Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators Operating port 2 x M5 x 0.8 6.3 26 12 5.5 12.5 12 Other dimensions are the same as basic type. 802 MXQ 1322Air Slide Table Dimensions: MXQ6L / Symmetric Type 1322Basic ZZ Z Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc.

100

Pressure switch for vacuum with energy saving function Circuit diagram ZL6 -K2 B2 5 Z -E F ZL6 -K2 B2 5 Z With supply valve and release valve With pressure switch for vacuum with energy saving function ZL6 -K1 B1 5 Z ZL6 -K15L0Z-V W With supply valve With supply valve and vacuum pressure switch Specific Product Precautions 30 A ZL1/ZL3/ZL6 Series Specific Product Precautions 1 Be sure to

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

+ 1/2 stroke Z + 1/2 stroke Width across flats KA S + Stroke H + Stroke ZZ + 2 Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com With rod boot Z + l + 1/2 stroke l l ZZ + l + 2 stroke (With rod boot on one side) ZZ + 2l + 2 stroke (With rod boot on both sides

CL

Without rod boot Z 190 207 214 241 With rod boot ZZ 211 228 238 269 Bore size (mm) Z 210 229 236 261 ZZ 231 250 260 289 20 25 32 40 9-2-31 30 Series CLG1 Basic Style with Air Cushion: CLG1BA Refer to page 9-2-31 for mounting bracket, since the dimensions except GA, P , WA, WB, WH, WW, W are the same.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

x Y m2 x g x Y m3 x g x Z Z M3 m3 x g x X m4 x g x Y m4 x g Note) m4 is a weight movable by thrust.

PSE530/200

ZSE ISE PSE Z I SE3 PS Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Insulation cover O.D. 1.0 to 1.4 Connector part no. Wire core size Sensor part no.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

g Vertical mounting Mounting orientation Horizontal mounting Ceiling mounting Wall mounting Vertical mounting m1 m2 m3 m4 Note) M3 Static load (m) M1 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment z y Y M2 m1 x g x Y m2 x g x Y m3 x g x Z Z M3 m3 x g x X m4 x g x Y m4 x g Note) m4 is a weight movable by thrust.

Stopper Cylinder

Stroke 2 x P (Rc, NPT, G) M E J Q F Z Stroke 32 40 50 RSQB -DZ (Double acting) Bore size: 32, 40, 50 M E J 2 x P (Rc, NPT, G) T 0 0.1 D Q F Z Stroke M E J T 0 0.1 D Width across flats K A + 2 stroke B + Stroke V H + Stroke 2 x P (Rc, NPT, G) E M 4 x N through 8 x O counterbore Q F Z Stroke T 0 0.1 Width across flats K A + 2 stroke B + Stroke V H + Stroke D M E J E M 4 x N through 8 x O counterbore

ISA2

ZSE ISE PSE Z I SE3 2 Port Solenoid Valve Series VCA PS Precautions on Design Warning Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

ZZ (NN 1) x H G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 2.5 +0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4

SMC

ZZ (NN1) x H G 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 depth 3.5 +0.030 0 5 B A NN-M5 x 0.8 thread depth 10 4H9 depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 HA 40 40 40

MGG

C 4-O D Q 2-P T U W E S K L B AA A X AB I J R AP Y + Stroke V Z + Stroke Non-locking type Locking type 8-AF AC AD AE With rod side locking Q Y + Stroke R With head side locking For standard strokes Dimensions not marked with an "" are the same as standard.

Modular Type Filter Regulator Series AW

Note 8) AW30, 40 Z Note 7) AW20 to 40 When more than one specification is required, indicate in ascending alphanumeric order.

Tie-rod Type Hydraulic Cylinder

type: CHAT Z + 1/2 stroke 2 x Rc P Cushion adjustment screw 4 x J GA TT Air release GB T V Air release Width across flats G MM R (max.)

SMC Pneumatic Clean Series

MM 2-LC LX D D I LZ 20, 25 Width across flats B2 Standard port MM Relief port 45 45 Width across flats NA LT N 4-LD N X Y S + Stroke X Y Z LS + Stroke Z + Stroke ZZ + 2 x Stroke 32, 40 (mm) 11 8 8 8 Z H H2 H1 S P N I F A 13 8 AL D K MM NA NN B1 B2 G 54 47 47 40 B ZZ 188 154 152 144 LX 55 40 40 40 LH 30 28 28 25 LT LS LD 4 4 4 4 LC 75 55 55 55 LZ X Y 40 32 25 20 Bore size 1/8 27 25 25 21 24

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

rail mounting (mm) F Model AA Z S M J H MXP6-5 2 45 5 37 33.5 38 25 MXP6-10 9.5 60 10 47 48.5 53 35 8-8-15 15 Series MXP Dimensions: MXP10 2-M3 x 0.5, depth 3 Z 3 Metal stopper 2-M3 x 0.5, depth 5 V K 5 4 G Max. 5.5 Max. 3.5 N 20 M Stroke: S MXP10-10 A Piping port Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators S ZZ SS 20 10 9 2 x 4.3 through Z 2 x 8 counterbore depth 4.4 18 5 30 1 M6 x 1.0 x 5 L (Hexagon socket set screw) 450.2 450.2 48 56 25 58 6.3 5 2 x M4 x 0.7 thread depth 6 1 M4 x 0.7 x 14.5 L and M4 x 0.7 (Hexagon bolt) (Hexagon nut) 9 M5 x 0.8 x 10 L (Hexagon socket head cap screw) 2 x M5 x 0.8 (Through-hole) (Z) 2 x M5 x 0.8 thread depth

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

9 5 1 35 0.2 35 0.2 33.6 46 44 20 6.3 5 2.1 2-M4 x 0.7 (through) M4 x 0.7 x 14.5l and M4 x 0.7 (hexagon bolt) (hexagon nut) 7.5 2-M3 x 0.5 (through) 20 (Z) 4-M3 x 0.5 thread depth 4.5 (same on reverse side) 4-M5 x 0.8 thread depth 4.5 (piping port) (same on reverse side) 7 3 8.5 30 8 Model S ZZ Z SS CXS10-10-XB19 10 82 65 CXS10-15-XB19 15 87 70 30 (20) (Z) 2-M4 x 0.7 Thread depth 7 CXS10-

e-Rodless Actuator

Coordinates and moments Static moment z Horizontal mounting M3: Yawing M2 M1 y X x Y M1: Pitching m1 x g y x M2: Rolling Ceiling mounting Dynamic moment M2 M1 y Y X x Z M1 m2 x g Wall mounting mn x a M1E M3 M3E mn x a FE FE Y M3 a: Set acceleration degree, : Set speed M2 z X Z m3 x g x Mounting orientation Horizontal mounting Ceiling mounting Wall mounting Dynamic load (FE) Mounting orientation

ZSE F/ISE

1 High Precision, Digital Pressure Switch For General Fluids Series ZSE F/ISE 50 60 50 60 ZSE ISE PSE Z I SE3 PS Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Data High precision/High resolution pressure switch.