IC VE 4 point preset output pressure Applicable in the programming function with up to 20 steps. 10 bit parallel input signal (maximum) Pressure can be set with 2 10 = 1024 steps. VY1 G Step 1 Step 2 Step 3 Step 4 . . . . . . . . . . . . .
Symbol Applicable stations Mounting position U side D side Both sides M Special specifications 2 to 10 stations 2 to 10 stations 2 to 16 stations D U B Indicate special specifications separately on a manifold specification sheet. Note 2) The number of blanking plate assemblies is also included.
PFMC 7 7 A*8 8 501 5~500L/min 2 102 10~1000L/min 202 20~2000L/min *7 Rc N NPT R F G*1 1ISO228 501 102 202 04 1/2 *7 06 3/4 OUT1 OU2 *5 A NPN NPN M SI*6 B PNP PNP 5 C NPN (1~5V) SI D NPN (4~20mA) 6:L/min:L E*2 PNP (1~5V) F*2 PNP (4~20mA) 1 G*2 NPN *3 M8(3m)*4 H*2 PNP *3 2 3 N M8 *4 / ZS-40-A M8 3 m ZS-42-A PFMC7501/7102 (M352 ) ZS-42-B PFMC7202 (M352 ) -10No.PF-OMS0001CN-A M8 1
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
Note) A/B port piping: Rc 3/8 or Rc 1/2 Option VFS 9 Other Base specifications Individual EXH VS4 1 2 Individual EXH Common EXH Valve stations 02 2 stations VQ7 10 10 stations EVS How to Order Manifold Assembly VFN Specify the valves and blanking plate to be mounted on the manifold along with the manifold base model no.
Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5
44 51 Approx. 90 10 9.5 Bleed Bleed 63 Exhaust SUP(1) OUT(2) G 2 OUT 30 OUT(2) SUP(1) OUT 10 43 35 EXH Approx. 43 2-Rc(PT) 1/8 Port size 2-Rc(PT) 1/4 Port size Rc(PT) 1/8 Pressure gauge port 50 50 35 2-Rc(PT) 1/8 Pressure gauge port Approx. 60 50 Mounting hole IR300-0 IR2120-02 36 2 Bracket (optional) 30 82 Mounting hole Pressure gauge (optional) 60 2.3 48 Bracket (optional) 5.5 9.5 M5
(HFC) IDFA55E 390 432 510 R 2 IDFA75E 660 720 822 2.
(Including Nut, Screw, (Spacer)) Cylinder series Bore size 12 16 20 25 32 40 50 63 80 100 125 140 160 CQ2 BQ-1 BQ-1 BQ-1 BQ-1 BQ-2 BQ-2 BQ-2 BQ-2 BQ-2 BQ-2 BQ-2 BQ-2 BQ-2 MU BMU1-025 BMU1-025 BMU1-025 BMU1-025 BMU1-025 MK/MK2 BQ-1 BQ-1 BQ-2 BQ-2 BQ-2 BQ-2 6
Series D-M9K/D-7K/D-RK How to Mount and Move the Auto Switch D-Y7K Mounting Bracket Tie-rod Mounting Type
SY SY100-77-1A 10 stations 10 P R P port SYJ M5 X 0.8 Note 1) Piping to exhaust port not possible. VK 31 Type How to Order Applicable solenoid valve (1) VZ SS3Y1 31 05 SY113-l-M3 SY113A-l-M3 SY123-l-M3 SY123A-l-M3 VT Stations 02 VT 2 stations ... ...
6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.
G46-10-02-SRB 2) Contact SMC if the product is to be used in an application with a high frequency of operation. Note) Consult SMC for the supply of types with metal gasket seal.
Rz 3.2 or less for sheet surface 500 Compact / Lightweight 2 Port Solenoid Valve VDW30/40-XF Series For Air/Water Dimensions VDW30-G--C4 C6 /One-touch fitting for 4, 6 VDW40-G-/One-touch fitting for 8, 10 C8 C10 36 30 21 23 Approx. 300 32 17.5 20 Approx. 300 27 56 48 10 9 18 21 3 3 21 23 26 A A C4, C6 1 (IN) port C4, C6 2 (OUT) port C8, C10 1 (IN) port C8, C10 2 (OUT) port Dimentions A 3
Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 1 A single controller monitors up to 4 pressure sensors. 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 1 A single controller monitors 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 Space saving 1 40mm MPa kPa OUT1 76% OUT2 CH 1 2 3 4 PRESSURE SET reduction
L (50 msec.) 1 L/pulse 10 L/pulse 2 2 5 00.8MPa 1.2MPa 3 5F.S.(00.8 MPa0.6 MPa ) DC1224 V10 P-P10 55 mA 3F.S. 3F.S. 1F.S.(0.05S 2F.S.) 5F.S.(050 25 ) NPN PNP 80 mA (NPN) DC28 V () NPN 1 V (80 mA ) PNP 2 V (80 mA ) 4 0.05 0.1 0.5 1 2 5 0 -62No.PF-OMP0001CN-F PFMB7501 PFMB7102 PFMB7202 15 V420 mA () 1 k 6 24 V 600 12 V 300 7 0.4 V ()30 msec. 8 9 L/mincfm 10 3
Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89
JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: 2) : : : 1. 2. 3. 1. 2. 3. 4.
10 1 2466 LCD * -8No.PS-OMU0008CN-D ISE20C X M 2 3 ISE20C -0.100~1.000 MPa Y ZSE20C 0.0~-101.0 kPa K ZSE20CF -100.0~100.0 kPa T ISE20CH -0.100~2.000 MPa 24 X NPN2 A1 A Y PNP2 A3 C R NPN2+1 B T PNP2+1 E S NPN2+1 D + V PNP2+1 1: F + 4 2 M SI3 1 P psi2 2 3 kPaMpa (2m ) W 2 R1/4 C01 Rc1/8 N02 NPT1/4 A2 URJ1/4 L F02 G1/4 B2 TSJ1/4 2 2 () L() A A1 ZS-46-A1 C A3 ZS-46-E
~er ~ Zone 10 Distance From Auto Switch Top Face 0 5000 10 15000 20 Welding Current CAl .. ... i1 SO >. . /" /. 40 Sai. Zone ..
PB1013A 18 1.5 10 Mount with this surface up FLUID OUT Rc, NPT, G 1/8 76 64 52 37 7.5 20 2 x M4 x 0.7 Female mounting threads Thread depth 6 2 x 4.5 Mounting hole 66 14 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 AIR SUP Rc, NPT, G 1/8 FLUID IN Rc, NPT, G 1/8 20 8.5 15 8 10 18 Caution 1.