Model: 12 (Top Ported), Number of Cores: L3 (9 Cores), Lead Wire Length: 2 (1.5m), Valve Stations: 4 Stations, P, E Port Location: U (U Side), SUP/EXH Block: R (External Pilot), P, E Port Size: N (ø3/8" One-touch Fitting)
Model: 12 (Top Ported), Number of Cores: L3 (9 Cores), Lead Wire Length: 2 (1.5m), Valve Stations: 2 Stations, P, E Port Location: U (U Side), SUP/EXH Block: R (External Pilot), P, E Port Size: N (ø3/8" One-touch Fitting)
Model: 12T (Top Ported), Type: None, Valve Stations: 2 Stations, P,E Port Entry: D (D Side), SUP/EXH Block Assembly: R (External Pilot), P,E Port Size: N (ø1/2" One-touch Fitting)
Model: 12 (Top Ported), Number of Cores: L3 (9 Cores), Lead Wire Length: 2 (1.5m), Valve Stations: 3 Stations, P, E Port Location: U (U Side), SUP/EXH Block: R (External Pilot), P, E Port Size: N (ø3/8" One-touch Fitting)
Model: 12T (Top Ported), Type: None, Valve Stations: 10 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), P, E Port Size: N (ø3/8" One Touch Fitting), Mounting: D (DIN Rail Mounting w/DIN Rail)
Model: 12T (Top Ported), Type: None, Valve Stations: 2 Stations, P,E Port Entry: D (D Side), SUP/EXH Block Assembly: R (External Pilot), P,E Port Size: N (ø1/2" One-touch Fitting), Mounting: D0 (DIN Rail Mounting w/o DIN Rail)
Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 2 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), P, E Port Size: N (ø5/16")
Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 14 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), P, E Port Size (One-touch Fitting): N (ø3/8")
Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 12 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), P, E Port Size (One-touch Fitting): N (ø3/8"), Mounting: D (DIN Rail Mounting, w/DIN Rail)
Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 12 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), P, E Port Size (One-touch Fitting): N (ø3/8")
Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - M12 Connector), SI Unit Output Polarity: Positive Common (or None), Valve Stations: 16 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), P, E Port Size: N (ø5/16"), Mounting: D (DIN Rail Mounting, w/DIN Rail)
Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - M12 Connector), SI Unit Output Polarity: N (Negative Common), Valve Stations: 12 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), P, E Port Size: ø8, Mounting: D0 (DIN Rail Mounting w/o DIN Rail)
Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Ouput Polarity: N (Negative Common, PNP), Valve Stations: 10 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: R (External Pilot), P,E Port Size: N (ø1/2")
Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: VA (CC-Link - 32 Outputs - Connector M12), SI Unit Ouput Polarity: Positive Common, NPN, Valve Stations: 2 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: R (External Pilot), P,E Port Size: ø12, Mounting: D (DIN Rail Mounting, w/DIN Rail), DIN Rail Option: 3 (for 3 Stations; Longer Rail than Total
Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Ouput Polarity: N (Negative Common, PNP), Valve Stations: 7 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: R (External Pilot), P,E Port Size: ø12, Mounting: D (DIN Rail Mounting, w/DIN Rail)
Slit Valve 0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
The movement is linked via connecting rod r and feedback spring w to the input diaphragm e balancing the higher pressure. When this occurs nozzle y clearance increases allowing centralizing of the spool o to take place. This holds the piston rod in the new position. Input signal increase results in proportional movement of the piston rod.
AMV15 SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E
Bonnet Common IN Individual IN Common IN Individual IN Polyacetal 2 Regulator Regulator ARM2500-A-02 ARM2500-B-02 ARM3000-A-03 ARM3000-B-03 9 1 Replacement Parts End plate R 10 1 Description Material Part no. End plate L 11 1 No.
Description Material Note Aluminum alloy Hard anodized Side plate q Carbon steel Black zinc chromated Finger w Carbon steel Black zinc chromated Lever e Carbon steel Black zinc chromated Joint r Stainless steel Shaft t Stainless steel Joint pin y Soft steel Black zinc chromated Cylinder plate u Stainless steel Lever pin i Steel lined oil imfilled acetal resin bearing Bearing o Compact cylinder