Please contact us for the latest version.sales@ocaire.com, MFLD BASE, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, 21, VV5Q* NO SIZE RATING, .00000 lb, ModelPort sizeMass (Bottom ported)Mass (Rear ported)Leakage02R1/4117 g89 g1 x 10?5 Pa?m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
5 to 120/5 to 50Slide screw + Wedge cam?0.02?0.050.5 or less150/30605 to 4090 or less (No condensation)1265? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%36/13?61?
5 to 120/5 to 50Slide screw + Slide camLinear guide (No circulation)?0.02?0.051.0 or less150/30605 to 4090 or less (No condensation)1120? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%34/13?57?
CEU1 No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12