SMC Corporation of America
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min IDF11C is selected as the model to process an air flow larger than 1400 l/min (ANR) with a 60Hz power supply, according to data D-2.

, D-A93, D-A96, D-A90V, D-A93V, D-A96V (mm) B E Stroke Model Stroke A 100 30 50 75 20 10 100 75 50 30 20 10 8 (5.5) 11.1 (8.6) 13.8 (11.3) 18.7 (16.2) 8 (5.5) 3 (0.5) 11.1 (8.6) MXF8 9.5 10 5 10 27.1 (24.6) 23.8 (21.3) 20.7 (18.2) MXF12 12 29.1 13.1 13.1 44.8 (42.3) 44.2 (41.7) 68.7 (66.2) MXF16 17.2 46.8 25.8 15.8 MXF20 19.4 70.7 46.2 22.7 20.7 Solid State Switch: D-M9B, D-M9P, D-M9N

4000 Flow rate Q [L/min] How to read the graph The sonic range pressure to generate a flow rate of 4000 L/min (ANR) is P1 0.4 MPa for the VXB215A D(H).

U H with effective thread depth C 4-N through hole 8-O counter bore F F I 26 13 Connector auto switch 20 (22) D D Z M E 10 (11) Approx. U Min. bending radius of lead wire 10 Auto switch K M E J S B + Stroke L + Stroke L A + 2 strokes Note) The drawings above show type D-A7 and D-A8 reed switches. The values shown inside ( ) are for switches other than types D-A7 and D-A8.

D NPN open collector 2 output + Auto shift input Refer to the dimensions for the difference between brackets A and D.

min Instantaneous flow 2 to 210 L/min Set flow rate range Accumulated flow 0 to 999,999,999 L Flow Instantaneous flow 1 L/min Minimum setting unit Accumulated flow 1 L Accumulated volume per pulse (Pulse width = 50 msec.) 1 L/pulse Accumulated value hold 2 Every 2 minutes or every 5 minutes.

P I S T O N R O D A I R H Y D R O TYPE P I S T O N R O D D E F L E C T I O N (REFERENCE FACTOR) P I S T O N R O D D E F L E C T I O N (REFERENCE FACTOR) For a concentrated load at the center of the housing. For a concentrated load at the center of the end plate.

Standard Strokes Stroke (mm) Bore size (mm) Bore size (mm) Mounting bracket Applicable switch Note 50 100 75 125 150 175 200 250 300 400 500 25 Switch mounting screw (M3 X 0.5 X 8 l ) Square nut 12 V V V V V V D-A7, A8 D-A7lH, A80H D-A73C, A80C D-A79W D-F7lV D-F7, J7 D-J79C D-F7lWV D-F79W, J79W 12 20 BQ-1 20 V V V V V V V V 32 V V V V V V V V V Switch mounting screw (M3 X 0.5 X 10 l )

Applicable bore (mm) A D L MM N R W B C H d Applicable bore (mm) Part no.

Applicable bore (mm) A D L MM N R W B C H d Applicable bore (mm) Part no.

Specification 1.1 LECS series driver 1.1.1 How to order L E S Y H 16 D S2 A 50 S 2 A1 (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (3)Motor type (2)Motor mouting position (1) Size Symbol type Output D In-line 16 25 Size Compatible driver [W] R Right side parallel AC servo motor LECSA-S1 LECSA-S3 S2 100 16 L Left side parallel S3 200 25 (Incremental encoder) LECSB2-T5 LECSC2-T5 LECSS2-T5 T6 100

For D-A93, only outward electrical entry (D dimension) is available. Dimensions in parentheses apply to 12-CXSJ6. CXSJ10 / CXSJ10 11122122Note 2) D B Note 3) (mm) D-M9 34 (35.5) 3.5 (2) 24 (25.5) 6.5 (8) D-A93 30 (31.5) 25.5 (27) 5 (6.5) Symbol A B C D Note 1) The above mentioned values are indicated as a guide for auto switch mounting positions for stroke end detection.

9, D-T99 D-9A, D-S99, S9P 90 High precision type MSUA 3 Single vane 7 D-R73, D-T79 D-R80, D-S79, S7P 180 D20 1 D-9, D-T99 D-9A, D-S99, S9P Single vane 90 3 Basic type MSUB 7 Double vane D-R73, D-T79 D-R80, D-S79, S7P 180 20 Double vane is available with 90 rotation setting only. 149 Rotary Table: High Precision Type Vane Style Series MSUA Size: 1, 3, 7, 20 How to Order Connection port location

.) < Applicable Auto switches > Solid state auto switch D-M9N(V)M9P(V)M9B(V) D-M9NW(V)M9PW(V)M9BW(V) D-M9NA(V)M9PA(V)M9BA(V) Reed auto switch D-A90(V)A93(V)A96(V) Figure 4.

2: Air Flow Capacity (Series IDFS) Data D-1: Air Flow Capacity (Series IDUS) Model IDFS6E IDFS8E IDFS11E IDUS3E IDUS4E IDUS6E Model Air flow capacity (l/min (ANR)) Air flow capacity (l/min (ANR)) 740 1200 1650 310 500 740 14-18-2 3 The models IDF1E to 11E and IDU3E to 6E have been revised.

Series Size Rotating angle Vane type Applicable auto switch Angle adjustment screws 1 D-9, D-T99 D-9A, D-S99, S9P 90 High precision type MSUA 3 Single vane 7 Table unit D-R73, D-T79 D-R80, D-S79, S7P 180 Auto switch capable 20 1 D-9, D-T99 D-9A, D-S99, S9P Single vane Since switches can be moved anywhere on the circumference, they can be mounted at positions which accommodate the specifications

D NPN open collector 2 output + Auto shift input Refer to the dimensions for the difference between brackets A and D.

Based on condition y; IDFS11E is selected as the model to process an air flow larger than 1400 l/min (ANR) with a 60Hz power supply, according to data D-2. 4 4 Note) l/min (ANR) is for reference conditions of 20 C, 1 ATM and 65% relative humidity.

min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) ZY -10S Max. vacuum pressure: 84 kPa Y3 X3 ZY -10L Max. vacuum pressure: 53 kPa Y3 X3 Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 100 100 100 100 Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR

(When L/A IN LED is OFF.) (2)Check that the connectors of L/A IN and L/A OUT communication cables are connected and there are no broken wires. (3)Keep noise sources away from the communication cable. L/A IN and L/A OUT LEDs are OFF. LINK has not yet been established. 11 : The L/A OUT LED will be OFF if the BUS OUT connector is not used.