VFRA3000

VFRA3111-03 VFRA3211-02 VFRA3211-03 VFRA3311-02 VFRA3311-03 VFRA3411-02 VFRA3411-03 VFRA3511-02 VFRA3511-03 1/4 3/8 1/4 3/8 1/4 3/8 1/4 3/8 1/4 3/8 0.38 0.39 0.41 0.36 0.40 0.39 0.42 0.42 0.33 (0.48) 0.34 (0.47) 1.9 2.2 1.9 2.0 1.8 1.9 1.7 1.8 1.9 (0.69) 2.2 (0.69) 0.61 Single 1/8 2 position 0.71 Double 1/8 Body ported Closed center 0.72 1/8 Exhaust center 0.72 1/8 3 position Pressure center

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M1 Weight (g) 4 6 6 8 6 8 10 8 10 8 10 10 12 Applicable tubing O.D. d T H D1 D2 L1 L2 L3 Model AS121-M5-F04 AS121-M5-F06 AS221-01-F06S AS221-01-F08S AS221-02-F06S AS221-02-F08S AS221-02-F10S AS321-02-F08S AS321-02-F10S AS321-03-F08S AS321-03-F10S AS421-04-F10S AS421-04-F12S 16 17 17 18.5 17 18.5 21 18.5 21 18.5 21 21 22 13 13 34 31 54 50 52 86 81 93 88 154 146 21 21.5 25.5 26 M5 x 0.8 28.3

Check Valve Series AK 1

ASN Minimum operating pressure 0.02 MPa Ambient and fluid temperature 5 to 60C (No freezing) AQ JIS Symbol Flow Characteristics ASV AK2000-01/-02 AK4000-02 AK How to Order Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) ASS Inlet pressure: 0.1 MPa Inlet pressure: 0.1 MPa Inlet pressure: 0.1 MPa AK 2 000 02 0.5 MPa 0.7 MPa ASR 0.5 MPa 0.3 MPa 0.3 MPa 0.7 MPa

Dual Speed Controller with One-touch Fitting Series ASD 1

15.2 40.4 35.4 15 18.5 11 R 1/4 17 34.4 29.4 55 18.5 46.5 28.2 19.7 10 ASD430F-02-10S 18.5 58 21 49.3 31 6 ASD530F-02-06S 12.8 74 17 48.3 25.2 20.3 8 ASD530F-02-08S 15.2 76 18.5 51.3 28.2 41.9 46.9 48.8 43.8 19.8 23 15.4 R 1/4 19 42.8 37.8 10 ASD530F-02-10S 18.5 80 21 54.1 32.6 23.1 12 ASD530F-02-12S 83 20.9 22 55.9 34.4 6 ASD530F-03-06S 74 17 12.8 48.3 25.2 20.3 8 ASD530F-03-08S 93 18.5

ASD

41.7 40.4 35.4 15.2 18.5 15 11 R(PT)1/4 17 34.4 29.4 18.5 55 28.2 46.5 19.7 10 ASD430F-02-10S 18.5 21 58 31 49.3 6 ASD530F-02-06S 12.8 17 74 25.2 48.3 20.3 8 ASD530F-02-08S 15.2 18.5 76 28.2 51.3 41.9 46.9 48.8 43.8 23 19.8 15.4 R(PT)1/4 19 42.8 37.8 10 ASD530F-02-10S 21 18.5 80 32.6 54.1 23.1 12 ASD530F-02-12S 22 20.9 83 34.4 55.9 6 ASD530F-03-06S 17 74 12.8 25.2 48.3 20.3 8 ASD530F-03-08S

P

Adaptor connection thread Symbol Pad dia. 1 02 to 08 B5 2 10 to 16 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [qAdaptor] R S ZP 04 A5 [wR type adaptor] Symbol S Pad dia. 02 to 16 L 20 to 50 With Buffer ZP R 16 K20 A10 06 UGN [Pad model no.]

Nozzle Type Ionizer

How to Order 01 IZN10E X367 With right angles Nozzle type Nozzle with right angles Symbol Type 01 Energy saving static neutralization nozzle 02 High flow rate nozzle Refer to the standard product number on page 10. Specifications (Specifications other than those shown below are the same as the standard product. Refer to page 11.)

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

AS2201F-02, AS2211F-02 AS2301F-02, AS2311F-02 AS3201F, AS3211F AS3301F, AS3311F AS4201F, AS4211F AS4301F, AS4311F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations Number of needle

Ozone Resistant

220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves 0 1000 2000 4000 5000

Booster Regulator Series VBA1110 to 4200 1

Pressure gauge Lubrication Not required ITV Installation Horizontal AN200-02 AN400-04 AN300-03 AN300-03 AN400-04 Silencer Pressure adjustable mechanism Relieving type IC How to Order Pressure VBA Pressure increase ratio 2.0 MPa 1 Twice 4 times 0 1 VE Pressure setting Handle operated type 1 Port size VBA1110-02 VY1 Body size Port size Rc 1/4 Symbol 02 1/4 1 VBA1-02 G VBA 1 1 02 1 0 GN Series

VXA21/22

Valve (Port size) VQ 1 (1.5mm) 2 (2.2mm) 3 (3mm) 4 (4mm) VXA31 VXA32 01 ( ) 1 8 02 ( ) 1 4 03 ( ) 3 8 02 ( ) 1 4 Ordering Example (Example) Series VXA31, Orifice size 1.5mm, Rc(PT)1/8 (Part number) VXA3114-01 4.1-69 VXA31/32 Air How to Read the Graph In the sonic flow region: For a flow of 100 l/min.

PSxx-OMT0005CN

OUT() DC(-) DC(+) PSE57-02-28 420 mA N.C. 500 (24 V ) 100 (12 V ) OUT() DC(-) -11No.PS-OMT0005CN-A (A/D ) () 20 2030 -12No.PS-OMT0005CN-A PSE575 PSE576 PSE577 02 MPa 05 MPa 010 MPa 5MPa 12.5MPa 30MPa 5%F.S.(25 ) PSE57-02 PSE57-02-28 DC1224 V1010% 10 mA 420 mA 15 V 1 k 500 (24 V ) 100 (12 V ) (25 ) 2.5F.S. 0.5F.S. 0.5F.S.(25 ) IP65 AC500V 1 100M(DC500 V) -1060 -2070 ()

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

ISE70/75/75H

(White) (Black) OUT1 (NPN) Load Main circuit Main circuit + + 12 to 24 VDC 12 to 24 VDC OUT1 (PNP) (Black) Load OUT1 (PNP) Load (White) (Blue) DC () (Blue) DC () 16-2-47 4 2-color Display Digital Pressure Switch/For General Fluids Series ISE75/75H How to Order 02 43 M ISE75 10MPa 02 43 M ISE75H 15MPa Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-

VQC

Stations 12 13 14 15 16 17 18 19 20 21 22 23 24 11 10 9 8 7 6 5 1 2 3 4 Description/Model A B Single PEB EA A B Double P EA EB A B Valves Options Closed center EAPEB A B Exhaust center P EA EB A B Pressure center EB P EA A B Perfect EB P EA Blanking plate VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-1-02/03 Individual EXH spacer VVQ4000-P-1-02/03 Throttle valve spacer VVQ4000-20A-1 Perfect

Clean Gas Filter

Helium leak volume 4.0 x 10-9 Pam3/sec or less Case/Cover Stainless steel 316 (Interior/Exterior: Electrolytic polishing) Main material Filter medium PTFE membrane Bracket Stainless steel 304 -8- 2-3 Dimensions 1) SFB300-02: Rc1/4 2) SFB302-02: TSJ1/4 (Tube Swage Joint) 3) SFB305-02, SFB315-02: URJ (Union Ring Joint) Model A SFB305-02 79 SFB315-02 84 -9- 3.

Regulator AR30 to 60

-10AS G46-2-02 G36-2-01 G46-2-02 G46-2-02 G46-2-02 0.2MPa Note 3) GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Oil Filter FH150 Series

Precautions FH150-02 to 04 q Mounting Confirm IN and OUT before mounting.