Air Suction Filter

ZFA100 Port size Symbol Model A B 18 20 28 ZFA200 1 8 1 4 Manifold Pitch (Section F-F') Port size (The above diagram is for ZFA200) ZFA100 Port size Symbol Model A B 19 18 24 28 ZFA200 1 8 1 4 Number of manifold stations Symbol Single unit Note) Model 2 56 68 76 88 3 74 86 104 116 4 92 104 132 144 5 110 122 160 172 6 128 140 188 200 7 148 158 216 228 8 164 176 244 256 9 182 194 272 284 10

MHx-OMY0005

:GR-S-010(10g):GR-L-005(5g) 14 3-3. 2 (MHF2-8D2MHF2-12D20D) 1. 2. 8:12:R 1620:C ABC 3. (8:) (12 ) :GR-S-010(10g):GR-L-005(5g)GR-L-010(10g) 8 2 12 2.5 16 3 20 4 B C C 8 A 12 0.9 16 C MHF2-8D2 20 1.3 MHF2-12D* R MHF2-8D2 8 1.5 12 2 16 2.5 20 3 12 15 3-4. /1 MHF2-8DMHF2-8D1 1 16 2 17 3 18 4 19 5 20 NBR 6 21 NBR 7 8 A 9 B 10 C 11 12 13 14 15 MHF2-8D

CJ2Q

Bore d C B H NTJ-015A 10 16 8.1 9.2 7 8 3.2 4 M4 X 0.7 NTJ-010A M5 X 0.8 * Refer to p.1.3-12 for details of the mounting nut. (mm) ND NN Bore 10 16 A B C D F GA GB H MM NA NB S Z 0 0.022 0 0.022 15 12 14 4 8 8 5 28 M4 X 0.7 12.5 9.5 M8 X 1.0 46 74 75 8 15 18 20 5 8 8 5 28 M5 X 0.8 12.5 9.5 M10 X 1.0 47 10 Refer to p.1.3-8 to 1.3-10 for dimensions of each mounting bracket.

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Membrane Air Dryers 361 405 428 468 548 618 83 187 53 113 212 54 1/4 73 140 40 Port size L B A Port size L A B C 70 91 3/8 1/2 3/8 IN Port size: 1/4 OUT Port size: 1/4 IDG30, 30L IDG50, 50L IDG60 IDG75, 100 IDG60L, 60S IDG75L, 75S IDG100L, 100S Model Model (67) (46) (26) IDG3, 5 IDG10 IDG20 Width across flats 17 Width across flats 14 Width across flats 14 Purge air outlet for dehumidification

Series 10-MGF ø40, ø63, ø100 Guide Table

8.7 120 X T V 1/4 1/4 1/8 40 P 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C M6 M6 M5 18.5 KA KB 100 63 30, 50, 75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 8 200 160 20 20 11.5 11.5 9.5 846 Guide Table 10-MGF Specific Product Precautions Be sure to read this before handling.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Flat finger [3] 4 x MM thread depth L Thread for mounting attachment K J A A D G B D B K J F C S W O (mm) Weight (g) F G Open Closed 2 2.5 3 4 L MM J K D C B Model A W MHZ2-10D3 1), 2) 11221122112211220 -0.05 0 -0.05 0 -0.05 0 -0.05 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.025 0 +0.025 0 +0.025 0 +0.030 0 +2.2 0 +2.2 0 +2.3 0 +2.5 0 60 125 250 450 5 6 8 10 M2.5 x 0.45 M3 x 0.5 M4 x 0.7

End Lock Cylinder Series CBJ2

0.3 18.3 15 8 21 33 42 55.5 + Stroke 28 Cover outside diameter 83.5 + Stroke With rear end lock / CBJ2F16-HN 6 Piping port 2-M5 x 0.8 M5 x 0.8 2-M10 x 1 Cover side (front side) 8 20 5 19.8 20 19 2-5.5 Mounting hole 12.5 2.3 0 -0.3 18.3 8 12.5 50 + Stroke 8 33 15 42 28 Cover outside diameter 86 + Stroke 4 End Lock Cylinder Series CBJ2 Axial foot With front end lock / CBJ2L16-RN 14.5 M10 x

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

L1 L2 A(2) L3 H(1) T2 T1 D1 D2 Model AS1200-M3 M3 x 0.5 M3 x 0.5 4.5 6.6 23.5 21.5 8 5 5 20.5 18.5 AS1200-M5 M5 x 0.8 M5 x 0.8 25.5 8 10 28.3 10.3 9 9 25 22.2 AS1200-U10/32 10-32 UNF 10-32 UNF AS220-01 27.4 32.4 14.6 14.3 14.1 31.4 36.4 18 12 (12.7) 1/8 1/8 AS220-02 29.8 34.8 19.5 18 18 35.8 40.8 27.2 17 (17.5) 1/4 1/4 AS320-03 35.6 40.6 24.3 22.5 20.8 41.9 46.9 30 19 3/8 3/8 AS420-04 42.4

IDX-OM-Z004

20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 12 /JEMA 300 A B IDF100F150F-W 6 8 IDX-OM-Z004 7 7 7.1 / 7-1 IDF100150F-W 7 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

&snac

' / i t h A u t o D r a i n : 1 . 3 5 k S ) _ M A S S k s 0 . 2 5 k s ( ! / i t h B r a c k e t : 0 . 3 1 k s ) D i m e n s i o n s 0 n e t o u c h f i t t i n s f o r P u r g e a i r e x h a u s t ( 0 P t i o n : P , P s ) c h e c k e r 9 8 d i a m e t e r i n c h ) p u t ' g i n o a i r D e w p o i n t l n o u t e r 8 rn m(5/16 D l i 0 n : .!.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

10 6 8 10 12 12 10 6 8 10 Tubing O.D.

Foot Pedal Type

size Port 1(P), Port 2(B), Port 4(A): Rc1/8 Port 3(EB), Port 5(EA): M5 x 0.8 XT34-60 (With lock) 192 177 149.3 MOD.

PSxx-OMS0004CN

(0500KPa) (1~5V) 01 R1/8(M5) 28 (4~20mA) 02 R1/4(M5) M12 3m ZS-37-A 1 M12 3m ZS-37-B 1 ZS-28-CA-4 1 Rc1/4 ZS-31-X175 1 Rc1/8 ZS-31-X188 1 -8No.PS-OMS0004CN-D M12 C3604+AI203(96)FKM (Nm) R1/8 35 R1/4 812 -9No.PS-OMS0004CN-D PSE570ZS-37-AZS-37-B ZS-37-A ZS-37-B 1 DC(+) 2 N.C. 3 DC(-) 4 -10No.PS-OMS0004CN-D PSE20 PSE30 PSE31 PSE570PSE573PSE574PSE570--28 PSE573--28 PSE574--28 PSE570PSE573

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)3/8 Rc(PT)1/2 Port size C85 Basic, Foot, Front flange, Rear flange, Single clevis, Double clevis, Center trunnion Mounting CG1 * 0.05MPa except locking parts.

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Digital pressure switch for energy-saving control ejector

Use a soft cloth to remove stains. For heavy stains, use a cloth soaked with diluted neutral detergent and fully squeezed, then wipe up the stains again with a dry cloth. 8 - NO.

LFE-OMZ0012

10 A) 1/2(15 A) 3/4(20 A) 1(25 A) Weight(Body) *5 Approx.

rep-filter-e

(In order of (1)(2) in drawing on the right) 1-8. If O-ring is swollen, replace it with a new O-ring. Retainer T bracket Actuators Modular F.R.L.

Industrial Filters Replacement Procedure

(In order of (1)(2) in drawing on the right) 1-8. If O-ring is swollen, replace it with a new O-ring. Retainer T bracket Actuators Modular F.R.L.

Safety Speed Control Valve (SSC Valve) Series ASS 1

1 Safety Speed Control Valve (SSC Valve) Series ASS Model Meter-out control type: A control valve with cylinder speed control function, fixed throttle, and rapid air supply function Port size Effective area (mm2) Weight (g) Free flow Controlled flow Style Model ASS100 2.4 1/8 9.5 97 ASS300 14.5 1/4, 3/8 22.0 220 Meter-in control type: A control valve with cylinder speed control function and