Vacuum Pad: Ball Joint Type

B8 01 10 13 16 20 25 32 ZPT F-B5 (Without buffer/Female thread) ZPT F(Without buffer/Female thread) Hexagon width across flats P N M5 x 0.8 Hexagon width across flats 8 NL 5 Y Hexagon width across flats 12 Hexagon width across flats 10 F Hexagon width across flats 3 F Hexagon width across flats 2 D 3 D C C 2 2 A A B B Dimensions Dimensions (mm) (mm) N: 1/8 (Rc, NPT, NPTF) A B C D F Y N:

MGC

[Caution] In a horizontal application, pay attention to that the load weight should not exceed the allowable tip load given on pages 8-22-8 to 8-22-11. 8-22-6 7 Series MGC Guide Cylinder Compact Type Air-hydro Copper-free (For CRT production process) Low pressure hydraulic cylinder of 1.0 MPa or less Through the concurrent use of a CC Series air-hydro unit, it becomes possible to operate

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

) The flow rate necessary to operate a 50 cylinder at a speed of 100mm/s is 12l/min.

IIIIIII

F ' 3 97 lbs (1 .8 Kq) P T , 0.06 in. (1.5 mn o.T. 0.08 in. (2 0 mm) T T O-14 in 13 5 mml A B c D E tCi H J K 4-9:z (1 25) 1 . 1 8 (30) 3.94 r100) 0.98 (251 0 6 9 (17.5) 0.33 {a 5l u.c9 (1 5) 0.10 (2.s)o.71 {1.8) o.37 (9.5) Millimeters in Parentheses t75 PSIG (5 Kgt/cm2) Panel Mounting o F.' 3.97lbs. (1.8 Kq) P T . 0.06 in (1.5 mn A B c D E F G H J K 4.98 126.5) 1 . 1 8 (30t 3.94 (100) 1.04

MGQ

B 19.5 25 29.5 C 6.5 7 14.5 A 8 8 8 8 10 10 Model MGQ32 MGQ40 MGQ50 MGQ63 MGQ80 MGQ100 Detailed figure of a section Detailed figure of b section a a a b MGQ32 to 50 MGQ63 to 100 8-20-10 11 Compact Guide Cylinder Series MGQ Proper Auto Switch Mounting Position (Detection at stroke end) Minimum Stroke for Auto Switch D-Z7/Z80 D-Y5/Y6/Y7(V) D-Y7W(V) 1 pc. 2 pcs. 5 10 5 5 10 15 Auto switch D-Z7

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

B A B A A A A A A 2.PUSH 2.PUSH B B B B 1.TURN 1.TURN VQZ 28 5.5 35 74.5 SMC VQD 13 2-M4 clamp screw EXH outlet M5: External pilot port 9 D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port Lead wire length: L0, 600 mm L1, 1500 mm L2, 3000 mm C8: 1 (P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 44 29.5 2n-C3, C4, C6, M5 (4(A),

AR Series Modular Type Regulator

Modular Type Regulator AR Series AC-A Regulator AR Series AF-A Model Port size Options AF-A AR10-A M5 x 0.8 AR-A AR-A AL-A AR20-A 1/8, 1/4 AW-A Bracket AC-B AF-A AR25-A AF-A 1/4, 3/8 Round type pressure gauge AR -A -B AR30-A AL-A Set nut (for panel mount)* AW -A -B AR40-A 1/4, 3/8, 1/2 AW AG AR40-06-A 3/4 * For AR20-A to AR40-06-A, panel fitting dimensions are different from those of the

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

AS-FE 1/8 0.07 1/4 0.16 KE 3/8 0.2 1/2 0.4 AS-FG When performing the piping work, turn the tightening tool in the horizontal direction to the hexagon across flats of the body B so that any moment is not applied to the body A. If the tool is in contact with the body A, this may cause the body B to come off. AS-FP AS-FM 4.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Core wire color A-coded A-coded A-coded 7 1 8 3 2 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 2 3 1 7 7 1 8 3 2 8 2 3 1 7 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 4 5 6 6 5 4 4 5 6 6 5 4 Socket pin arrangement Plug Socket pin arrangement Plug Connections Connections pin arrangement pin arrangement Item Specifications

LEF-OM002xx

500 600 V(mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500 600 0 100

EXxx-OMY0006CN

Table 10-1 specifications EX245-FPS1 EX245-FPS2 EX245-FPS3 (W x L x H) mm 85 x 148.5 x 136 1,100 g 1,200 g 8 128 () 64 (US1) 350 mA 300 mA (US1/US2) XD1/XD2 16 A (US1/US2) 10 A (US1/US2) 24 VDC +20%/-15% <20.4 VDC US1 >21.6 VDC < 17 VDC 6 A 24 VDC +20%/-15% <21.6 VDC : >22.8 VDC US2 / <17 VDC 4 A () 1.2 V US1 US2 4 8 US1 UT1/UT2 24 VDC +20%/-15% 2 A( UT1) 1 A (

Mechanical Valves Series NVM, NVFM, NVZNI

F ' 3 97 lbs (1 .8 Kq) P T , 0.06 in. (1.5 mn o.T. 0.08 in. (2 0 mm) T T O-14 in 13 5 mml A B c D E tCi H J K 4-9:z (1 25) 1 . 1 8 (30) 3.94 r100) 0.98 (251 0 6 9 (17.5) 0.33 {a 5l u.c9 (1 5) 0.10 (2.s)o.71 {1.8) o.37 (9.5) Millimeters in Parentheses t75 PSIG (5 Kgt/cm2) Panel Mounting o F.' 3.97lbs. (1.8 Kq) P T . 0.06 in (1.5 mn A B c D E F G H J K 4.98 126.5) 1 . 1 8 (30t 3.94 (100) 1.04

Series AP500

pressure : 2 psig (14 kPa) inch (mm) FV4 MV4 TW4 760 0 2.78 (70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21 500 -35 400 -48 300 -61 200 -75 100 -88 0 -101 0 1 2 3 4 5 6 7 8 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

JXCx-OMT0061CN

RWw0, bit1:OFF 24V 0V (1) (5) ON OFF ON Min 15ms (3) OFF (8) Min 15ms (6) (2) (SubFunction) (SubFunction ) ON (4) OFF (7) DATA(H,L) 65 - 15. 15.1 [5m ] (1) (2 ) --A B-1 2 L A A-1 1 B (B-2) 6 1 1.5m B (A-2) 5 COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m (3) Shiel d Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 S B (B-6) 9 B (A-6) 8 3 (14.2) (2 ) 2 1 (8) (1 ) B1 A1

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

tubing 8 20.5 26 18 14 10 23 41 29 17 M L A 19 22 H 12 24 58 46 Connection threads Reference dimension for R threads after installation Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area mm2 D1 Model L1 TPH TPS A (M5) Connection thread R M H (width across flats) Applicable tubing O.D. mm Note 1) Weight g L1 L2 M D2 M M5 x 0.8 1/8 1/4 M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer Chamfer Chamfer R R A port B port B port A port A port B port A port B port A port B port For size 40 actuators, a parallel key will be used instead of

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

125

pilot solenoid: VEX3422 41 19 3 x 1/4, 3/8, 1/2 [Port 1(P), 2(A), 3(R)] 3 R 1 P 17.5 39.5 Sol.b A B 65 55 45 Sol.a 5 69 121.9 112.1 104.9 M plug connector (Light/surge voltage suppressor) Grommet L plug connector Manual override + + 85.2 73.9 72.8 54.6 P2 P1 A 2 M5 (Port PE/ Pilot exhaust) 37 17.5 17.5 79 39.5 VEX3420: 1/8 Plug VEX3421: 1/8 VEX3422: 1/8 Plug (Port P1/Pilot air) 10.5 Silencer

Series AS-FM/AS-M/ASD-FM

100 200 205 Inch size M5 standard 1/8 standard 1/4 standard 3.2 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" 4 6 8 Use a 1/8" tube.

CL

8 !