Compact Vacuum Ejector Series ZQ

U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.

Compact Cylinder

19 7 JCQ Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height D-M9m D-M9mW D-M9mA D-M9mV D-M9mWV D-M9mAV U A B [mm] Auto Switch Proper Mounting Position [mm] Auto Switch Mounting Height D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV A B 12 5 2.5 16 5.5 3 20 6 6 25 6 7.5 32 8 8 40 11 9 50 11.5 11 63 13.5 13.5 80 16.5 18 100 19.5 21 Auto

3 Position Cylinder Series RZQ

D-A80 =U B + First-stage stroke =U B A D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-Y7NTL D-F7BAL B + First-stage stroke =U SMC =U B A D-A73C D-A80C D-J79C B + First-stage stroke =U =U B A D-A79W D-F7WV D-F7V D-F7BAVL B + First-stage stroke =U SMC =U B A 11 3 Position Cylinder Series RZQ D-A9 D-F9 D-F9W D-A9V D-F9V D-F9WV D-F9BAL B =U =U A B + First-stage stroke 50 or larger bore size D-P5DW

Rotary One-touch Fittings Series KS/KX

Model r e b m u N A f o t r o P l e d o M g n i t r o P e z i s t r o P B e z i s t r o P A c i r t e M " 2 3 / 5 " 4 " 4 / 1 " 6 " 6 1 / 5 " 8 t r o P A t r o P B h c n I 1 1 M K h c u o t e n O g n i t t i f g n i t t i f h c u o t e n O 0 1 , 6 6 1 / 5 8 8 / 3 0 1 2 / 1 2 1 2 1 M K h c u o t e n O g n i t t i f d a e r h t T P N 0 1 , 6 4 / 1 T P N ) T P ( c R 4 / 1 d a e r h

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Instantaneous flow: L/min cfm Accumulated flow: L ft3 L3 IO-Link/ NPN/PNP Analog 1 to 5 V Analog 0 to 10 V*3 ZS-33-D ZS-33-F L4 IO-Link/ NPN/PNP Analog 4 to 20 mA + ZS-33-D *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

Air Slide Table

Reed auto switch: D-A9, D-A9V Solid state auto switch: D-M9(A), D-M9W D-M9 Compact auto switch D-A9 5 Air Slide Table MXQ Series Functional Options ' With buffer mechanism Protects workpieces and tools by eliminating impact at the extension stroke end Buffer unit is auto switch capable.

3-Position Rotary Table

MSQ Angle adjustment Range Figure 5 MSZ MSZ CRQ2X MSQX ad a ge ju Cl lt MRQ an st bo oc t r m nd en g k en tm wi in e us 10 10 se t r st on dj a ju an r on ti ot ad iti ta os ge at p ro er y nt io e b C e b n y is e ge n ad w d k an c ju lo t r C st in en g m bo st lt ju b ad M 0 ax 19 im e u ng m ra ro n ta tio Center position adjustment Table 2 R: Clockwise adjustment L: Counterclockwise

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

D-B5, B6 20 to 100 D-G5, K5, G5W D-K59W 20 to 100 Hs Hs 24.5 24.5 B A B A Auto Switch Proper Mounting Position (Detection at Stroke End) (mm) Auto Switch Mounting Height (mm) Auto switch model D-M9 D-M9W D-G5/K59 D-G5W/K59W D-B5 D-B64 D-A9 Auto switch model D-G5/K5 D-G5W D-K59W D-B5/B6 D-M9 D-M9W D-A9 Bore size Bore size A 41 40.5 42 39 46 44.5 A 31.5 31 32.5 29.5 36.5 35 48 47 A 37 36.5

Heavy Duty Stopper Cylinder

Note 5) Dimensions other than those marked (LA) are the same as the basic type (no locking type). 598 RS2H Series Auto Switch Mounting 1 Auto Switch Proper Mounting Position (Detection at Stroke End) D-M9 D-M9W D-M9AV D-M9V D-M9WV D-M9A D-A9 D-A9V A B Auto switch Auto Switch Proper Mounting Position (mm) Auto switch model D-M9 D-M9W D-M9AV D-M9V D-M9WV D-M9A D-A9 D-A9V A 9.0 B 23.5 A 11.0

Suction Guard (Produced upon receipt of order) FHG Series

PEND Petroleum CW-6H Water-glycol, Emulsion For 2 1/2B, 3B CW-6H-W Phosphoric ester CW-6H-V Petroleum D-73H Water-glycol, Emulsion For 1/2B to 1B D-73H-W Phosphoric ester D-73H-V Petroleum D-74H Cap Water-glycol, Emulsion For 1 1/4B to 2B D-74H-W Phosphoric ester D-74H-V Petroleum D-75H Water-glycol, Emulsion For 2 1/2B, 3B D-75H-W Phosphoric ester D-75H-V 506 Suction Guard FHG Series How

ZR

06 ZZR1 R 1 R1 ZR1 1 1 RV ZR1 Port location Stations R L Left side Right side 01 1 Arrangement (Right valve station which is looked from valve side is first station.) Arrangement (Right valve station which is looked from valve side is first station.)

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

of ge ge an an n r tio ta n r Ro +8 0 io Ro tat tat Ro 80 io t 1 n r fla an ge gle of sin +10 0 Ro tat 90 ion t 1 ra fla ng le e o ing f s With external stopper For 90 For 180 Single flat Single flat A n 5 5 gl e ge ge ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port A port B port A port 90 A 5 n gl ge e an ad t r ju en st m 180 Note) The drawings

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port A port B port A port 90 A 5 n gl ge e an ad t r ju en st m 180 Note) The drawings show the rotation range for the shaft's single flat.

MHF2

Protrusion of Auto switch Lead wire type In-line entry Perpendicular entry Illustration MHZ Auto switch Hysteresis L L Auto switch operating position (ON) Finger position MHF Auto switch operating position (OFF) MHL D-M9 D-F9W D-M9V D-F9WV Model MHR Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close 4.5 4.5 4.5

MHF2

Protrusion of Auto switch Lead wire type In-line entry Perpendicular entry Illustration MHZ Auto switch Hysteresis L L Auto switch operating position (ON) Finger position MHF Auto switch operating position (OFF) MHL D-M9 D-F9W D-M9V D-F9WV Model MHR Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close 4.5 4.5 4.5

VHK

P port size SlA 04F 06F 08F 10F 12F 4 Knob color 6 VlA Blue Gray A port size 2 port valve 3 port valve (Standard) 8 10 04F 06F 08F 10F 12F 4 2 port valve 3 port valve R (Option) Red 12 6 M5 M5 X 0.8 8 10 VM/VR 01S 02S 03S 04S 1 8 1 4 3 8 1 2 R(PT) R(PT) 12 VH M5 R(PT) M5 X 0.8 01S 02S 03S 04S 1 8 1 4 3 8 1 2 R(PT) R(PT) R(PT) R(PT) R(PT) Standard 1(P): One-touch/2(A): One-touch 1(P): One-touch

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Auto Switch Mounting Height (mm) Auto switch model Band mounting D-C7m/C80 D-H7m/H7mW D-H7NF D-H7BA D-M9mV D-M9mWV D-M9mAV D-A9mV D-M9m D-M9mW D-M9mA D-A9m D-C73C D-C80C D-H7C D-A7m D-A80 Hs Hs Hs Hs Hs Hs Bore size 10 17 18 17 19.5 20 16.5 16 20.5 21 20.5 23 23.5 19.5 (mm) Auto switch model Rail mounting D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-A9m D-A9mV D-A7mH/A80H D-F7m/J79 D-F7mW

CP95

2 pcs. 25 15 D-Z80L 1 pcs.

CP95

2 pcs. 25 15 D-Z80L 1 pcs.

Pin Clamp Cylinder Series CKQ/CLKQ

mounting type Applicable auto switch: D-A79W D-A7 D-A80 D-A7H D-A80H D-A73C D-A80C D-F7WV D-F7BAL D-F7BAVL D-F7W D-J79W D-F7NTL D-F79F D-F7V D-J79C D-F7 D-J79 [For CLKQ] [For CKQ] B A B A U U Direct mounting type Applicable auto switch: D-A9 D-A9V D-F9WV D-F9BAL D-M9V D-F9W [For CKQ] D-A9, D-F9W D-A9V, D-M9V D-F9WV D-F9BA U U B A [For CLKQ] D-A9, D-F9W D-A9V, D-M9V