ZQ-OM01601 JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / *3) 1 1.5 *3)1 1 () 3 - () () () () 4 - () * 100 JIS B 8392-1 1.1.21.6.2:2003 5 - * FG 100 m/ s2 ,() 6 - *() 6 33 () () 10m DC(-)() * ( ) () CE CE , 550 7 - * ON, , 1015 10 1% 1745 1 ,OFF 4 OFF * 8 - ZQ ZSV A M W 2 A (1) (2) (3) (4) (1) [kPa] A -100 to 100 NPN 1 + B PNP 1
Magnet: D (Switch Unit), Body Size: 1, Rotation Angle: 180 (Rotation Angle 180), Vane Type: S (Single), Port: Side, Auto Switch: 97--Reed, DC Volt, 2 Wire, 0.5M, Lead Wire or Prewired Connector: Z (5m), Number: S (1 pc)
Bore Size: 25mm, Action: S (Single Acting (N.O.)), Finger Option: Basic Style, Body Option: Basic Style, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M, Lead Wire or Prewired Connector: Z (5m), Number: S (1 pc.)
Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Bore Size: 25mm, Stroke: 10mm, Action: S (Single Acting, Spring Return), Body Option: Standard (Rod End Female Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Auto Switch: A80--Reed, DC Volt.>5,<24, AC Volt.<100, Lead Wire, Vertical, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc
, Lead Wire or Prewired Connector: L (3m), Number: S (1 pc.)
Vertical, Lead Wire or Prewired Connector: L (3m), Number: S (1 pc.)
Vertical, Lead Wire or Prewired Connector: M (1m), Number: S (1 pc.)
Vertical, Lead Wire or Prewired Connector: 0.5m or None in the Case of No Switch, Number: S (1 pc.)
Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Bore Size: 16mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 10mm, Action: S (Single Acting, Spring Return), Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Mounting Bolt: None, Rod End Bracket: None, Auto Switch: M9PV--Solid State , Gen.
, Lead Wire or Prewired Connector: 0.5m or None in the Case of No Switch, Number: S (1 pc.)
, Lead Wire or Prewired Connector: M (1m), Number: S (1 pc.)
Magnet: D (Built-in Magnet), Mounting Direction: S (Axial Mounting), Bore Size: 12, Stroke: 10mm, Action: D (Double Acting), Rod End Thread: Rod End Female Thread (w/o Thread for ø4), Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: Z (5m), Number: S (1 pc.)
.: GR-S-010 (10 g), GR-S-020 (20 g) Tube gasket Piston gasket Retaining plate gasket Guide gasket Replacement Parts: Lock Unit As for the center trunnion type, it is very difficult to adjust the position of the trunnion bracket and the center of the axis. Therefore repair at SMC is recommended.
Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) Note) For the replacement procedure of replacement parts/seals, refer to the Operation Manual. 94
25 to 85C in stock (with no condensation and freezing)1000 VAC for 1 min. between external terminals and case50M or more (500 VDC Mega) between external terminals and case4.9 m/s2490 m/s2 to X,Y,Z directions 3 times for each1000 Vp-p, Pulse width: 1 ?s, Rise time: 1 ns225 g (without lead wire)3/4 inch tubeBody: New PFA, Sensor: New PFA, Tube: Super PFA
25 to 85C in stock (with no condensation and freezing)1000 VAC for 1 min. between external terminals and case50M or more (500 VDC Mega) between external terminals and case4.9 m/s2490 m/s2 to X,Y,Z directions 3 times for each1000 Vp-p, Pulse width: 1 ?s, Rise time: 1 ns225 g (without lead wire)3/4 inch tubeBody: New PFA, Sensor: New PFA, Tube: Super PFA
25 to 85C in stock (with no condensation and freezing)1000 VAC for 1 min. between external terminals and case50M or more (500 VDC Mega) between external terminals and case4.9 m/s2490 m/s2 to X,Y,Z directions 3 times for each1000 Vp-p, Pulse width: 1 ?s, Rise time: 1 ns225 g (without lead wire)3/4 inch tubeBody: New PFA, Sensor: New PFA, Tube: Super PFA
Magnet: D (Built-in Magnet), Mounting: F (Rod Flange), Bore Size: 32mm, Stroke: 200mm, Action: S (Single Acting, Spring Return), Rod End Thread: Male Rod End, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: Z (5m), Number: S (1 pc.)
Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector), Option: S (Bracket for w/Flow Adjustment Valve)
Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector), Option: S (Bracket for w/Flow Adjustment Valve)