Tubing (Reducer) Straight Different diameter straight Elbow Plug-in elbow Reducer elbow Plug-in reducer Union tee Different diameter tee Cross union Union Y Plug-in Y Different diameter union Y H L R T Symbol Applicable tubing O.D. Size 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Symbol Accessory TW 01 03 05 07 09 11 13 Name Nipple Reducer nipple Tube cap Plug U KQ2N KQ2C KQ2P 34
Base Mounted Plug-in Unit How to Order Manifold VQC1000 Series kit F P VV5QC 1 1 08 FD1 C6 M L T VV5QC 1 1 08 SDQ C6 S kit Base mounted plug-in VQC1000 series Enter EX600-compliant S kit only. Enter EX250-compliant S kit only. Valve stations Input block specification (Enter EX250-compliant S kit only.)
Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket
Cylinder / Low Profile And High Precision Guide Series CY1F 10,15,25 ll ll l h l pact mpact pact mp m ler overall length ler overall length ller overall length ll ll 29% reduction in height 29% reduction in height 2 29% reduction in height Overall length reduced 31% Ove Ove O 31% 31% 31% CY1F MY2H CY1H CY1F Height mm CY1H 10 15 25 Series CY1F CY1H 28 34 46 46 63 39.5 Overall length mm h i h h t
Weight (g) M T(M) L Part No. Nylon Urethane 4 KGE06-00 KGE04-00 26 33 52 70 KGE08-00 KGE10-00 5.6 13.1 18.0 29.5 5.6 13.1 26.1 41.5 14 32.5 16 17 34.5 17 19 38 18.5 24 42.5 21 M12 1 M14 1 M16 1 M20 1 M22 1 44 22 58.3 46.1 90 KGE12-00 23 13 15 17 21 6 8 10 12 27 16 32 M28 1.5 51 25 113 (96) 115 KGE16-00 29 Note) ( ): Values for soft nylon.
capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T
A and C Corrected air flow = 350 (0.75 x 1.00) = 467 l/min (ANR) 3 Based on condition t, B and C Corrected air flow = 1200 (0.95 x 0.90) = 1400 l/min (ANR) 3 Based on condition y; IDUS4E is selected as the model to process an air flow larger than 467 l/min (ANR) with a 50Hz power supply, according to data D-1.
Thead NPT T Applicable tube O.D. F (inch) Part No.
OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 SGDE servo pack R U V 2 1MC M T 3 W 1CN 4 150 1 2 3 4 5 6 PULS PULS SIGN SIGN CLR CLR Be sure to ground.
MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S 40.8 40.8 46.7 67.3 67.3 73.2 73.2 E 14.6 20 24 29 35 40 52 EY 39.5 45.5 53.5 67 83 106 129 EB 30 32 38 50 57 66 77 EC 5.8 5.8 6.5 8.5 10 14 14 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 F 4 4 6 6 6 6 6 T 6 6
1 q t i PF2D540 o !0 u !0 !2ywr e !1 q t i Series PF2D For Deionized Water and Chemicals Digital Flow Switch Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuits and wiring examples 60 70 176 z to , are terminal numbers.
By comparing this average pressure value with the set pressure value, switch output (ON//OFF) is determined. t (ms) t (ms) Time
Weight (g) M L T(M) Part No. Nylon Urethane 4 KGE06-00 KGE04-00 26 33 52 70 KGE08-00 KGE10-00 5.6 13.1 18.0 29.5 5.6 13.1 26.1 41.5 14 32.5 16 17 34.5 17 19 38 18.5 24 42.5 21 13 15 17 21 M12 1 M14 1 M16 1 M20 1 M22 1 44 22 58.3 46.1 90 KGE12-00 23 6 8 10 12 27 16 32 M28 1.5 51 25 113 (96) 115 KGE16-00 29 Note) ( ): Values for soft nylon.
Mounting hole T (M) Part No. Nylon Urethane L1 L2 M 1 4 1 4 3 8 3 8 3 8 KCE04-02 KCE06-02 KCE08-03 KCE10-03 KCE12-03 2.6 32 36 42 79 105 2.6 6.8 16.2 25.6 35.4 M12 1 M14 1 M16 1 M20 1 M22 1 40.5 42.7 49.4 53.9 56.1 14 17 19 24 27 17 17 19 22 24 14.7 14.7 15 14.2 13.7 13 15 17 21 23 18 19 21.5 24 25.5 6.8 13.1 20.4 30.4 Straight: KCH Applicable tube O.D.
Features 2 Air Cylinder/Single Rod Series MB 32, 40, 50, 63, 80, 100, 125 How to Order Standard MB L 32 50 50 L 32 Y7BW MDB With auto switch Number of auto switches Built-in magnet S 3 n 2 1 3 n Auto switch Mounting Without auto switch Basic/Without bracket Axial foot Front flange Rear flange Single clevis Double clevis Center trunnion B L F G C D T Bore size Refer to table below for
T-slots l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) LXP M5 x 0.8 7.4 8.5 Use bolts at least 0.5mm shorter than the maximum screw-in depth, so they do not touch the body.
Construction Tubing Integral fittings e y t e t i r y !6 r u i u q o q !0 o !1 !0 w !1 !2 w !2 Parts list !3 No.
Q P R O D U C T S Q Q Q Q Q Q 3 Q Q 3 Port 100/200/300 Series VQZ Base Mounted & Body Ported High speed and Long life. Response time Life VQZ100 10ms VQZ200 12ms 200 million cycles VQZ300 15ms Dispersion accuracy 2ms * Life: Metal seal type * Response time: Metal seal, single solenoid with light and surge voltage supressor.
Pressure Temporary fluctuation P1 P2 Set point value
Mounting style Front trunnion style Rear trunnion style Double Clevis style Front nose mount Basic style Single clevis Axial foot style Front flange style Rear flange style U T D N B C L F G Auto switch Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below. Nose mount with air cushion is not available in 20 and 25mm.