8 ) 1 0 8DI 10h EX600-DXC1 (8 ) () 1 0 8DI 10h EX600-DXD (16 ) 2 0 16DI 11h EX600-DXE (16 ) 2 0 16DI 11h EX600-DXF (16 ) 2 0 16DI 11h EX600-DYB (8 ) 0 1 8DO 20h EX600-DYE (16 ) 0 2 16DO 21h EX600-DYE1 (24 ) 0 3 24DO 22h EX600-DYF (16 ) 0 2 16DO 21h EX600-DME (8/8 ) 1 1 8DX 30h EX600-DMF (8/8 ) 1 1 8DX 30h EX600-AXA 4 (2 byte/1 ) 0 2AI 51h (2 ) (2 ) 0 4 EX600-AYA (2 byte/1 ) 2AO 61h
01(R) Note 1) Option Note 2) When two or more symbols are specified, indicate them alphabetically. (2) 01 [Rc 1/8] 02 [Rc 1/4] 02 [Rc 1/4] 03 [Rc 3/8] VQZ200 VQZ200-S(2) VQZ300 VQZ300-S(2) Note) Symbol R indicates an external pilot.
(Standard) G1/8 NPT1/8 M6 With bracket (Shipped together) Grommet W Y 2 x 3.4 Mounting hole (Standard) G1/8 NPT1/8 M6 1 Applicable for air type (VDW0) and water type (VDW2). 2 When G or NPT is selected, choose the 1/8 port size standard model. 3 When M6 is selected, choose the M5 port size standard model. 4 When using deionized water or any other fluid that may corrode C37 (brass), select
only) *4 *5 Control unit (Supply port: Right side) Nil R S Right angle *5 *6 L Control unit piping specifications *8 Gap checker piping specifications Supply port piping specifications C Rc1/4 F G1/4 *9 Centralized lead wire (With bracket) *4 *5 *4: Cannot be selected for 1 station.
Plug (P) Socket (S) Male thread type Male thread type Body size Part no. Body size Port size Part no. Port size R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KKH3S-01MS -02MS KKH4S-01MS -02MS -03MS -04MS 1/8 1/8 1/4 1/4 Female thread type Female thread type Body size Port size Part no.
P . 15-11-3 15-9-2 2 Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS How to Order 2 2 0 01 06 S AS 1F Nil Option Body size 1 2 3 4 M3, M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard None With seal Hexagonal lock nut Electroless nickel plated S K N If more than one option is required, write option part numbers in the order of S, K, N.
piLl lanp lighls wh6n hlo swilches a turned ON Eran0e P$s!
~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".
Adaptor connection thread Symbol Pad dia. 1 02 to 08 B5 2 10 to 16 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [qAdaptor] R S ZP 04 A5 [wR type adaptor] Symbol S Pad dia. 02 to 16 L 20 to 50 With Buffer ZP R 16 K20 A10 06 UGN [Pad model no.]
4 2 5 A 10 x 8 3/4" x 5/8" 5 1 5 B 19 x 16 1/2" x 3/8" 5 2 6 A 12 x 10 1" x 7/8" SMC 6 1 6 B 25 x 22 3/4" x 5/8" 6 2 19 x 16 : Basic size : With reducer Note) Please select an isometric fitting with the same size as the fitting at the flow sensor.
98 27 28.5 M28 x 1 28.5 1/8, 1/4 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28
40 98 27 28.5 M28 x 1 2 1/8, 1/4 29.5 1/8 53 117 29 29.5 M38 x 1.5 2.5 1/4, 3/8 34 1/4 70 148 41 34 M42 x 1.5 1 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28
Content GR-S-010 GR-S-010 GR-S-010 Grease 10 g (Lithium) Grease 10 g (Lithium) GR-S-010 Consult SMC when replacing the actuating cylinders. Consult SMC when replacing the actuating cylinders. Guide Pins Assembly List Description Material Note No. Clamp Arm Assembly List Description Material Note No. Parallel pin wr !4 Cotter pin e !
Content GR-S-010 GR-S-010 Grease 10 g (Lithium) Grease 10 g (Lithium) GR-S-010 GR-S-010 Consult SMC when replacing the actuating cylinders. Consult SMC when replacing the actuating cylinders. Guide Pins Assembly List Description Material Note No. Clamp Arm Assembly List Description Material Note No. Parallel pin wr !4 Cotter pin e !
Content GR-S-010 GR-S-010 Grease 10 g (Lithium) Grease 10 g (Lithium) GR-S-010 GR-S-010 Consult SMC when replacing the actuating cylinders. Consult SMC when replacing the actuating cylinders. Guide Pins Assembly List Description Material Note No. Clamp Arm Assembly List Description Material Note No. Parallel pin wr !4 Cotter pin e !
Content GR-S-010 GR-S-010 Grease 10 g (Lithium) Grease 10 g (Lithium) GR-S-010 GR-S-010 Consult SMC when replacing the actuating cylinders. Consult SMC when replacing the actuating cylinders. Guide Pins Assembly List Description Material Note No. Clamp Arm Assembly List Description Material Note No. Parallel pin wr !4 Cotter pin e !
Grease pack part no.: GR-S-010 (10 g) 144
Speed controller to open the finger(O) Speed controller to close the finger(S) JAS-LEA04-M5 JAS-LEB04-M5 Handle Air supply port Port symbol 18 - 4-8. Connection of the auto switch and sensor harness For the wiring connection between the sensor harness on the duAro arm and each auto switch of this product, refer to the operation manual of the duAro main unit.
Content GR-S-010 GR-S-010 GR-S-010 Grease 10 g (Lithium) Grease 10 g (Lithium) GR-S-010 Consult SMC when replacing the actuating cylinders. Consult SMC when replacing the actuating cylinders. Guide Pins Assembly List Description Material Note No. Clamp Arm Assembly List Description Material Note No. Parallel pin wr !4 Cotter pin e !
Content GR-S-010 GR-S-010 Grease 10 g (Lithium) Grease 10 g (Lithium) GR-S-010 GR-S-010 Consult SMC when replacing the actuating cylinders. Consult SMC when replacing the actuating cylinders. Guide Pins Assembly List Description Material Note No. Clamp Arm Assembly List Description Material Note No. Parallel pin wr !4 Cotter pin e !