10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

Air cylinder

. < Cautions for BM5 > When removing the auto switch mounting screw after assembling the auto switch mounting band, attention should be taken so that the switch bracket, auto switch mounting screw and auto switch mounting band do not come off. 13 - 14 - Table 3 Minimum Stroke for Auto Switch Mounting 15 - Solid state Reed 16 - Auto Switch Connection and Example 17 - 3.

CM2x-OM0230Q

. <> () () 6080 D-M9A(V) M3M3 0.6 0.7Nm (M2.5) (M2.5)0.050.1Nm 56mm 1) (M2.5) 2) M3 BM5 12 - 13 - 3. 14 - 1) 2)1 (30) * *(NC=b )(D-M9E(V)) 15 - / 16 - 3. CM2-*Z 3-1. a) b GR-S-010(10g )GR-S-020(20g ) P18, 4.

CG1x-OM0006N

M4x0.7x22L 20 NBA-088S 25 NBA-106S (mm) 32 BGS1-032S 40 BAF-04S 50 BAF-05S 63 BAF-06S 80 BAF-08S 100 BAF-10S D-G5BA mm 20 25 32 40 50 63 80 100 D-G5BA 5 5 5.5 6 7 7.5 7.5 8 30% 1 2 2 mm mm D-G5BA A B Hs 20 25 31.5 31.5 24 26 24 25 28 36 36 46 80 28.5 32 40 50 63 32.5 33 37 36.5 45.5 45.5 42 48.5 57.5 56 100 57 46 68 (mm) 10 20 75 15 3. 3-1. 1 2 3 4 5 6 7 8 9 10 1 2 3 416

RS2H-OM0045P

(M4),90 , -9 M4 1.5Nm -10 14 - 6-3. 5080 O 6-3-1. 4 50 : 12.5Nm 63 : 24.5Nm 80 : 42.0Nm -11 6-3-2. 1) -12 -12 2) 15 - 6-3-3. GR-S-010(10g),GR-S-020(20g) 1) 2) 3)O 4) -13 -13 6-3-4. 1)() -14 2)() -14 16 - 6-4. 6-4-1. B , 1 6-4-2. 7. 7-1.

CEP1

2 2-2-1 () B L F 0.5m L 3m 12 12 20 20 (mm) Z 255075100 () 2-2-2 A90 D-A90 F9N D-F9N F9NW D-F9NW A93 D-A93 F9P D-F9P F9PW 2 D-F9PW A96 D-A96 F9B D-F9B F9BW D-F9BW A90V D-A90V F9NV D-F9NV F9NWV D-F9NWV A93V D-A93V F9PV D-F9PV F9PWV D-F9PWV A96V D-A96V F9BV D-F9BV F9BWV D-F9BWV F9BAL D-F9BAL , 2-2-3 *1 C R04-J8M7.3 AC100240V DC24V RS-232C RS-232C + BCD 05 5 10 10 15

CE

D-A80 F79 D-F79 J79W D-J79W A72H D-A72H F7P D-F7P F7NWV D-F7NWV A73H D-A73H J79 D-J79 F7BWV D-F7BWV A76H D-A76H J79C D-J79C M9NA D-M9NA A80H D-A80H F7NV D-F7NV M9PA D-M9PA A73C D-A73C F7BV D-F7BV M9BA D-M9BA A80C D-A80C F7PV D-F7PV M9NAV 2 D-M9NAV A79W D-A79W M9PAV D-M9PAV M9BAV D-M9BAV F7BA D-F7BA F7BAV D-F7BAV D-F79F 2 F79F F7NT D-F7NT 223 *1 AC100240V D DC24V C 05 5m 10 10m 15

CG1-SMV13_en

Business centre, building 3, 15 Kondratjevskij prospect, St.Petersburg, Russia, 195197 SLOVAKIA SMC PriemyselnAutomatizciaSpols.r.o.

CRB2-OM00001

As a result, it could pose a hazard to humans and cause damage to machinery and/or equipment. (15) Do not use two or more rotary actuator with the aim of synchronized movement.

MHx-OMZ0004

Nm JMHZ2-16D M3x0.5 0.59 14 - 3 Force Sensor LAN LAN HAN D (5x10) M5x10 3.0Nm 15 - M6x23 6.3Nm M4x10 1.0Nm 16 - P145-2. M3x7 0.59Nm 17 - 12 (No.1No.4)KQ2L04-M3G1 KQ2L04-M3G1 2(TCU0425B-1) 3(M44 ) TCU0425B-1 44 (No.1No.4)6 () 5(KQ2H04-06A1)1)4 6 () 4 6 KQ2H04-06A1 18 - () 19 - 5-3 1. 2. 3. 4. 1.() 2. 5m 3. 4. 5 5-4. 1.

LEF-OM007xx

10,000,000 80 [/min] 100 [/min] ISO CLASS4 ISO CLASS5 ISO CLASS6 1,000,000 Particle concentration [particles/m3] 100,000 10,000 1,000 100 10 1 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter [m] Clean class Amount of recommended vacuum aspiration (/min(ANR)) Type Speed mm/s) ISO 14644-1 Fed.Std.209E 6 1000 5 5 100 10 4 10 30 6 1000 5 5 100 10 4 10 30 6 1000 20 5 100 30 4 10 50 6 1000 5 5 100 15

IDX-OM-W094

90 Series 6-4 IDX-OM-W094 7 7.1 IDFA60-23 IDFA70-23 IDFA80-23 IDFA90-23 oC 565 MPa 0.151.0 8) 1 () oC 24585% 3 oC 204 312 552 810 (ANR) 2 7 oC 300 408 654 900 m 3/h 10 oC 360 480 720 960 3 oC 216 331 585 859 7 oC 318 432 693 954 3) 10 oC 382 509 763 1,018 MPa 0.7 oC 35 oC 25 () AC230V(50Hz) 10% 4 7-2 5) W 820 1,300 1,950 2,220 5) A 4.9 7.2 12.0 13.0 (30mA) 6) A 10 15

C)44 to 145psi (0.3 to 1.0 MPa)59 to 86F (15 to 35?C) (Relative humidity 85% or less)59 to 86F (15 to 30?C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)14.1 scfm (400 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?