (M) DC +DIN +-1 2 (G) A C S DIN DIN DIN DIN DIN D 68mm Y 4.57mm T 68mm E 2.32.8mm E, T 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S D,Y R Y Z EZTZDZLZMZ AC24V (+) D C S VF1000 VF1000 VF1000 VF1000 VF3000 VF3000 VF3000 VF3000 VF5000 VF5000 VF5000 VF5000 () P P(SUP) P A B A(CYL2) B(CYL1) A B EA EB R1(EXH2) R2(EXH1) R1 R2 (B)2 4(A) (B)2 4(A) (R2)3 1 5(R1) (P) (R2)3 1 5(R1

PF2D

0 e New PFA q Body New PFA w Sensor Super PFA e Tube PPS r Housing A PPS t Housing B PPS y Housing C POM u Bushing PPS i Cap FKM o Gasket FKM !0 O-ring Stainless steel 304 !1 Thread PVC !2 Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Pneumatic Purification

10 1/4 2.48 0.39 1.46 0.84 AFF-EL2B 6.78 AFF4B-N03C-T 26 3/8 2.99 0.39 1.46 1.21 AFF-EL4B 8.04 AFF8B-N04C-T 53 1/2 3.55 0.39 1.46 1.98 AFF-EL8B 8.87 AFF11B-N06C-T 73 3/4 4.18 0.39 1.46 3.09 AFF-EL11B 10.2 AFF22B-N10C-T 123 1 4.8 0.39 1.46 4.63 AFF-EL22B 14.22 AFF37B-N14D-T 212 1 1/2 6.3 0.39 1.46 9.26 AFF-EL37B 18.64 AFF75B-N20D-T 424 2 8.67 0.39 1.46 23.15 AFF-EL75B 18.64 AFW675-N20-E1 675

VXH

V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) Class B G C D, T S S L, Z Note) Be sure to read this before handling the products.

Fluoropolymer Piping Equipment

A SMC LVN30 S 10 08 B Different dia. tubing size (B side) Applicable tubing size (A side) 938 High Purity Fluoropolymer Needle Valve LVN Series Standard Specifications Model LVN20 LVN30 LVN40 4, 6 Tubing O.D.

Suction Filter with Case FH99 Series

View port View port G1/2 Refer to page 529 for Microswitch for differential pressure indication switch. 504 A Suction Filter with Case FH99 Series Dimensions Differential pressure indication switch Blanking cap Differential pressure indicator 8 x T 16 (65) N I (34) E F U OUT X H O 62 B U U R S 4 x K OUT OUT Q P IN Differential pressure indicator Differential pressure indication switch G

Compact Cylinder Series NCQ8

1 r t !2 !

FC2W-X110

Recommended 2 port solenoid valves Operating temperature range/Fluid temperature range 0 to 50C (No condensation) Control accuracy 5%F .S.

VXH

Refer to pages 17-6-3 to 17-6-10 for Safety Instructions and Solenoid Valve Precautions. 4 ' C ' C 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) ) D G C D, T S S L, Z 3 ) E E 3 0 ( 2 17-3-69 2 The VX series will be revised shortly. Series VXH Construction/Dimensions Material C3771 Note No.

VQ4000

VQ4100 17mS (Single) 100 million cycles VFS VQ4200 12mS (Double) According to SMC life test conditions Enclosure: VS Optional IP65 rating Dispersion accuracy 3mS L S kit (Lead wire) kit (Serial transmission) VS7 Optional IP65 is available.

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Note 2) 1 (P) 3 (R) Note 3) 1.13-4 Series VQD1000 Construction JIS Symbol (A) 4 (B) 2 Part name Component Parts Note Material No. q w e r t y u i o !0 Solenoid coil assembly Sub-plate Body Spool valve Poppet Guide ring Return spring Manual override Gasket Round head screw VQD1000-S-M5(Base mounted only) Aluminum ZDC 1 (P) 3 (R) q u e !