0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%

0.021250/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l4236Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type17.5 (78)524 VDC ?10%

type: stacking, P (IN), A (OUT) type: Common IN/Individual OUT, Valve stations: 2 to 5, Tubing size (port P): 3/8, 1/2., 3/4, Tubing size (port A): 1/4, 3/8, 1/2, 3/4, MFLD BASE, REQ SHIKOMI/RSTRCTD, VALVE, FLUOROPOLYMER, 2.54320 lb, ModelManifold typeP (IN), A (OUT) typeValve stationsTubing size (port P)Tubing size (port A)LLC4AStacking typeCommon IN/Individual OUT2 to 5 stations3/41

Oval pad with buffer , Lateral vacuum inlet direction , 12 pad sizes , Pad material: NBR, silicone rubber, urethane rubber, FKM, conductive NBR, conductive silicone rubber, Oval Pad with Buffer, VACUUM PAD, ZP, ZP2, ZP3, 41 lb

High Vacuum L Type Valve

Maintenance part) 3 (Valve seal 2) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41

XL-OMY0001

/ AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41

XL-OMV0002

3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1)/ 2)16 PTC() 200V 200 PTC 150 100V PTC Ass'y 0 5 10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

maintenance part) 6 (SUS304) Bellows (material: SUS316L) 5 Valve (material: SUS304) () 2 Valve seal (maintenance part) 4 (A6063) C C C C D D D D Body (material: A6063) K C C C C E E E E E E E E KF flange F F F Fn n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41

AC Servo Motor Driver (Pulse input type/Positioning type)

. * In this configuration, the stroke end (LSP, LSN), forced stop (EM1) and servo-on (SON) signals will be ON automatically when the power is turned ON. 41 - 5.5.2 Initial I/O Signal Allocation (1) Position control mode (pulse input): The initial (Default) allocation of I/O signals is shown below.

CEx-OMQ0013

DOWN 1 WRITE " STEP0 " " PRG 1 STEP 0 " End 1 WRITE READ End0.0STEP1 PRG 1 STEP 1 " " No.1 " 1 WRITE STEP2 PRG 1 STEP 2 " " WRITE " WRITE End 1 40 EndErr7 <> P1 P8 S1 50.0 68.0 S2 300.0 30.5 S3 30.0 S0 END END PROGRAM " " PRG 1 STEP 0 2 WRITE " End End0.0 2 LEFT PRG 1 STEP 1 " " UP 5 " " 5 UP PRG 1 STEP 1 " " 5 " " 1 WRITE 2 PRG 1 STEP 2 " " 3 LEFT " " UP 3 3 ) 41

CEx-OMG0106

Reset MIN50msec Homing SetHome Man'l / Auto Start Man'l(+) Man'l(-) Pause (Output) Driving(+) Driving(-) Brake Origin Determined (1) Position Determined (1) Program END Error Cylinder Movement I N I T I A L I Origin Z E D POWER ON Note: Homing will be executed, only on RUN mode and during automatic executing. (1) Timing between stopping till output is a preseted timing, t1(preset data P7). 41

Rotary Table

Push nut side (Piston) End cover assembly Hexagon socket head cap screw Hexagon socket head cap screw Cover assembly Fig. 24 Fig. 25 41 - Troubleshooting Problem Possible cause Solution Supply pressure is not applied correctly. Correctly set the regulator at the supply pressure side.

MRQB-OM0002

A80H IC 2 24V 12V A80C IC PLC A73C (2 ) A79W 0.5m () A73C 3m L () A73CL 5m Z () A73CZ N () A73CN 6-2. ,56mm ,0.5[Nm] BQ-2 1 6.1 24 6-3. 6.2 6.3 D-A7A8 D-F779 D-F779W 32 12 8 [mm] 40 11 6 7 32 [mm] 40 2 1 1 32 8.5(9) 9 9 A [mm] 40 11(11.5) 11.5 11.5 D-A7A8 D-F77979W 32 55 28 [deg] 40 46 27 32 10 4 [deg] 40 7 3 80100 24.5(25) 25 32 170190 32(32.5) 32.5 B [mm] 40 170190 41

LEF-OM002xx

Crack on the back of the belt s 41 - 6.5 How to detach and attach the dust seal band For the internal-check as the maintenance, the method of detaching and attaching the dust seal band is shown as the following. 1. Loosen the fixing bolts of end side of the Band holder. (The picture shows LEFB, but LEFS is same instruction as LEFB.)

LEF-OM006xx

/LEFS /P12,13 2.2 /LEFB -41- No. 5 2 /P30 4. ) 0 /P21 3. 3 ] /P21 3. 3 ] INC/ /P21 3. 3] / No./code1-051 15ms IN* 30ms DRIVE /P25 1) No. RESET 15ms 3 30ms /P25 1) No. No. 4 PLC No. 15ms 1IN* 30ms DRIVE /P25 1) / No. OUT 15ms 2 30msmsec /P25 1) No. OUT -42- No. No. PLC /P25 1) No.

JXCx-OMT0005CN

.85 Output 36Byte Byte12,13 Byte 12 1 *1 *2 1mm/s 2 13 Byte14,15 Byte 14 1 *1 *2 1mm/s 2 15 Byte16,17 Byte 16 *1 *2 1% 17 *1 *2 21(P.85 40 - Byte18,19 Byte 18 *1 *2 1% 19 Byte20,21 Byte 20 *1 *2 1mm/s 21 Byte22,23 Byte 22 *1 *2 1% 23 Byte24-271 Byte 24 1 -+ *2 0.01mm 25 26 27 Byte28-312 Byte 28 2 -+ *2 0.01mm 29 30 31 Byte32-35 Byte 32 *1 *2 0.01mm 33 34 36 *1 *2 21(P.85 41

JXCx-OMT0001CN

) . 24 3.9 EtherNet/IP . 25 (1) . 25 (2) PLC . 25 (3) LED . 25 3.10 PLC . 25 4. . 26 4.1. . 26 4.2 EtherNet/IP . 27 4.3. . 28 4.4. . 30 -1No.JXC-OMT0001CN-C 1 . 30 2DIN . 30 4.5 . 31 (1) . 31 (2) . 32 (3) . 33 5. . 34 5.1 (IP ) . 34 5.2 PLC () . 35 TM . 36 TMEtherNet/IP 5.3 RSLogix5000 6. . 38 6.1 . 38 (1):C PWR . 38 (2):M PWR . 38 (3) : CI . 39 6.2 . 40 (1) . 40 (2) . 41

JXCx-OMT0028CN

8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 ID9 160179 ID1 ID10 180199 ID1 ID11 200219 ID1 ID12 220239 ID1 240249 250253 254,255 (GW [IN Data] Address.14 Address.17) 4 codeAddress.14 Address.14 Address.17 ) Address.15 Address.14 (code:1-148) 00h 94h 15bit 8bit 7bit 0bit code 3 (1-***) () Address.17 Address.16 code: 1148 00h 00h 15bit 8bit 7bit 0bit 16 =94h () 41

AUTO SWITCH, AUTO-SWITCH, 605, 41 lb

EQUIPMENT, AC MASS PRO, DC, AC MASS PRO 1/4 MODULAR (NPT), 1.64696 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingRecommended lubricantBowl materialBowl guardRegulator constructionMass (kg)Filter regulatorLubricatorAC20AAW20AL201/8, 1/41