High Vacuum L Type Valve

XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

Parallel Type Air Gripper Series MHZ

Axial Port (M3 Port) [M] MHZA2-6 M MHZAJ2-6 M S C S C M3 x 0.5 Piping port End boss assembly 20 -0.013 -0.035 4 5 8f8 33.8 12 10 23.7 Specifications and dimensions other than the above are the same as the basic type or the end boss dimensions of the MHZA type. Specifications and dimensions other than the above are the same as the basic type.

energy saving effect

L Required facility water system 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s Model Heat radiation [kW] Facility water specifications HRSH100-Wl-l Approx. 20 Refer to "Facility water system" in the specifications on pages 167 and 169. 0.05 s HRSH150-Wl-l Approx. 27 HRSH200-Wl-l Approx. 34 HRSH250-Wl-l Approx. 40 0.02 s 0.01 s 100 135 200 300

NAAMS Standards Compliant

VA0.02 [mm] Bore size I K NA NB NC NN S V VA VB VC 50 12 55 13 36.5 9.5 M8 x 1.25 11 8 30 32 63.5 63 15 55 13 36.5 15 M8 x 1.25 13 8 30 32 63.5 4 CKZ3N -X2742A -X2568 Dimensions: With Manually Operated Handle HA HD H Max.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

P . 15-11-3 15-9-2 2 Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS How to Order 2 2 0 01 06 S AS 1F Nil Option Body size 1 2 3 4 M3, M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard None With seal Hexagonal lock nut Electroless nickel plated S K N If more than one option is required, write option part numbers in the order of S, K, N.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

01(R) Note 1) Option Note 2) When two or more symbols are specified, indicate them alphabetically. (2) 01 [Rc 1/8] 02 [Rc 1/4] 02 [Rc 1/4] 03 [Rc 3/8] VQZ200 VQZ200-S(2) VQZ300 VQZ300-S(2) Note) Symbol R indicates an external pilot.

Mechanical Valves Series NVM, NVFM, NVZNI

Series NVM MECHANICAL VALVES DIMENSIONS NVM220-N02-30 230-N02-30 NVM220-N02-32 230-N022 F , O , F 1 1 4 6 l b s ( 5 2 k 9 ) P T 0 2 1 6 i n ( 5 S m m ) O T 0 039 in (1mm) T.T, 0 256 in (6 Smm) '75 PSIG (5 Kgf/cm2) -75 PSIG (5 Kgflcmz) A B c D E F G H J 4.29 (109) 3.01 76.5) 0.96 e4.51 't.28 32.5'l 0.06 {1.5) 0.12 (3) 1.54 (39) 1.20 (30.51 0.24 (6) 11 46 lbs, (5 2 0 216 in (5 5mm) 0 039

IIIIIII

Series NVM MECHANICAL VALVES DIMENSIONS NVM220-N02-30 230-N02-30 NVM220-N02-32 230-N022 F , O , F 1 1 4 6 l b s ( 5 2 k 9 ) P T 0 2 1 6 i n ( 5 S m m ) O T 0 039 in (1mm) T.T, 0 256 in (6 Smm) '75 PSIG (5 Kgf/cm2) -75 PSIG (5 Kgflcmz) A B c D E F G H J 4.29 (109) 3.01 76.5) 0.96 e4.51 't.28 32.5'l 0.06 {1.5) 0.12 (3) 1.54 (39) 1.20 (30.51 0.24 (6) 11 46 lbs, (5 2 0 216 in (5 5mm) 0 039 in

HRS100/150

Operating time 20 s 30 s HRZ 10 s Voltage HRZD 5 s Min. 2 s HRW 1 s 0.5 s dV dt HECR = Voltage increase ratio 0.2 s 0.1 s dV HEC 0.05 s 0.02 s Time HEB 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 1500 dt HED Current (% for chiller main breaker volume) < For option B [With earth leakage breaker]> 3.

Parallel Type Air Gripper

External gripping 11 34 42 65 158 254 force D I.D. Internal 17 45 66 104 193 318 Note 1) Gripping force per finger Effective value (N) gripping force O.D. External gripping S 7.1 27 33 45 131 217 force I.D.

MHx-OMU0057

20 2.5 0.95 25 3 2.25 0.2mm 0.2mm 14 - 3-4. 1025 (1)Assy (2) (3) (4) (5)Assy O Assy :GR-S-010(10g) O C 15 - 32,40 1C 2 3 4.Assy :GR-S-010(10g) C 32 3 40 4 32 2 40 2.5 Assy 16 - 3-5./ 1025 / / / / 1 12 13 2 10,16; 20;25; 14 20,25; 3 15 C 4 5 16 A 6 17 A 18 NO 7 19 NC 8 20 NBR 9 21 NBR 10 22 NBR 11 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-D MHZ2-C MHZ10-PS MHZ16-PS MHZ20

MXU

For details, refer to page 8-30-31. 8-3-11

VK300

42 VV5K3-40 (S) 41 (S) 42 Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note 1) Mounting direction is fixed, do not mount on opposite side.

MXU

For details, refer to page 8-30-31. 8-3-11

53

20 s Max.

VXZ

Fluid Table (1) Rated Voltage-Electrical Entry-Electrical Option Standard specifications Option (1) Made to Order (2) Water (standard) Turbine oil High temperature water (D, E) Air X500B Vacuum (up to 1.3 x 10 2 Pa) X500B For pure water X500 G C Class B D, T Class H G, C T S Note) S L, Z L, Z S Note) Surge voltage suppressor is attached in the middle of lead wire.

Lightweight and Compact

20 s Max.

HEC_W-E

Baud Rate B a u d R a t e M O D E < 1 2 0 0 b / s Setting range : 600, 1200, 2400, 4800, 9600, 19200b/s Indicated content : Baud rate (Ex. : 1200b/s) Function : Sets baud rate for communication. 3.

CRB2-OM00001

In this case, consider using larger size or external stopper (buffer mechanism) to stop the load itself. 11 5-2Kinetic Energy Allowable kinetic energy of CRB2BW40 is 0.04 (J) when rubber cushion is used, and it is 0.03 (J) when rubber cushion is not used.