Option: SKAN (Fieldbus Type, Negative Common, I/O Link), Lead Wire: None, Stations: 6 Stations, SUP/EXH Block: D (D Side, 2 to 10 Stations), Pilot Type: Internal Pilot, Port Size: GN9 (Inch Size Screw Fitting, Stainless Steel Fitting; A,B Port: ø5/16")

Option: L1 (Lead Wire, 34 Cores), Lead Wire: 05 (5m), Stations: 6 Stations, SUP/EXH Block: D (D Side, 2 to 10 Stations), Pilot Type: Internal Pilot, Port Size: 02F (w/o Fitting; A,B Port: G1/4 Thread Piping)

Option: L1 (Lead Wire, 34 Cores), Lead Wire: 05 (5m), Stations: 6 Stations, SUP/EXH Block: D (D Side, 2 to 10 Stations), Pilot Type: Internal Pilot, Port Size: GN9 (Inch Size Screw Fitting, Stainless Steel Fitting; A,B Port: ø5/16")

Option: SKAN (Fieldbus Type, Negative Common, I/O Link), Lead Wire: None, Stations: 6 Stations, SUP/EXH Block: D (D Side, 2 to 10 Stations), Pilot Type: Internal Pilot, Port Size: G10 (Metric Size Screw Fitting, Stainless Steel Fitting; A,B Port: ø10)

Option: SKAN (Fieldbus Type, Negative Common, I/O Link), Lead Wire: None, Stations: 6 Stations, SUP/EXH Block: D (D Side, 2 to 10 Stations), Pilot Type: Internal Pilot, Port Size: GN11 (Inch Size Screw Fitting, Stainless Steel Fitting; A,B Port: ø3/8")

Option: SKAN (Fieldbus Type, Negative Common, I/O Link), Lead Wire: None, Stations: 6 Stations, SUP/EXH Block: D (D Side, 2 to 10 Stations), Pilot Type: Internal Pilot, Port Size: 02F (w/o Fitting; A,B Port: G1/4 Thread Piping)

Option: L1 (Lead Wire, 34 Cores), Lead Wire: 10 (10m), Stations: 6 Stations, SUP/EXH Block: D (D Side, 2 to 10 Stations), Pilot Type: Internal Pilot, Port Size: GN11 (Inch Size Screw Fitting, Stainless Steel Fitting; A,B Port: ø3/8")

Size: 25, Motor Mounting: D (In-line Type), Motor Type: A (Servo Motor, 24 VDC), Lead: B (LEY25, 6; LEY32/40, 8), Stroke: 400mm, Motor: w/o Lock, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: F (Rod Flange), Actuator Cable Length: 5m, Controller Type (LEC, JXC): 6P (LECA6, Step Data Input Type, PNP), I/O Cable Length for LEC: 1 (1.5m), Controller Mounting: D (

Base mounted plug-in manifold for VQ5*0* valve, Maximum 12 stations available as standard, D-sub connector reduces installation labor for electrical connection, D-sub connector - 25 pin, Select top or side receptacle position to meet available space requirement, 6 port sizes available, VV5Q51/55 BASE MT 1/2, VALVE, VV5Q51/55 MANIFOLD, RM, VV5Q51/55 BASE MT 1/2, 18.73929 lb

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3019Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3019Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

The use of 34 pin connectors allows up to 16 stations with double solenoids.Tie rod base manifold for SV1000 valve, D-sub connector or flat ribbon cable, Maximum number of solenoids: 24, Number of connectors: 26, 25, 20, 10 pins, Maximum 20 stations available as standard, 6 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN, D-SUB CONNECTOR, VALVE, SS5V1 MANIFOLD SV1000, UN

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5