Digital Flow Switch ( compatible)

: 80 mA Internal voltage drop: 1.5 V or less PF2MC7###-##-L2#-### NPN type Maximum applied voltage: 30 V Maximum load current: 80 mA Internal voltage drop: 1.5 V or less PF2MC7###-##-L3/L4#-### NPN type Maximum applied voltage: 30 V Maximum load current: 80 mA Internal voltage drop: 1.5 V or less L3: Analogue output: 1 to 5 V or 0 to 10 V Output impedance: 1 k L4: Analogue output: 4 to 20

Fieldbus system PROFIBUS DP compatible SI unit

(Range) (Lwr_Lmt) (Upr_Lmt) -10..10 V -10.50 to +10.45 V -10.45 to +10.50 V -5..5 V 5.25 to + 5.22 V 5.22 to +5.25 V -20..20 mA -21.00 to +20.90 mA -20.90 to +21.00 mA 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V 0..5 V 0.00 to +5.22 V +0.03 to +5.25 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V 0..20 mA 0.00 to +20.90 mA +0.10 to +21.00 mA 4..20 mA +3.00 to +20.90 mA +3.10 to +21.00 mA -50No.EX-OMN0028

2-Color Display Digital Flow Switch Series PFM

80 mA Internal voltage drop 1 V or less Max. 28V, 80 mA Internal voltage drop 1 V or less Max. 28 V, 80 mA Internal voltage drop 1 V or less C: Analog output 1 to 5 V Output impedance 1 k D: Analog output 4 to 20 mA Load impedance 50 to 600 External input: No-voltage input Reed switch or solid state switch input 30 msec or more PFMV PF2A 2 PNP outputs type PFM7--BPNP + Analog output type

SMC Basic Pneumatics

But this is theory; no adiustment is made tor practice when w simply use gauge pressur in bar +11 lf volume V, = 1 ff at a standard absolute pressure of 14.7 psi. is compressed at constant temprature lo a volume V, = 0.5 ft" then: o1.lA P,.V, = P"'V" P"=-t .

Cylinder with Lock Series CNS

5 V, 12 V IC circuit A96 5 V Yes A93 A90 A54 A59W A33 A34 A44 12 V 100 V Relay, PLC No IC circuit 5 V, 12 V 100 V or less 100 V, 200 V PLC Terminal conduit 2-wire 24 V 12 V Yes Relay, PLC 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indication) Solid state auto switches marked with are produced upon receipt of order.

60

V 48 V 230 V 24 V 12 V 02 (1/4) 03 (3/8) 02 (1/4) 03 (3/8) AC Normally Open (N.O.)

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But this is theory; no adiustment is made tor practice when w simply use gauge pressur in bar +11 lf volume V, = 1 ff at a standard absolute pressure of 14.7 psi. is compressed at constant temprature lo a volume V, = 0.5 ft" then: o1.lA P,.V, = P"'V" P"=-t .

Digital Flow Switch (Integrated display type)

1 V 1.04 V 1.05 V 5 V Current output (4 to 20 mA) 4 mA 4.16 mA 4.19 mA 20 mA F E G PF2M701/702/705/710/750/711/721 PF2M725 Voltage output (0 to 10 V) 1 0 V 0.10 V 0.12 V 10 V 1: The analogue output current from the connected equipment should be 20 A or less when selecting 0 to 10 V.

Brake mechanism added

V V V V V V Clevis pin V Single knuckle joint V V V V V V V Double knuckle joint (with pin) V V V V V V V Option With rod boot V V V V V V V * Refer to page 690 for dimensions and part numbers of the option.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

1000 Manufacturable stroke range [mm] 11-LEFS16 V V V V V V V V V V 50 to 500 11-LEFS25 V V V V V V V V V V V V 50 to 600 11-LEFS32 V V V V V V V V V V V V V V V V 50 to 800 11-LEFS40 V V V V V V V V V V V V V V V V V V 150 to 1000 *Please consult with SMC for non-standard strokes as they are produced as special orders.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

12 V 12 V Relay, PLC 24 V Grommet 5 V, 12 V Diagnostic indication (2-color indication) IC circuit 12 V 3-wire (NPN equivalent) A96V A96 5 V IC circuit DGrommet A93V A90V A93 A90 100 V Relay, PLC 24 V 12 V 2-wire IC circuit 100 V or less -X Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Since there are other applicable

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

33

V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 195 Thermo-chiller Basic Type HRSE Series

PF-OMN0011_C

DC(+) DC(+) OUT1 OUT1 DC(-) DC(-) / / Max.80 mA 1.5 V E 15 V 1 k F420 mA 12 V 300 24 V 600 Max.28 V80 mA 1 V C 15 V 1 k D420 mA 12 V 300 24 V 600 -18No.PF-OMN0011CN-C NPN PF3W30G PNP PF3W30H DC(+) DC(+) OUT1 OUT1 DC(-) DC(-) / / Max.80 mA 1.5 V 30 ms Max.28 V80 mA 1 V 30 ms 2 PF3W30J/PF3W30K DC(+) DC(-) / J15 V 1 k K420 mA 12 V 300 24 V 600 -19No.PF-OMN0011CN-C

AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 LEFS25 V V V V V V V V V V V V V V V V LEFS32 V V V V V V V V V V V V V V V V V V V V LEFS40 V V V V V V V V V V V V V V V V V V V V * Please consult with SMC for non-standard strokes as they are produced as special orders.

CLS

100 V Relay, PLC Reed switch Solid state switch A54 100 V, 200 V Yes A33 PLC 12 V Terminal conduit 24 V 2-wire A34 100 V, 200 V Relay, PLC A44 DIN terminal Diagnostic indication (2-color indication) Lead wire length symbols: 0.5 mNil (Example) A54 3 m L (Example) A54L 5 m Z (Example) A54Z Grommet A59W Y59A 3-wire (NPN) IC circuit 24 V 5 V, 12V Y7P 3-wire (PNP) Grommet J51 100 V, 200

EXxx-OMW0014CN

EX245-DY1 4M12(5 ,) (n+1) (n) FE/ 24 V(/) 0 V(/) 24 V(/) 0 V(/) FE . 8-3 EX245-DY1 55 No.EX-OMW0014CN-A 9.

PFxx-OMX0007

Approx. 1.1 mm Insulator Colours Brown, blue, black, white Sheath Finish O.D. 4 -53No.PF-OMX0007-A Characteristics data Flow rate/Analogue output 0 L/min A 2 B 0 L/min C 2 D Voltage output (1 to 5 V) 1 1 V 1.04 V 5 V Voltage output (0 to 10 V) 1, 3 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range *4 Maximum value of rated flow range PF3A701H 10 L

Digital Flow Switch (Remote type monitor unit)

As a whole product, the fluid temperature range is specified as 0 to 90 oC. -69No.PF-OMN0012-H Characteristics graph Analogue output (Flow) (PF3W504/520/540) A B C Voltage output 1 V 1.5 V 5 V Current output 4 mA 6 mA 20 mA (PF3W511) A B C Voltage output 1 V 1.4 V 5 V Current output 4 mA 5.6 mA 20 mA (PF3W521) A B C Voltage output 1 V 1.5 V 5 V Current output 4 mA 5.9 mA 20 mA Rated flow

SI Unit

Valve power PWR(V) supervision Enable Disable Enable WARNING: If safe PWR(V) monitoring is required for the application or if PWR(V) diagnostic is disabled on the device PWR(V) failures must be managed externally by other means.