SMC Corporation of America
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2400bps 19200bps 57600bps 2400bps 19200bps 57600bps Reading of Step Data /Direct Operation Step Data (1 word) 155 25 10 90 15 10 Setting of Step Data /Direct Operation Step Data (1 word) 190 30 10 110 20 10 Reading of input signal status (1 bit) 145 20 10 85 15 10 Reading of output signal status and internal flags (1 bit) 145 20 10 85 15 10 Reading of internal parameters (7 words) 270 40 15 150

. +2 +5 +20 Assy +25 +45 +50 [g] ZZQ101-BSB 115 ZZQ101-BSC 130 ZZQ101-BPB 150 ZZQ101-BPC 155 ZZQ101-OB 105 ZZQ101-OC 120 1 +2 (x ) + () + (1 x ) ZQ1-V114-5LU-A ZQ1-V124-5MU-A ZQ1-VQ110L-5L-A / DC24V -10 to 10 (%) 0.4W 1W L M L ( 2 1.7mm 0.2 to 0.33mm ) V100VQ100 33 - No.ZQ-OM01401-B 9.4 ZSE10 [kPa] 0 to -101 -100 to 100 [kPa] 10 to -105 -105 to 105 [kPa] 500 [kPa]

ZL3-EP1-1 -A 1 1 Rc F G N NP 7 ZL3/ZL6 GZ33-K1K-01-X56 (kPa ) GZ33-K1K-01-X56 (inHg/psi ) * *inHg/psi 8 ZL3 ZL3-AD3-A 19 No.ZL3-OM00801-A 8. 8.1 ZL3 12 1 22 3(0.760.84Nm) (ZL3-SE1-A) 1 2 8.2 ZL6 ZL6 P6 8.3 1) 2) 3)2 4) 5kPa 5) 6) 7) 20 No.ZL3-OM00801-A 9. 9.1 ZL3 ZL3M ZL3H [mm] 1.9 1.5 [MPa] 0.35 0.50 *1 -91 -93 [MPa] 280 [L/min(ANR)] + *2 300 [L/min(ANR)] 150

Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) IDF Series 6-2 GWP 6 2 IDX-OM-W011 6 6-3 IDF1E / IDF2E /IDF3E ( 10 IDF3E-20 [AC100V] :0.8m) (:1.9m) [ AC200V ] [ AC200V ] (17) mm A B C D E F G H J K L M N P Q IDF1E Rc3/8 69 101 270 32 21 330 IDF3E Rc3/8 473 67 304 33 73 31 36 154 21 330 226 410 413 125 240 15 38 150

circulating water pH [25oC] 6.5~8.2 6.5~8.0 6.8~8.0 Conductivity (mS/) [25oC] 80 or less 30 or less 40 or less Standard items Chloride ion (mg/L) 200 or less 50 or less 50 or less Sulphate ion (mg/L) 200 or less 50 or less 50 or less Acid consumption [pH4.8](mgCaCO3/L) 100 or less 50 or less 50 or less Total hardness (mgCaCO3/L) 200 or less 70 or less 70 or less Calcium hardness (mgCaCO3/L) 150

No gap Booster regulator Air tank Booster regulator A B C D E F G H I J K L M Grooves There should be no damage or dust O-rings VBAT05A1 VBA10A VBA11A 150 374 370 307 163 160 100 200 Rc 3/8 257 60 Rc 1/4 20 Air tank There is a slight play on the diagonal parts.

O 1.5MPa OUT VBATA1--X104 VBAT-V1 OUT 4 11 () 1 VBAT05A1-U-X104 VBAT10A1-U-X104 1.5MPa Q235B 5L 10L 075 6.6kg 11.5kg IN 3/8 VBAT-V1 OUT 3/8 1/2 1/4 VBA1 VBA1/VBA2 TSG R0003-2007 2 () IN (I) :VBA1 4VBA2 8 6 : OUT VBA2 (J) Rc3/8 VBA1 OUT IN Rc1/2 Rc3/8 () OUT VBA1 12~14Nm(R1/4) VBA2 22~24Nm(R3/8) OUT O Rc1/4 O A B C D E F G H I J K L M O VBAT05A1 VBA10A VBA11A 150

R0003-2007 2 () IN :VBA2 8VBA4 8 10 (I) 6 : Rc3/8 OUT (J) OUT Rc1/2 IN Rc1/2 () OUT VBA2 22~24Nm(R3/8) VBA4 28~30Nm(R1/2) OUT O Rc1/4 O A B C D E F G H I J K L M O VBA20A VBA22A 481 444 394 Rc3/8 59 VBAT20A1 VBAT20A1 216 700 520 477 429.8 180 200 100 400 Rc1/2 305 236 Rc1/2 85 VBA42A VBA20A VBA22A 531 494 444 Rc3/8 59 IN OUT VBAT38A1 VBAT20A1 252 873 570 527 479.8 205 250 150

U-X104 / /VBAT10S-Y-4 () VBAT-U 30 1 1 VBA1 4 O VBA1 1 /VBAT5S-Y-4 1 1 / 1 VBAT-U 1 1 ( 3 ) VBAT-V1 () () / / VBAT-M46C / VBAT-M46 VBAT05S1-U-X104 2 OUT VBAT-M46C VBAT05S1-U-X104 VBAT10S1-U-X104 IN VBAT05S1-U-X104 VBAT10S1-U-X104 VBA1 VBA1/VBA2 VBA2 5.3kg 8kg 5L 10L OUT 3/8 1/2 TSG R0003-2007 1.5MPa SUS304 0~75 oC 1/4 IN 3/8 O VBA1 1 SMC VBAT-V1 1 VBA11A 150

VBAT38S1-T-X104 13kg 19kg 20L 38L OUT 1/2 3/4 O IN TSG R0003-2007 VBA2/VBA4 1.0MPa SUS304 0~75 oC 1/4 IN 1/2 1 SMC VBAT-V1 1 305 236 355 250 A B C D E F G H I J K L M 444 394 Rc3/8 59 494 444 Rc3/8 59 85 85 IN Rc1/2 Rc1/2 Rc3/4 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer Rc1/2 Rc1/2 180 200 100 400 205 250 150

82No.PS-OMV0003CN-G ISE70 ISE71 IP67 AC1000 V 1 50 M(DC500 V ) 050 -1060 () 3585RH() UL/CSA(E216656)CE EMC RoHS IO-Link IO-Link V1.1 COM2(38.4 kbps) 5 IODD 2.3 ms (IO-Link ) Input Data2 byteOutput Data0 byte ID 131(0x0083) ID ISE70-*-L2-*307(0x0133) ISE71-*-L2-*308(0x0134) 1(0 ms) 2 3 MPa/kPa 490 5https://www.smcworld.com 6 02 N02 F02 Rc1/4 NPT1/4 G1/4 C3604()HNBR 153 g 152 g 150

Displays the diagnosis status of the unit. 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 Minor communication error. Fatal communication error. The element in SI unit is broken. Connection is not established. Communication is normal. Double checking the node address. Communication error. The power supply for control and input is Off.

The power supply for control and input is Off. 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 The SI unit has recognized the communication speed, but the address setting of the master is incorrect. The configuration data of the master and device are not consistent. The address of the SI unit is set to 0, or to 126 or over.

mm]: Manifold length L2 [mm]: Mounting pitch L1 [mm]: Rail length L4 [mm] L3 [mm]: Manifold length L2 [mm]: Mounting pitch L1 [mm]: Rail length Dimensions ( unit: mm ) When only input blocks of 8-point-integrated type are connected When only input blocks for M8 connector are connected Stations 1 2 3 4 5 6 7 8 Stations 1 2 35 44.2 L2 ( Rail mounting pitch: 12.5 ) 87.5 100 112.5 125 137.5 150

Displays the diagnosis status of the unit. 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 Communication error has occurred. Communication is normal. Communication is not established. Or, the power supply for control or input is Off. A unit other than the SI unit has been diagnosed and detected. The power supply voltage for output is abnormal.

10 to 50C35 to 85%RH (with no condensation)500 VAC for 1 min. between external terminals and FG10 M or more (500 VDC) between external terminals and FG10 to 150 Hz with a 0.035 mm amplitude or 4.9 m/s2 in each X, Y, Z direction for 2 hrs (De-energized)147 m/s2 in each X, Y, Z direction, 3 times (De-energized)CE marking, UL (CSA)130 g (including accessories)

In addition, the LES series is available in an optional symmetric style *.Reduced tact time - 5,000 mm/s¦ max. acceleration, 400 mm/s max. speed , Positioning repeatability: within ¦0.05 mm , Positioning pattern outputs: 64 points , Compact and space saving , Applicable strokes: 50, 75, 100, 150, HI RIGIDITY ELECTRIC SLIDE TABLE, ELECTRIC ACTUATOR, A34, 3.86000 lb

The multi-stage ZL series is a high-efficiency vacuum generator, which operates at 150% efficiency (compared to about 40% for other units). For each scfm of compressed air it consumes, the ZL generates an incredible 1.587 scfm of suction flow. The ZL is available with a built-in vacuum switch with digital readout for design flexibility.

The multi-stage ZL series is a high-efficiency vacuum generator, which operates at 150% efficiency (compared to about 40% for other units). For each scfm of compressed air it consumes, the ZL generates an incredible 1.587 scfm of suction flow. The ZL is available with a built-in vacuum switch with digital readout for design flexibility.

Standardized mounting options conform to both ISO 21287 and 6431.Conforms with the ISO 21287 standard, Bore sizes of 20, 25, 32, 40, 50, 63, 80 & 100 mm, Large stroke range from 5 mm up to 150 mm, Construction is similar to the current CQ2 lateral load resistant specification, Snap ring construction allows easy and quicker maintenance, Auto switches can be mounted on any of the four sides