Air cylinder

Cushion ring 1 7 Cushion ring B 1 8 Bushing 1 9 Cushion valve 2 10 Snap ring 2 11 Tie rod 4 12 Tie rod nut 8 13 Wear ring 1 14 Rod seal 1 15 Piston seal 1 16 Cushion seal 2 17 Cushion valve seal 2 18 Cylinder tube gasket 2 19 Piston gasket 1 20 Rod end nut 1 21 Magnet (1) 33 Revision history A: 125 added B: Correct the part number of the mounting bolt 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Precision Regulator

Leakage due to deterioration of the rubber part. 7Troubleshooting 1 Reduction of the set pressure There is leakage from the ports other than the bonnet breathing hole and exhaust port. 4 Increased leakage from the bonnet breathing hole and exhaust port 3 Slow response 9 -12- 8 Dimensions -13- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +

Angular Type Air Gripper

. -3- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

MHF2-E

Refer to Disassembly Drawing on page 12 for the part No. and the replacement procedure of the finger assembly and the body assembly. 16 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

CYBx-OM0001H

With floating joint 13 Internal Construction and Parts List A 14 Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

In-line Air Filter

Unlocked Locked (2) Lock mechanism (7) (3) Product no. display (6) Body Element (4) (5) Cover Raised part of the cover 12 - Revision history Rev.A: The ZFC1series and ZFC3 series added. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

VNA Series

Detailed content of the failure Operating cycle Operating fluid Machine used Operating temperature Fluid pressure Pilot pressure 9 VN-OMA0002-D B Renewal PS Revision history C Renewal RP D Renewal RY 1st printing: 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior

Parallel Type Air Gripper

.: GR-S-010 (10 g) H = With hose nipple, K = With One-touch fitting, M = With M3 port, E = Side ported The end boss assembly other than type E should be mounted on the special body. 16 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice

Regulator Valve

*If the product has failed, then please return the valve as it is. 12 VEX-OMA0002-E Revision history AE ARenewal EP A BE ARenewal NR A CE ASafety Instructions Po A DE ARenewal TY A EE ARenewal VX 1st printing :EP 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior

air-filter-e

NBR JIS B 2401.P12 q Seal 10 x t1 Fluororesin NBR Fluororesin Nylon Fluororesin Fluororesin (Antistatic specifications) Nylon Fluororesin Nylon Fluororesin 101 x t2 98 x t5 w Gasket e Seal Note 3) 23 x t1 r Seal 10 x t1 t Seal 20 x t1 Note 1) The quantity used for 1 filter is 1 each for the following seals, gaskets and O-rings.

MPC

Application Example Aligning different sizes of packages on conveyor: MPC Series Specifications Specifications Table Supply Exhaust 1/4 OD ports 40mm 25mm Bore Vent 100mm 50mm Stroke 16mm 12mm Rod diameter Extend 880 N (199 lbf) 344 N (78 lbf) M12 Pin Callout Thrust at 80psi (theoretical) Retract 739 N (166 lbf) 264 N (59 lbf) Power (BRN) 0.7 Mpa (101 psi) Maximum pressure 1 Input signal

Doc. no.MX*-OMG0114

Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

240

tapped hole, drilled hole and pin hole additionally -XC79 -XB13 Low speed cylinder (5 to 50 mm/s) Theoretical Output -XC3 Special port location (N) -XC19 Intermediate stroke (Spacer type) Piston area (mm2) Operating pressure (MPa) Rod size (mm) Bore size (mm) Operating direction -XC22 Fluororubber seal 0.3 0.5 0.7 19 14 8 OUT 28 6 3 14 10 6 IN 21 55 39 23 OUT 78 10 4 46 33 19 IN 66 141 101

SL5200

25.4) 0.21 30 5 0.17 25 0.14 20 A Connections (mm) inch FV4 MV4 TW4 FV6 MV6 TW6 0.10 15 (70.6) 2.78 0.07 10 2.12 (53.8) 0.03 5 3.86 (98.0) 0.00 0 0 5 10 15 20 25 30 35 40 45 50 Flow rate (slpm, N2) 2.65 (67.3) SL5201A High flow option Inlet pressure: 2 psig (14 kPa) Standard 760 0 700 -8 Delivery pressure (Hg abs) 600 -21 Delivery pressure (kPa) 500 -35 400 -48 300 -61 200 -75 100 -88 -101

Dual Speed Controller with One-touch Fitting Series ASD 1

12.8 74 17 48.3 25.2 20.3 8 ASD530F-02-08S 15.2 76 18.5 51.3 28.2 41.9 46.9 48.8 43.8 19.8 23 15.4 R 1/4 19 42.8 37.8 10 ASD530F-02-10S 18.5 80 21 54.1 32.6 23.1 12 ASD530F-02-12S 83 20.9 22 55.9 34.4 6 ASD530F-03-06S 74 17 12.8 48.3 25.2 20.3 8 ASD530F-03-08S 93 18.5 15.2 51.3 28.2 41.9 46.9 46.5 41.5 19.8 23 14 R 3/8 19 40 35 10 ASD530F-03-10S 98 21 54.1 32.6 18.5 23.1 12 ASD530F-03-12S 101

AS-FPQ/AS-FPG

Operating Pressure Particulate Generation Grade Classifications 1.2 104 Average particle concentration Particles/ft3 Max. operating pressure MPa Grade 4 1.0 103 0.8 Grade 3 102 0.6 101 Grade 2 100 0.4 Grade 1 10-1 0.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 15-17-3 4 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06 Body size 1 2 3 4 M5 standard

ASD

25.2 48.3 20.3 8 ASD530F-02-08S 15.2 18.5 76 28.2 51.3 41.9 46.9 48.8 43.8 23 19.8 15.4 R(PT)1/4 19 42.8 37.8 10 ASD530F-02-10S 21 18.5 80 32.6 54.1 23.1 12 ASD530F-02-12S 22 20.9 83 34.4 55.9 6 ASD530F-03-06S 17 74 12.8 25.2 48.3 20.3 8 ASD530F-03-08S 18.5 93 28.2 51.3 15.2 41.9 46.9 46.5 41.5 23 19.8 14 R(PT)3/8 19 40 35 10 ASD530F-03-10S 21 98 32.6 54.1 18.5 23.1 12 22 ASD530F-03-12S 101

Pneumatic Purification

(Agoura Hills) 30497 Canwood Street Suite 101 Agoura Hills, CA 91301 Tel: (818) 865 8740 Fax: (818) 865 8742 SMC Pneumatics Inc. (Portland) 14107 NE Airport Way Portland, OR 97230 Tel: (503) 252 9299 Fax: (503) 252 9253 SMC Pneumatics Inc. (Denver) 4910 Fox Street Unit C Denver, CO 80216 Tel: (303) 293 9322 Fax: (303) 293 9376 SMC Pneumatics Inc.

Pneumatic Purification

(Agoura Hills) 30497 Canwood Street Suite 101 Agoura Hills, CA 91301 Tel: (818) 865 8740 Fax: (818) 865 8742 SMC Pneumatics Inc. (Portland) 14107 NE Airport Way Portland, OR 97230 Tel: (503) 252 9299 Fax: (503) 252 9253 SMC Pneumatics Inc. (Denver) 4910 Fox Street Unit C Denver, CO 80216 Tel: (303) 293 9322 Fax: (303) 293 9376 SMC Pneumatics Inc.

MGZ Series

The theoretical output for extension is 1924N, from the theoretical output table on page 5. 20 80 50 50 50 40 60 40 40 30 40 20 10 0 0 Note: 1kg = 2.2046lb 1in = 25.4mm 1MPa = 145psi 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Operating pressure P (MPa) Operating pressure P (MPa) Selection Graphs to (Horizontal Mounting) Graph l: 100mm or less Graph l: 101 to 200mm Graph l