SMC Wireless System EtherNet/IP ® compatible

Signal name 1 24 V 1 24 V (Control and input) (Control and input) 2 24 V (Output) 2 24 V (Output) 3 0 V (Control and input) 3 0 V (Control and input) 4 0 V (Output) 4 0 V (Output) 5 Not used (4) EX600-ED5-# PWR IN: M12 4-pin Plug A-coded PWR OUT: M12 5-pin Socket A-coded Configuration Pin No. Signal name Configuration Pin No.

VXA21/22

Note 2) Value on option "V" (Non-leak, Vacuum).

EXxx-OMZ0016

EXW1 EXW1 Up to 100 m V.1.0/V.2.0 Available*1 EXW1 EXW1+EX600 *2 V.1.0 NA EXW1 EX600 Up to 10 m V.1.0 NA EX600 EXW1 Up to 10 m V.1.0 NA Available*3 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*3 EX600 EX600 Up to 10 m V.1.0 NA Available *1: Available in protocol V.2.0. *2: Up to 100 m between an EXW1 series Base and Remote, and up to 10 m between an EXW1 series Base and an EX600-W series

PF-OMN0009_C

1.5 V 5 V 4 mA 6 mA 20 mA (PF3W511) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W521-12/14) A B C 1 V 1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H J K L

rep-filter-e

(b) Incorrect mounting of V band (Not correctly fit with collar of cover) Fig. (b) Incorrect mounting of V-band [V-band for replacement] Part no: CY-27S Actuators Modular F.R.L. Pressure Control Equipment Retainer T bracket Caution Clean V-band and the contact surface between the cover and the case before mounting. Dirty contact surface lead to cause leakage.

Industrial Filters Replacement Procedure

(b) Incorrect mounting of V band (Not correctly fit with collar of cover) Fig. (b) Incorrect mounting of V-band [V-band for replacement] Part no: CY-27S Actuators Modular F.R.L. Pressure Control Equipment Retainer T bracket Caution Clean V-band and the contact surface between the cover and the case before mounting. Dirty contact surface lead to cause leakage.

mb1

) Yes Yes 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW Relay, PLC 3-wire (NPN) 2-wire Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) Grommet IC circuit 24 V Diagnostic indication (2-color indication) 5 V, 12 V 12 V Water resistant (2-color indication) 2-wire Y7BA Lead wire length symbols: Solid state switches

OMR0032

Pulse train signal specifications (Open collector input and differential input are common) 5 s or more 24 V 21.6 V to 26.4 V 5 V 4.75 V to 5.25 V PP3s or less 5 s or more 3s or less 16 s or more 28 - 7.4 Parallel I/O signals (Pulse Input Type) (1) Input side (Pulse input type) Function Description Common terminal for the input signal power supply.

70astamb1

) Yes Yes 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW Relay, PLC 3-wire (NPN) 2-wire Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) Grommet IC circuit 24 V Diagnostic indication (2-color indication) 5 V, 12 V 12 V Water resistant (2-color indication) 2-wire Y7BA Lead wire length symbols: Solid state switches

Wireless System

Description 2 1 24 V (for control/input) 1 24 V (for output) 2 24 V (for output) 2 0 V (for output) 3 0 V (for control/input) 3 24 V (for control/input) 4 0 V (for output) 4 0 V (for control/input) 3 (86.6) 4 1 73.6 56.6 Power supply connector PWR OUT: M12 5-pin socket, A-coded Configuration EX600-ED4 (Pin arrangement 1) EX600-ED5 (Pin arrangement 2) Pin no. Description Pin no.

PFxx-OMP0001CN

D NPN (420 mA) E*2 PNP (15 V) *4 (2m) F*2 PNP (420 mA) + () G*2 NPN *3 W H*2 PNP *3 *2 *3 N M8 *4 ZS-33-D 2m ZS-33-F ZS-42-C PFMB7501/7102 (3.04 ) ZS-42-D PFMB7202 (3.04 ) -10No.PF-OMP0001CN-F (OUT) (IN) INOUT LCD (UP) (SET) (DOWN) LCD (OUT1)/ OUT1OUT2 ON ON/OFF (UP) (SET) ON/OFF (DOWN) -11No.PF-OMP0001CN-F F.S. () 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V

Suction Filter with Case FH99 Series

FH99-FL006-N V FH99-FL004-N V FH990-04 FH99-FL006-N V FH99-FL005-N V FH990-06 FH99-FL009-N V FH99-FL007-N V FH990-08 FH99-FL009-N V FH99-FL008-N V FH990-10 One set each of companion flange, seal, hexagon socket head cap screws FH99-FL011-N V FH99-FL010-N V w Operation The hydraulic fluid used becomes high viscosity when the temperature is low during the winter, etc., and the differential

ZSM1-115/121

Example: Analog output = 1 to 5 [V] F .S. = 5 [V] 1 [V] = 4 [V] 3 [% F .S.] = 4 x 0.03 = 0.12 [V] The output error induced by the temperature change can be as much as 120 [mV].

3

V 06 3/4 V Note 7) Each option is not assembled with the product, but shipped together.

CLA

A DB BN BP BO DC eO eE F GA GB GC GO 10011500 50 136 Bore Size Stroke r.naecmm) (mm) WHhoot boot WHh boot GL GR J K MM 27 30 60 96 V V 44 16 32 10 as 15 26 54 40 500 20500 50 600 20-600 10 10 M8X1 .25 6 M14X1.5 32 35 70 108 V 'I, 52 20 40 10 95 17 27 59 32 35 86 11 5 V V 64 20 40 10 102 17 , 26 67 13 12 M8X1.25 7 M18X1.5 63 600 20-600 18 15 M10X1 .25 7 M18X 1.5 37 40 102 129 V V 78 25 52

Digital Pressure Switch

. 80 mA Residual voltage 1 V or less T: Analogue output 1 to 5 V Output impedance 1 k V: Analogue output 4 to 20 mA Max. load impedance Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Min. load impedance 50 -V/-T (Auto-shift input mode) With auto-shift switch output PNP open collector output type 2 output Max. 80 mA Residual voltage 1 V or less -A NPN 2 output type Max. 28

CLS

A54 A59W 3-wire (NPN equiv.) 5 V 12 V 5 V, 12 V 100 V Yes IC circuit Relay, PLC No 100 V or less 100 V, 200 V 2-wire 24 V PLC Terminal conduit 12 V Yes Relay, PLC 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indicator) Solid state auto switches marked with are produced upon receipt of order.

ISO/VDMA Cylinder: Standard Type Double Acting, Single/Double Rod Series C95 ø32, ø40, ø50, ø63, ø80, ø100

switch No Grommet Diagnostic indication (2-color) Z76 Z73 Z80 F59 F5P J51 J59 F59W F5PW J59W F5BAL 5 V IC IC 3-wire Yes 12 V 5 V, 12 V AC 100 100 V or less Relay, PLC No PLC 24 V 2-wire Terminal conduit 12 V Yes 100 V, 200 V Relay, PLC DIN terminal 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC 24 V 100 V, 200 V 2-wire 12 V 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC Diagnostic indication (

Information

P C Regeneration option U C V Servo motor power (U) Servo motor power (V) Servo motor power (W) U V W W Connect to motor cable (U, V, W) Control Circuit Power Supply Connector: CNP2 Accessory 24V Terminal name Function Details 0V 24 V side of the control circuit power supply (24 VDC) which supplies the driver.

Digital Flow Switch

For example, when analogue output is 1 to 5 V, F.S. = 5[V] 1[V] = 4[V], (ref. 1%F.S. = 4[V] x 1% = 0.04[V]) The maximum measuring range or change in analogue output over the maximum measurement range. F.S. (Full span, Full scale) H Hysteresis The difference between ON and OFF points used to prevent chattering. Hysteresis can be effective in avoiding the effects of pulsation.