ZSE F/ISE

ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Directional Control Valves Air Grippers Modular F. R.

MXW Series Long Stroke Slide Table

Table roll deflection arrow A due to static roll moment applied at arrow F when Lr=(see table) and table is retracted. Deflection on A when the load is applied at F. Deflection on A when the load is applied at F. Deflection on A when the load is applied at F.

Sine Cylinder Series REC

Dimensions Basic style: RECB 2 x P (Rc, NPT, G) 2 x NN Width across flats B2 G H2 G Width across flats B1 H1 Plugged (M5 x 0.8) I 2 x Eh8 NA D MM AL K A 1.5 1.5 Effective thread length 2 x FL Width across flats KA NA F N N ZZ + Stroke S + Stroke F H (mm) A AL B1 B2 D E F FL G H H1 H2 I K KA N NA NN P S ZZ MM Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 M20 x 1.5 18 15.5 13 26

Sine Cylinder Series REC

Dimensions Basic style: RECB 2 x P (Rc, NPT, G) 2 x NN Width across flats B2 G H2 G Width across flats B1 H1 Plugged (M5 x 0.8) I 2 x Eh8 NA D MM AL K A 1.5 1.5 Effective thread length 2 x FL Width across flats KA NA F N N ZZ + Stroke S + Stroke F H (mm) A AL B1 B2 D E F FL G H H1 H2 I K KA N NA NN P S ZZ MM Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 M20 x 1.5 18 15.5 13 26

Cylinder with Lock

l h 10.2 10.2 l + Stroke f * For one side rod boot type, a rod boot is mounted on the lock side (left side of the drawing above).

REC

Dimensions Basic style: RECB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com H2 2-RcP Width across flats B2 Width across flats B1 2-NN G G H1 Standard port Pluged (M5 x 0.8) I 2-Eh8 D MM AL K A N N F lNA S + Stroke H F ZZ + Stroke (mm) A AL B1 B2 D E F G H H1 H2 I

energy saving effect

G1, Symbol N: NPT1) Tank drain port Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Automatic fluid fill system (Standard) Circulating fluid system Pump capacity Supply side pressure range MPa 0.2 to 0.5 Supply side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Metal Stainless

MXW

Amount of displacement on A when the load is applied at F. Amount of displacement on A when the load is applied at F.

NVEPA|VEFseies

Mat<. 1o/o 13-18.5 (1A F S.) lor Voltage Fluct. Max. +1 0olo (1A F.S.) Max. +1% against DC22-26V (1A F.S.) :urrent itabllity tor Temp. Fluct. Max. +1% @ 79'F (25'C) (1A F S.) Mat<. +2Vo @ 79'F (25"C) (1A F.S.) )perating Temp.

HRS100/150

G3/4, Symbol N: NPT3/4) Tank drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Automatic fluid fill system (Standard) Pump capacity HEA IDH Supply side pressure range MPa 0.2 to 0.5 Supply side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Stainless steel, Copper (Heat

Pneumatic Transfer System Series MF

339 H 323 352 I 10 15 15 32 15 32 15 32 589 to 614 633 to 673 564 to 589 542 to 581 579 to 605 571 to 610 MF -90 15 32 A G D Note 1) F D Note 1) D Note 1) F F Y C C C Y Y B G A 90 B 90 B G A D Note 1) 90 G A H X X X D Note 1) D Note 1) B B B F E F F E A H A G G RG RT RS B 296 305 C R310 R445 D 93 129 E 60 87 F 10 15 G 6 7 B 296 309 C R390 R495 D 93 129 E 60 87 F 10 15 G 6 7 B 299 307 C R350

REA/REB

F A F For the double axis type, this is the cylinders central axis.

ZSE30A(F)/ISE30A

(ZSE30AF (for compound pressure) 3.5% F .S.) Note) When the display calibration function is used, the set pressure value may change 1 digit. 41 ZSE30A(F)/ISE30A Series The F in ( ) shows the function code number. Refer to the Operation Manual for the details of operation procedures and function codes.

IDG

Note 2) They are not applicable in case the thread type is N or F.

REA/REB

F A F For the double axis type, this is the cylinders central axis.

LV50-OMQ0002

Time Accumulated pulse output mode 50 msec Time -35No.LV50***-OMQ0002-G [F 2] Setting of OUT2 Set the output mode of OUT2.

Electro-Pneumatic Valve NVEP/NVEF Series

Fluct. l\,lax. +1% @ 79'F (25'C) {1A F.S.) Max. +2% @ 79'F (25'C) (1A F.S.) vEA 250 vEA 251 vEA 252 Cperating Temp.

S Couplers Series KKA

Body size Body size Port size Port size KKA3 S-01 F KKA3 P-01 F Rc1 / 8 Rc1 / 8 KKA3 S-02F 1 / 8 1 / 8 KKA3 P-02F Rc1 / 4 Rc1 / 4 KKA3 S-03 F KKA3 P-03 F Rc3 / 8 Rc3 / 8 KKA4 S-02F KKA4 P-02F Rc1 / 4 Rc1 / 4 KKA4 S-03 F 1 / 4 KKA4 P-03 F 1 / 4 Rc3 / 8 Rc3 / 8 KKA4 S-04 F KKA4 P-04 F Rc1 / 2 Rc1 / 2 KKA6S-03 F KKA6P-03 F Rc3 / 8 Rc3 / 8 KKA6S-04 F KKA6P-04 F 1 / 2 Rc1 / 2 Rc1 / 2 1 / 2 KKA6S

.007 Aqua F-2815-071-B80 F-2815-071-B85 .010 Yellow F-2815-101-B80 F-2815-101-B85 .012 Black F-2815-121-B80 F-2815-121-B85 .016 Grey F-2815-161-B80 F-2815-161-B85 .020 Blue F-2815-201-B80 F-2815-201-B85 .025 Brown F