Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1 (Piping port) (Opposite side: Same) -X 3 208 6 Data 22.5 11 Z (10 + 1/2 ST) (13) 4 (mm) Z S SS ZZ Stroke Model CXS6-10 CXS6-20 CXS6-30 CXS6-40 CXS6-50 68.5 10 15 23 55 78.5 20 20 33 65 88.5 30 25 43 75 98.5 40 30 53 85 108.5 50 35 63 95 8-29-7 8 Series CXS Dimensions: 10, 15 ZZ Stroke SS 9 J D B M Y (Hexagon socket head set screw) L Z I 1 1 G0.2 (G) A P H 6.3 5 X (Hexagon socket head cap
. 4 stations 4 1 SOL. 5 stations 5 SOL. 6 stations 6 (b) SOL. 7 stations 7 2 SOL. 8 stations 8 SOL. 9 stations 9 Black White SOL. 10 stations 10 SOL. 11 stations 11 SOL. 12 stations 12 SOL. 13 stations 13 SOL. 14 stations 14 SOL. 15 stations 15 SOL. 16 stations 16 SOL. 17 stations 17 SOL. 18 stations 18 COM 19 COM 20 Electrical wiring specifications 18
11 11 11 V 124 144 169 194 219 W V A 59.5 34.5 34.5 34.5 34.5 34.5 B 135.5 160.5 185.5 210.5 235.5 260.5 MXW16 8.5 W 39.5 14.5 14.5 14.5 14.5 14.5 V 155.5 180.5 205.5 230.5 225.5 280.5 A 68.5 43.5 43.5 43.5 43.5 43.5 43.5 B 168.5 193.5 218.5 243.5 268.5 293.5 318.5 MXW20 10 W 48.5 23.5 23.5 23.5 23.5 23.5 23.5 V 188.5 213.5 238.5 263.5 288.5 313.5 338.5 A 86.5 74.5 44.5
BDL (108.5) 10 4.6 10 34.3 101 74.5 35 5.5 28.1 12.7 ADDRESS No.
SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 <1> When this signal is OFF, an alarm is being generated for the actuator/controller.
Type 2 3 Elbow Universal Applicable tube outside diameter Metric size Inch size 3.2 4 6 8 10 01 03 05 07 09 11 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 23 04 06 08 10 Control system 0 1 Meter-out Meter-in Use a 1/8" tube.
L 10.1 . 10-1 10.2 . 10-1 10.3 . 10-2 10.4 . 10-2 11 M 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 11.4 . 11-2 12 R 12.1 . 12-1 12.2 . 12-1 12.3 . 12-1 12.4 . 12-2 12.5 . 12-3 13 S 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 T 14.1 . 14-1 14.2 . 14-1 14.3 . 14-1 14.4 . 14-2 14.5 . 14-3 i i i.1 () 3 i.1.1 3 i 1 i i.2 i 2 i i.2.1 i.2.2 i.2.3 50 i.2.4 i 3 i i.2.5 0
0.6MPa 40 40 Holding force (N) Holding force (N) 0.5MPa 0.5MPa 30 30 L L 0.4MPa 0.4MPa 20 20 0.3MPa 0.3MPa 10 10 0.2MPa 0.2MPa 0 0 10 20 30 40 50 60 10 20 30 40 50 60 Holding point L(mm) Holding point L(mm) MHK2-20D MHK2-20D 80 60 70 Pressure 0.6MPa Pressure 0.6MPa 50 60 Holding force (N) Holding force (N) 50 40 0.5MPa 0.5MPa 40 30 0.4MPa 0.4MPa 30 20 0.3MPa 0.3MPa 20 10 10 0.2MPa 0.2MPa
11 12 VXD23 to 29 136 Construction VXD Series Normally Open (N.O.) !
Limited at the stroke end Limited at the stroke end +3 +3 +3 +3 direction + direction direction + direction 8 11 8 11 0 5 10 stroke end 0 5 10 stroke end [mm] [mm] The Card Motor performs relative positioning operations as shown below if the table starts from a position outside of the software stroke range, for example when the table has reached the mechanical end stop in pushing operation
Max 1.25 9 80 92 108 8 M1 OX 1.S 15 18 M1 Oxl .5 9 63 103.5 MIOx l .S 11 99 116 13' 10 M1 6X2.0 21 22 M12xl .7S 11 123 Ml 2x 1.75 80 Clevis Mount: C0020P 0 -0 OM-DO Special cap bolt (mm) eo.. _ N CD CL ew ev A 0 R CU ex cz RR Ll H H Thread e I (mm) C Depth M8xl .2S M8x l .25 14 117 I .
Bit 13 Bit 15 4 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 (EX600-DXE) 1 2 3 4 5 6 7 8 0 2 4 6 8 10 12 14 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 14 15 16 17 18 19 20 21 1 3 5 7 9 11 13 15 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 -30No.EX-OMN0035CN-A (EX600-DXF) 0 1 2 3 4 5 6 7 2 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 3 Bit 1 Bit 3 Bit
N.O. 125 VAC 15 15 4 2 10 10 4 2 250 VAC 15 15 3 1.5 10 10 3 1.5 8 VDC 15 15 3 1.5 15 15 5 2.5 15 15 3 1.5 10 10 5 2.5 14 VDC 30 VDC 3 6 6 1.5 5 5 5 2.5 125 VDC 0.5 0.5 0.3 0.3 0.05 0.05 0.05 0.05 250 VDC 0.25 0.25 0.2 0.2 0.03 0.03 0.03 0.03 16-12-6 2 Paddle Style Flow Switch Series IF3 Fluid and Ambient Temperature Range Enclosure Open type Using indoors away from water drop.
L/min 10 L ON OFF ON OFF , , 2 5 10 L/min 5 ,10550 L -14No.PF-OMM0004-D ON-OFF 1 L/min ,10 11 12 1 L/min () SI SI PF3W ON-OFF () ON 0 PVC -15No.PF-OMM0004-D IN IN (75 ) 9022545 -16No.PF-OMM0004-D (PF3W704/720/740 ) (M44 ) 8 1.5 mm (81 ) (PF3W711 ) (M54 ) 2 mm (81 ) -17No.PF-OMM0004-D (PF3W704/720/740 ) 3.04 8 0.50.7 Nm (81 ) ,, (4 ) (PF3W711/721 ) ,(4.0,4 ) 1.01.2
Form w 1 Material 12 N S U F GN GS 10 10 11 1 ZP UT 13 13 14 1.5 16 16 17 Y 2.5 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber A B Construction p. 115 Mounting Bracket Assembly From p. 121 With adapter 10 to 16 w q ZPT UT N A5 10 e Vacuum inlet (Male thread) B Width across flats D 15.5 C A5 M5 x 0.8 A6 M6 x 1 A Model A B C D
-1/8 (OUT port) 11 P = 22 11 1.5 4.5 6 32 6 54 ( 19.5) 11 9.5 11 9.5 4-M4 x 0.7 10 24 10 46 When not equipped with bracket, the M3 threads at both ends (4 positions) can be used for other purposes.
with secondary batteries ZS-33-M-X221 90 Material restriction Mounting screw (accessory) Type Integrated display 7 R Rated flow range (Flow rate range) 10 50 11 * ( ): Fluid: CO2 0.2 to 10 (5) l/min 1 to 50 (25) l/min 2 to 100 (50) l/min Panel mount adapter (For without flow adjustment valve) Port size ZS-33-J Symbol Description Flow rate range 10 Panel mount adapter A 50 11 C6 C8 6 One-touch
81 11 M6 x 0.75 10 5 1 6.5 15 123 +0.08 0 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12 5.5 1 7.5 24 123 +0.08 0 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14 6 1.25 8.5 24 144 +0.08 0 50 +0.08 0 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18 11.5 3 14.5 24 167 +0.08 0 80 10 22 M22 x 1.5 23 80 3/8 21 130 40
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).