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D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Table of Contents

r r u u u Drain Drain Drain Component Parts Material No.

Modular F.R.L. Units

IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

SX

S 5 VDC R 3 VDC 1-6-55 56 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x

Vacuum System Peripherals:

(R) Vacuum spec. (V) Standard External pilot spec. (R) Standard External pilot spec. (R) Vacuum spec. (V) Standard External pilot spec. (R) Vacuum spec. (V) Port size Vacuum spec.

LJ1H

Nil Standard motor SMC controller Series LC1 compatible L R Left Right Lead screw lead G R Y Matsushita Electric Industrial Co., Ltd.

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 90. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P) (B) 2 (

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

r t . : . , t . : r r l ' r i . r t , : t r ' r r r , . a a . . r . r . , r r , , .

0.4

r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5

VQZ1000/2000/3000

(A) AC circuit DC circuit 1 2 1 2 (B) NL: Neon light R: Resister LED: Emitting diode R: Resister Valve Mounting NL R R LED After confirming the gasket is correctly placed under the valve, securely tighten the bolts with the proper torque shown in the table below.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

center (A) 4 (B) 2 SX q t r w 5 (R) 3 (R) 1 (P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R) 3 (R) 1 (P) 3 position pressure center u (A) 4 (B) 2 3 (R) 1 (P) 5 (R) (This figure shows a closed center type.) 5 (R) 3 (R) 1 (P) Component Parts Replacement Parts Note Zinc die-casted Part no.

AC

Therefore, piston r receives the case's internal pressure at its bottom, and with the additional force of spring t, piston r is pushed upward, thus returning to the sealing position of seal y.

Made to Order

(for std model) R V R V CQ2 CQP2 Series Model Action XC6A Standard model no. R V CQ2 -Z Water-resistant compact cylinder Double acting, Single rod Applicable to 20, 25, 32.

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Note 2) V, S and R specifications are 45T, 45T1.

SZ3000

SZ3B60 [N.C. valve x 2 pcs.] 4(A) 2(B) r t !0 !1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !

Pressure Gauge Guide

This will cause a malfunction. 8 1 R , 4 1 R G 1 4 The dimensions in ( ): Connecting thread R X2: Stud parts nickle plated 8 1 R PPA 8 1 R , 4 1 R AL 8 1 R , 4 1 R X3: Wetted parts stainless steel MPa 8 1 R 8 1 R , 4 1 R 8 1 R , 4 1 R X4: Oil-free (Wetted parts degreasing) 8 1 R 8 1 R , 4 1 R How to Order G 43 01 Option Connection thread size Symbol Specifications Nil X2 X3 Stud parts nickel