SMC Corporation of America
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Furthermore, foreign matter captured inside the element will not spill over into the c a s e i n t e r i o r o r t h e surrounding area. Select from a wide range of filtration accuracy. With band-lock mechanism Nominal filtration accuracy 5, 10, 25, 50, 100 m Improved functionality and operability Renewed for easier use!

Water bath Q = T x V x x C h x 60 x 1000 10 x 2 x 1 x 103 x 4.2 x 103 20C V = 15 x 60 x 1000 After 15 min, = 93.3 W cool 30C down to 20C.

AS-FM AS-D AS-T ASP ASN AQ Dimensions ASV Universal type AK Applicable tubing O.D. d VCHC Applicable tubing O.D. d Weight (g) T H1 H2 D1 D2 D3 L1 L2 L3 L4 L5 (1) A (2) M1 Max. Min. Max. Min.

1q ye t !5 !9 !4 !7 !3 w A @0 A' Sectional view A-A' iu Component Parts No. Description Material q Rod cover Aluminum die-casted w Head cover Aluminum die-casted e Cylinder tube Aluminum alloy r Piston rod Carbon steel t Piston Aluminum alloy y Cushion ring Brass u Tie-rod Steel i Tie-rod nut Steel o Rod end nut Steel !0 Snap ring Steel for spring !1 Bushing Lead-bronze casted !

r t y Replacement Parts No. u Description Material Carbon steel NBR NBR Part no.

Bracket Operating pressure range H L Standard (0 to 0.7 MPa) t Connector Cable Part No. High flow type (0 to 0.3 MPa) PV060 4A 40 For 4 stations 4 mounting screws (M2 x 27 L) and one gasket are included. PV060 3A 40 For 8 stations w Plate Assembly Part No.

Construction VHS20/30 VHS40/40-06/50 y i u w w t t r q IN OUT OUT IN q e o EXH. EXH. VM Component Parts No.

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts MB No. q w e r t y u i o !0 !1 No.

PF-OMK0003CN-E 11.5mm , , , , IN 500kPa /KQ2 mm KQ2H04-M5 KQ2S04-M5 4 M50.8 KQ2L04-M5 /KJ mm KJH04-M5 KJS04-M5 4 M50.8 KJL04-M5 /M mm 4 M-5AN-4 M50.8 6 M-5AN-6 -16No. PF-OMK0003CN-E FG DC(+) OUT() DC(-) 15V 1k -17No. PF-OMK0003CN-E DC(+)DC(+) (OUT1) IN (20 ) -18No.

Screw torque (Nm) depth (mm) MHZJ2-10 M3 x 0.5 0.9 6 MHZJ2-16 M4x0.7 1.6 4.5 MHZJ2-20 M5 x 0.8 3.3 8 MHZJ2-25 M6x1 5.9 10 Max. tightening torque (Nm) Maximum screw-in Model No. Screw depth (mm) MHZJ2-10 M3 x 0.5 0.69 5 MHZJ2-16 M4x0.7 2.1 8 MHZJ2-20 M5 x 0.8 4.3 10 MHZJ2-25 M6x1 7.3 12 Max. tightening Model No.

HOW TO ORDER AL 30 03 BD 1N A 1 3 4 5 2 1 Symbol Description Body size 10 20 30 40 50 60 Meter thread (M5) Rc N NPT F G Thread type Nil 2 M5 M5 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 Port size 3 Nil Without mounting option B With bracket 4 Option(Mounting) Nil Polycarbonate bowl 2 Metal bowl 6 Nyron bowl 8 Metal bowl with sight glass C With bowl guard (steel plate) 6C With bowl guard

x 0.8; T1 type: NPT 1/8, M5 x 0.8 Front case: PBT; Rear case: PBT; Piping port: C3602 (electroless nickel plated) Sensor pressure: Silicon; O-ring: NBR Material Weight 43g (without lead wire) Note 1) When switch output is selected, analog output is not available.

1 Pressure Control Equipment Regulators Series Application/Characteristics Port size Set pressure (MPa) Option Page Miniature regulator ARJ1020F Direct operated relieving type Back flow function Manifold M5 0.1 to 0.7 14-4-4 1 8 / 14-4-6 Miniature regulator ARJ210 Direct operated relieving type Bracket Pressure gauge M5 to 0.2 to 0.7 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

x 0.8 depth 5 Piping port M5 x 0.8 depth 5 Piping port 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 16-6-5

x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 58 51 50 PV 6.5 10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11

The connection M5 thread. Tighten thread to recommended torque value. 3. After installation, check internal leakage (leakage across seat) with inert gases. Perform a helium leak test depending on applications. Maintenance Warning 1.

x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 M5 x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 777

01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 2 Note) AQ150 only AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F 554

ASN How to Order AQ ASN2 03 ASV JIS Symbol AK Option Nil S None With seal ASS Port size ASR M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASF Thread type Metric thread (M5) Unified thread (10-32 UNF) R NPT Nil N Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Number of needle rotations 15-11-1