SMC Corporation of America
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E l r ^ r ^ r ^ n i ^ \ Ambient and fluid temoerature l;NPTF (temale) Air connections lrPF (temale) Electrical connections Aluminum diecast N,laterial of body 6.7 (3) Weight lbs (kgf) { For split ranqe specilicatiofis, consult the faciory o How To Order o e Y I lccessories (optional) C'Serration joints (For NlP610) J Allen wrench (For tightening terminal cover) ' wlth joint, po1e, hex, nul

Stop 5 Series REA Sine Rodless Cylinder Dimensions (mm) REA 25, 32, 40 1in = 25.4mm Effective thread depth J L 0 0.1 NN G 4-MM H G B 2Port size I X D NB NB T N K W N S + Stroke F NA F R ZZ + Stroke MM x J B D F G H I K L N NA NB NN Model Port size REA25 REA32 REA40 Rc(PT) 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc(PT) 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15

U C S O H L 1 Series IRV Dimensions IRV1000 IRV2000 53 55 41 30 50 SMC 35 P K U C SMC S O H L P K U C S O H L 40 34 8 x 6.5 15.4 x 5.4 Approx. 106 Approx. 50.6 18 Approx. 79 Atmosphere Atmosphere 45.5 13 SET VAC SET G SET G 30 SET VAC 43 Pad side Vacuum pump side Pad side Vacuum pump side Approx. 43 35 2-Rc 1/8 Connection port 2-Rc 1/8 Vacuum gauge port 2-Rc 1/4 Connection port Approx. 60

Dimensions Formulae L1 = 11n + 15.5 L2 = 11n + 55 n: Stations (max. 16 stations) L n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 191.5 231 262.5 273 16 L1 L2 (L3 ) (L4 ) 26.5 66 87.5 98 37.5 77 100 110.5 48.5 88 112.5 123 59.5 99 125 135.5 70.5 110 137.5 148 81.5 121 150 160.5 92.5 132 162.5 173 103.5 143 162.5 173 114.5 154 175 185.5 125.5 165 187.5 198 136.5 176 200 210.5 147.5 187 212.5 223 158.5

Note 5) For ZSE40F (compound pressure) with "psi" indication, zero clear is in the range of 0.01 psi. 22 62 30 70 Set pressure range 100.0 to 100.0kPa 10.0 to 101.3kPa 0.1 to 1.000MPa Setting range 100.0 to 100.0kPa 101.3 to 101.3kPa 1.000 to 1.000MPa Internal circuits and wiring examples ZSE40 (F) ISE40--62 (L)-(M) ZSE40 (F) ISE40--22 (L)-(M) DC (+) (Brown) DC (+) (Brown) Analog output

[See Auto drain replacement L) to M).] When it is difficult to insert the new element into the body. Please apply lubricant to the connection (body) of the O-ring for the element. At this time, pay attention that lubricant is not stuck to the element surface and internal surface of the bowl and body (parts other than the element connection).

Problem 6 Red ON OFF L RUN L RUN LED is OFF OFF Problem 7 L ERR L ERR LED is RED Red ON Problem 8 Problems related to the NFC Problem 9 -61No.EX-OMZ0016-C Base troubleshooting LED status Problem LED Possible causes Investigation and countermeasures Colour of LED ON/Flashing No. name 1 All OFF The US1 (for control) power supply is OFF Supply 24 VDC +/-10% for US1 (for control) power source

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A721Air, Nitrogen10 to 210 l/min10 to 210 l/min20 to 200 l/min2 l/min2 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A721Air, Nitrogen10 to 210 l/min10 to 210 l/min20 to 200 l/min2 l/min2 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A721Air, Nitrogen10 to 210 l/min10 to 210 l/min20 to 200 l/min2 l/min2 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A751Air, Nitrogen25 to 525 l/min25 to 525 l/min50 to 500 l/min5 l/min5 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)170 mA or less290 g1/2Heater type3-digit, 7-segment LED?

sResistanceConnectionMaterialWeightPF2D200/201PF2D504- -10.25 to 4.50 l/min0.25 to 4.50 l/min0.05 l/min0.05 l/pulseReal-time flow rateAccumulated flow0 to 999999 l, 0 to 999999 gal(US)24 VDC (ripple ?

sPower supply voltageResponse timeHysteresisPF2W330/3317 to 110 l/min7 to 110 l/min1 l/min1 l/pulsel/min, gal(US)/minl, gal(US)0 to 999999 l?3% F.S. or less?1% F.S. or less?2% F.S. or less (0 to 50C, based on 25C), ?

sResponse timeHysteresisPower supply voltageResistance--Real-time flow rateAccumulated flowSwitch outputAccumulated pulse outputEnclosureOperating temperature rangeWithstand voltageInsulation resistanceVibration resistanceImpact resistanceNoise resistancePF2W704TWater, Mixture of water (50%) and ethylene glycol (50%)0.35 to 4.5 l/min0.35 to 4.5 l/min0.5 to 4 l/min0.05 l/min0.05 l/pulse0 to

sResponse timeHysteresisPower supply voltageResistancePF2W711Water7 to 110 l/min7 to 110 l/min10 to 100 l/min1 l/min1 l/pulse0 to 50C?5% F.S. or less?3% F.S. or less?5% F.S. or less (0 to 50C, based on 25C)70 mA or less1150 g3/4, 1Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lOperating: 0 to 50C, Stored: ?

sResponse timeHysteresisPower supply voltageResistancePF2W711Water7 to 110 l/min7 to 110 l/min10 to 100 l/min1 l/min1 l/pulse0 to 50C?5% F.S. or less?3% F.S. or less?5% F.S. or less (0 to 50C, based on 25C)70 mA or less1150 g3/4, 1Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lOperating: 0 to 50C, Stored: ?

sResponse timeHysteresisPower supply voltageResistancePF2W711Water7 to 110 l/min7 to 110 l/min10 to 100 l/min1 l/min1 l/pulse0 to 50C?5% F.S. or less?3% F.S. or less?5% F.S. or less (0 to 50C, based on 25C)70 mA or less1150 g3/4, 1Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lOperating: 0 to 50C, Stored: ?

sResponse timeHysteresisPower supply voltageResistancePF2W720Water1.7 to 17.0 l/min1.7 to 17.0 l/min2 to 16 l/min0.1 l/min0.1 l/pulse0 to 50C?5% F.S. or less?3% F.S. or less?5% F.S. or less (0 to 50C, based on 25C)70 mA or less520 g3/8, 1/2Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lOperating: 0 to 50C, Stored: ?