SMC Pneumatic Clean Series

the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031 11-CXS -0.032 1 2 3 4 1 2 3 4 Piping length (m) Piping length (m) Back matter 6 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

AS-FPQ/AS-FPG

Operating Pressure Particulate Generation Grade Classifications 1.2 104 Average particle concentration Particles/ft3 Max. operating pressure MPa Grade 4 1.0 103 0.8 Grade 3 102 0.6 101 Grade 2 100 0.4 Grade 1 10-1 0.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 15-17-3 4 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06 Body size 1 2 3 4 M5 standard

Related Products

Option Model A1 A2 A3 No gauge Nil 24VDC 5 AC20* 41.5 43 67.5 Pressure gauge (Unit: MPa) G 12VDC 6 AC25* 55 57 78 Pressure gauge (Unit: MPa, psi) P Others 9 AC30* 55 57 78 Specifications AC40* 72.5 75 100.5 Piston B Switching Pressure (Close to Open) AC50* 93 96 131 Model AV5000 AV2000 AV3000 AV4000 AC55* 98 96 131 Outlet pressure psi (MPa) 3/4 Port size 1/4 1 3/8 1/2 75 (0.5) AC60* 98 101

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

locations) Width across flats 8 (4 locations) 18.2 M5 x 0.8 (Finger closing port) 4 x M5 x 0.8 (Piston rod thread and rack thread) 5.5 2 x M5 x 0.8 Vacuum port H 7 8.4 16.8 0.5 7 9 7 12.5 8 6 6 O S 15 31 (46) 20 K 12.4 15 15 7 7 4 4 20 When open F 10 4 x M4 x 0.7 through (Thread for mounting attachment) 34 10 When open G (mm) J 24 39 57 H 116 158 196 G 92 134 172 F 72 94 112 E 26 42 60 D 67 83 101

CXS

Theoretical Output 20(N) Data Operating pressure (MPa) Rod size (mm) Bore size (mm) Operating direction Piston area (mm2) 0.15 0.7 0.6 0.5 0.4 0.3 0.2 0.1 8.4 39.2 33.6 28.0 22.4 16.8 11.2 56 OUT CXS6 4 4.6 21.7 18.6 15.5 12.4 9.3 6.2 31 IN 110 94.2 78.5 62.8 47.1 31.4 15.7 157 OUT CXS10 6 70.0 60.0 50.0 40.0 30.0 20.0 10.0 100 IN 247 212 177 141 106 70.6 35.3 353 OUT CXS15 8 176 151 126 101

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

6.5 counter bore 5.5 (Same on the opposite side) 3.4 through 2-M3 x 0.5 through 3 3 6.5 45 45 M4 x 0.7 x 14.5L (Hexagon bolt) and M4 x 0.7 (Hexagon nut) M3 x 0.5 x 10L (Hexagon socket head cap bolt) 2-M4 x 0.7 through Steel ball Steel ball (14+ST) (16) 4 2-M3 x 0.5 through 6 (mm) ST 10 20 30 40 50 14+ST 24 34 44 54 64 17+ST 27 37 47 57 67 49.5+ST 59.5 69.5 79.5 89.5 99.5 61+ST 71 81 91 101

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Stroke Range Bore size (mm) Stroke range (mm) 10 51 to 299 15 51 to 499 25 101 to 599 CY1F XB10 Bore size Piping thread type Piping direction Stroke Auto switch Symbol Adjustment bolt symbol (Example) CY1F10R237ALA93XB10 Symbol 2 Long Stroke -XB11 Available with long strokes exceeding the standard strokes. The stroke can be set in 1 mm increments.

Steam Valve

Indicator (Option) 1 8 2 x (Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 TQ 80 90 50 60 35 44 17.5 22 85 101

Large blow and

Related Products Ambient and fluid temperature (C) Weight (g) Note) Bracket assembly Dust bag assembly 417 (436) ZH-BK1-20-A ZH-DB1-20-A 929 (990) ZH-BK1-30-A ZH-DB1-30-A 1847 (1966) ZH-BK1-40-A ZH-DB1-40-A 92 (101) ZH-BK1-10-A ZH-DB1-10-A Note) ( ): Weight including the bracket Flow Rate Characteristics ZH10-X185 ZH20-X185 ---7 ---7 1,800 800 Suction flow rate [L/min (ANR)] Note 1) Air consumption

Vacuum Saving Valve

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2009 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing NT printing NT 12200SZ Printed in Japan.

Refrigerated Air Dryer

inlet F G Port size Compressed air outlet C Ventilation direction Ventilation direction Port size Drain tube: O.D. 10 (Thread symbol N: 3/8 inch) (820) [200 VAC specification] Terminal block K L H M N J 4-13 P [200 VAC specification] Power cord outlet (17) [100 VAC specification] Power cord (mm) A B C D E F G H J K L M N P Q Port size Model IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E 69 101

CXS

Theoretical Output 20(N) Data Operating pressure (MPa) Rod size (mm) Bore size (mm) Operating direction Piston area (mm2) 0.15 0.7 0.6 0.5 0.4 0.3 0.2 0.1 8.4 39.2 33.6 28.0 22.4 16.8 11.2 56 OUT CXS6 4 4.6 21.7 18.6 15.5 12.4 9.3 6.2 31 IN 110 94.2 78.5 62.8 47.1 31.4 15.7 157 OUT CXS10 6 70.0 60.0 50.0 40.0 30.0 20.0 10.0 100 IN 247 212 177 141 106 70.6 35.3 353 OUT CXS15 8 176 151 126 101

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Stroke Range Bore size (mm) Stroke range (mm) 10 51 to 299 15 51 to 499 25 101 to 599 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CY1F XB10 Bore size Piping thread type Piping direction Stroke Auto switch Symbol Adjustment bolt symbol (Example) CY1F10R237ALA93XB10

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

9200-www.stevenengineering.com Total operation cycles (10,000) CX 50 D40 30 -X 20 2010 Data 100 200 300 400 500 700 1000 Stroke (mm) Graph (2) 105 Particle concentration (particles/m3) Inner Cover Holding Screw Tightening Torque [Nm] Class M3.5 [Class 100] 104 Tightening torque Model Screw size CYP15 0.3 M3 x 0.5 103 Class M2.5 [Class 10] CYP32 2.45 M6 x 1 102 Plate Class M1.5 [Class 1] 101

MXH

Standard stroke (mm) Bore size (mm) Data -XC79 Machining tapped hole, drilled hole and pin hole additionally. 6, 10, 16, 20 5, 10, 15, 20, 25, 30, 40, 50, 60 Theoretical Output (N) Operating pressure (MPa) Piston area (mm2) Bore size (mm) Operating direction Rod size (mm) 0.3 0.5 0.7 19.8 14.2 8.49 28.3 OUT 6 3 14.8 10.6 6.36 21.2 IN 55.0 39.3 23.6 78.5 OUT 10 4 46.2 33.0 19.8 66.0 IN 141 101

10-my1h-e

.: GR-S-010 (10 g) 101

Stations: 04 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: without Option, Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: A (Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: J (Vacuum Break Flow Adjusting Needle, Round Lock Nut), 1st Nominal Nozzle

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 07 [ø1/4 One-touch Fitting (Inch)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)], Individual

Stations: 02 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: without Option, Exhaust: F (Individual Port Exhaust), Pressure Switch for Vacuum/Pressure Sensor: A (Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs, with Unit Selection Function), Leadwire: L (Standard Leadwires, X2), Unit Options: without Option, 1st Nominal Nozzle Size: 3 (ø1.2), 1st Selection

Stations: 04 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: without Option, Exhaust: F (Individual Port Exhaust), Pressure Switch for Vacuum/Pressure Sensor: A (Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs, with Unit Selection Function), Leadwire: L (Standard Leadwires, X2), Unit Options: without Option, 1st Nominal Nozzle Size: 3 (ø1.2), 1st Selection