5 to 120/5 to 50Slide screw + Slide camLinear guide (No circulation)?0.02?0.051.0 or less150/30605 to 4090 or less (No condensation)1760? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%36/13?61?

5 to 120/5 to 50Slide screw + Slide camLinear guide (No circulation)?0.02?0.051.0 or less150/30605 to 4090 or less (No condensation)1760? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%36/13?61?

Please contact us for the latest version.sales@ocaire.com, MANIFOLD, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, 21, VV5Q* NO SIZE RATING, .00000 lb, ModelPort sizeMass (Bottom ported)Mass (Rear ported)Leakage02R1/4117 g89 g1 x 10?5 Pa?m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

Please contact us for the latest version.sales@ocaire.com, MFLD BASE, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, 21, VV5Q* NO SIZE RATING, .00000 lb, ModelPort sizeMass (Bottom ported)Mass (Rear ported)Leakage02R1/4117 g89 g1 x 10?5 Pa?m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

BASE, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, 21, VV5Q* NO SIZE RATING, .00000 lb, ModelPort sizeMass (Bottom ported)Mass (Rear ported)Leakage02R1/4117 g89 g1 x 10?5 Pa?m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

SPL., VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, 21, VV5Q* NO SIZE RATING, .00000 lb, ModelPort sizeMass (Bottom ported)Mass (Rear ported)Leakage02R1/4117 g89 g1 x 10?5 Pa?m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

BASE, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, 21, VV5Q* NO SIZE RATING, .00000 lb, ModelPort sizeMass (Bottom ported)Mass (Rear ported)Leakage02R1/4117 g89 g1 x 10?5 Pa?m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

Please contact us for the latest version.sales@ocaire.com, MANIFOLD ASSY.,SPL., VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, 21, VV5Q* NO SIZE RATING, .00000 lb, ModelPort sizeMass (Bottom ported)Mass (Rear ported)Leakage02R1/4117 g89 g1 x 10?5 Pa?m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

Please contact us for the latest version.sales@ocaire.com, MANIFOLD BASE, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, 21, VV5Q* NO SIZE RATING, .00000 lb, ModelPort sizeMass (Bottom ported)Mass (Rear ported)Leakage02R1/4117 g89 g1 x 10?5 Pa?m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

Please contact us for the latest version.sales@ocaire.com, MANIFOLD BASE ASSY., VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, 21, VV5Q* NO SIZE RATING, .00000 lb, ModelPort sizeMass (Bottom ported)Mass (Rear ported)Leakage02R1/4117 g89 g1 x 10?5 Pa?m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

Please contact us for the latest version.sales@ocaire.com, MFLD BASE, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, 21, VV5Q* NO SIZE RATING, .00000 lb, ModelPort sizeMass (Bottom ported)Mass (Rear ported)Leakage02R1/4117 g89 g1 x 10?5 Pa?m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

Please contact us for the latest version.sales@ocaire.com, MFLD BASE, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, 21, VV5Q* NO SIZE RATING, .00000 lb, ModelPort sizeMass (Bottom ported)Mass (Rear ported)Leakage02R1/4117 g89 g1 x 10?5 Pa?m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

WIRING, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, 21, VV5Q* NO SIZE RATING, .00000 lb, ModelPort sizeMass (Bottom ported)Mass (Rear ported)Leakage02R1/4117 g89 g1 x 10?5 Pa?m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

Please contact us for the latest version.sales@ocaire.com, MFLD BASE, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, 21, VV5Q* NO SIZE RATING, .00000 lb, ModelPort sizeMass (Bottom ported)Mass (Rear ported)Leakage02R1/4117 g89 g1 x 10?5 Pa?m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

Please contact us for the latest version.sales@ocaire.com, 13-STATION MANIFOLD ASSY, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, 21, VV5Q* NO SIZE RATING, .00000 lb, ModelPort sizeMass (Bottom ported)Mass (Rear ported)Leakage02R1/4117 g89 g1 x 10?5 Pa?m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

Please contact us for the latest version.sales@ocaire.com, MANIFOLD BASE, SPL, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, 21, VV5Q* NO SIZE RATING, .00000 lb, ModelPort sizeMass (Bottom ported)Mass (Rear ported)Leakage02R1/4117 g89 g1 x 10?5 Pa?m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)800Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type1.38

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76