Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

F S + Stroke H ZZ + Stroke (mm) P Bore size (mm) MM A NN D F G1 G2 S ZZ I H J N1 N2 NA TN TF 10 15 M12 x 1 4 M5 x 0.8 8 15 6 M4 x 0.7 65 101 18.5 28 16 11 20 16 16 15 M14 x 1 5 M5 x 0.8 10 15 6 M5 x 0.8 74 114 22 30 22 12 21 19.5 20 18 M20 x 1.5 8 Rc1/8 13 NPT1/8 25 G1/8 8.5 M8 x 1.25 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M10 x 1.25 18 M26 x 1.5 10 Rc1/8 13 NPT1/8 30 G1/8 8.5 102.5 160

Coolant Valve

Water Hammer Characteristics VNC1 (N.C. 0.49 MPa) Conditions: Piping 30 m Steel tube, total pressure 0.49 MPa VNC4 (N.C. 0.97 MPa) Conditions: Piping 30 m Steel tube, total pressure 0.97 MPa 2.5 15A Peak pressure at valve closed (MPa) Peak pressure at valve closed (MPa) 8A 25A 2 1 20A 32 A F 15A 20A 40 A F 32 A F 1.6 0.8 25A 40 A F 50 A F 65F 50 A F 1.2 0.6 80F 65F 80F 0.8 0.4 0.4 0.2 0 1

PSxx-OMU0002CN

kPa ONOFF ISE20A0.050 MPa ZSE20A5.1 kPa ZSE20AF5.0 kPa 1.5 ms OUT1 ON OUT1 OFF -28No.PS-OMU0002CN-D [F 2] OUT2 34 [F 1] OUT1 [F 3] 36 0 ms [F 4] 37 [F 5] FUNC 39 [F 6] 41 0% [F10] 42 std() [F11] 48 1000 [F80] 49 OFF [F81] 50 OFF [F82] 52 A [F90] 53 OFF [F96] 55 [F97] 56 OFF [F98] 58 () [F99] 60 OFF XY "---" -29No.PS-OMU0002CN-D [F 0] (kPa/MPa) <> [F 0] [F 0] ZSE20AF

PSxx-OMU0005CN

1]OUT1[F 2]OUT2// -26No.PS-OMU0005CN-C <> () ,() 13[SEt] [SEt]()[P_1][n_1]() () ()( 62) ( )(62 ) 2 (2OUT2) 1 2 2 3(32)OFF ([SEt]) 4OUT2OUT2[P_2][n_2] -27No.PS-OMU0005CN-C 27 P1L()P1H()WH1() dt1() (n1L n1H) 34 OUT2 -28No.PS-OMU0005CN-C , 35[F 0] [F] 2 3 5 F0 F1 F99 ()[-] [F 0] 31 ""M ISE20B MPa ZSE20B(F) kPa P ISE20B psi ZSE20B(F) [F 1] OUT1 32 OFF ONOFF ISE20B 0.500 MPa ZSE20B

XLAQ/XLDQ

sealant) S valve (Material: Stainless steel 304) i Valve side exhaust Refer to page 478 for the maintenance parts. 473 XLDQ Series Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Indicator Auto switch (Option) B L K S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55 75 F 41 52 G 63 68 H 20 20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143

10

F = One finger thrust.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

30 to 800 mm/s 30 to 700 mm/s 30 to 600 mm/s Precautions MX Bumper is standard on both ends Cushion Port size M5 x 0.8 Rc 1/8 Be sure to read before handling.

E-P HYREG

Exhaust Time from 0.5 MPa to 0.1 MPa SRH Pressure (MPa) SRP / SRF Exhaust time (s) Exhaust time (s) / ITV IC Exhaust time (s) ITVH 3. Exhaust time from optional pressure point ITVX Ex.] Using VY1500, lower the 500 L tank pressure from 0.4 to 0.1. a) If describing the above graph in accordance with graphs, the exhaust time is read; 27 3 = 24 s.

HRX-OM-R005

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R005 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Air Fittings & Tubing

F (inch) Part No.

Electro-pneumatic Proportional Valve Series VEF/VEP 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.03 s or less 0.03 s or less 0.05 s or less 0.05 s or less Response time Hysteresis 3% F .S. IR Repeatability 3% F .S. VEX Sensitivity 0.5% F .S.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

(a) (b) Actuator effective torque S . Ta (S is 10 times or more) Allowable moment (Nm) Allowable thrust load (N) .

Thermo-chiller

(Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v Reference item 5 s 2 s 1 s Min. 0.5 s 0.2 s 0.1 s *1 In the case of [Mcm], it will be 0.003 to 0.01.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

60

H S U P EXH. H S EXH. U H S P U P G H F SUP. SUP.

End Lock Cylinder Series CBG1

TA DL2 TF TG A S + Stroke H NA F ZZ + Stroke Section TA With non-locking type manual override (suffix N) With locking type manual override (suffix L) HN HR MO RF WL WL KA 0.1 C 8-J NA (mm) Stroke range Bore size (mm) A AL B1 C D DL2 E F GA GB H H1 HR HN (max.)

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5

ISA2

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6

MLU

Allowable Kinetic Energy Extension locking direction Retraction locking direction 100 100 50 50 Load weight kg Load weight kg 10 10 50 W 50 5 5 40 40 B 32 32 0.5MPa 0.4MPa 0.5MPa 0.4MPa A A 25 25 1 1 100 500 100 500 B W Maximum speed mm/s Maximum speed mm/s B: Retraction locking direction F: Extension locking direction 9-13-4 4 Series MLU Specific Product Precautions 2 Be sure to read before

JXCx-OMT0034CN

/s 14h 10%100%1016 0Ah 0Ah 14h RWwn+7 15bi 8bit 7bit 0bit 16 16 (WORD) ) (RWwn+1)100mm/s 16 100mm/s 0064h 00 64 h 32 32 ) (RWwn+2,3)700.00mm 0.01mm 700.00mm 7016 00011170h 00 01 11 70 h 64h 00h RWwn+1 15bit 8bit 7bit 0bit 01h 00h RWwn+2 15bi 8bit 7bit 0bit 70h 11h RWwn+3 15bi 8bit 7bit 0bit 39 - 12.2 IF ( ) IF ID ID=1 bit 7 6 5 4 3 2 1 0 I_Address RWrn+8 bit F E D C B A 9 8 I_Address