CE

How to Order CEP1 B 50 12 F9BW Number of auto switches Nil 2 pcs. Mounting style B L F 12 mm equivalent S 1 pc.

Integrated Controller

Product Precautions Model EQFS16H EQFS25H EQFS32H EQFS40H Stroke [mm]1 50 to 500 50 to 800 50 to 1000 150 to 1200 Work load [kg]2 Horizontal 10 15 18 15 26 40 40 39.5 50 68 68 26 60 75 80 Vertical 3 6 12 2 6 12.5 15 4 10 16 20 4.5 4.5 25 40 Up to 400 10 to 800 5 to 400 3 to 195 20 to 1200 12 to 850 6 to 450 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5

Table of Contents

33 24 41.5 30 29.5 2 (1) 2.5 65 132 5.5 3.2 50 143 28 50 110 14 7 35 41 55 28.5 64 13 184 7 4 71 0 146 31 50 110 7 14 35 55 41 66 30.5 7 4 71 10 3.5 187 183 36 75 145 9 18 72.5 40 50 35 74 12 222 9 4 88 3.5 185 36 75 155 9 18 40 77.5 50 35 12 74 224 9 4.6 88 3 264 43 20 186 20 11 50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280

Electric Actuator with Integrated Guide

For ordering information, refer to the option part numbers on page 82. 74 78 Controller Series LC1 Performance/Specifications General specifications Model LC1-1H1 LC1-1H2 Item 100/110V AC 10%, 50/60Hz (100V AC, 50/60Hz for LC1-1HV1) 200/220V AC 10%, 50/60Hz (200V AC 10% for LC1-1H32) (200V AC, 50/60Hz for LC1-1HV2) Power supply Leakage current 5mA or less Dimensions 80 x 120 x 244mm Weight

VFS

(External pilot port: Body side) Option How to Order Pilot Valve Assembly SF4 DZ 1 12 Applicable model Coil rated voltage Individual pilot exhaust 12 For VFS220 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC (50/60 Hz) 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz Other Electrical entry, Light/Surge voltage suppressor Common pilot exhaust 13 For VFS230 G Grommet Grommet with

CP95

142 26 48 7 65 45 26 32 10 4.5 144 142 32 9.5 7 64 79 50 40 36 20 10 145 12 15 160 28 55 9 75 52 28 36 11 4.5 163 161 36 12 10 72 90 55 50 45 25 12 155 12 15 170 32 68 9 80 60 32 45 12 5.5 175 170 45 12 10 90 110 70 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 16 10 100 120 80 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 16 12 126 153 100 60 100 120

CP95

142 26 48 7 65 45 50 26 32 10 4.5 144 142 32 9.5 7 64 79 40 36 20 10 145 12 15 160 28 55 9 75 52 55 28 36 11 4.5 163 161 36 12 10 72 90 50 45 25 12 155 12 15 170 32 68 9 80 60 70 32 45 12 5.5 175 170 45 12 10 90 110 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 80 16 10 100 120 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 100 16 12 126 153 60 100 120

Environment

24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg]

Stability of suction position,

CL 2 5 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50BM ZP3E-125BM ZP3 12 30 S, F S, F 25 Displacement [mm] Displacement [mm] ZP3E ZP3E 20 8 N N ZP2 15 U U 10 4 ZP2V CL CL 5 ZP 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZPT ZPR ZP3E-63BM XT661 16 N, S, F Displacement [mm]

Solid State Auto Switches

Note 4) The auto switches can operate at 12 VDC, but consider the internal voltage drop of the auto switch described in Reed Auto Switch Precautions on page 12.

SMC

12 38 B A 16 34 16 34 H Section AA Section BB (NN1) x H G (mm) Model F 50 50 50 60 35 60 70 75 80 ZZ 133.5 133.5 133.5 143.5 156.5 197.5 238.5 296.5 336.5 M 92 92 92 102 115 156 197 255 295 Z 90.5 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5 K 35 45 55 65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 G 22

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

entry is not available for 50 and 63. ( ) D-Y69A, D-Y69B, D-Y7PV D-Y7NWV, D-Y7PWV, D-Y7BWV 8-12-23 24 Series MY1W Mounting of Auto Switch & Installation of Lead Wire Cover (50, 63) Caution Be sure to install a lead wire cover on the auto switches for size 50 and 63 cylinders.

RSQ

20 14 18 12 18.5 12.5 15.5 9.5 31.5 32.5 38.5 35 38 34 27 29 26.5 21.5 11 25.5 15 24.5 14 22.5 12 23 12.5 20 9.5 35 36 42 38.5 41.5 37.5 30.5 32.5 30 29.5 4.5 33.5 8.5 32.5 7.5 30.5 5.5 31 6 28 3 41 42 48 44.5 47.5 43.5 36.5 38.5 36 10-8-13 14 Series RSQ Operating Range Bore size (mm) 12 Auto switch model 16 20 32 40 50 D-A7/A80 10 12 11 12 12 D-A7H/A80H D-A73C/A80C 14 13 14 13 13 D-A79W

MVGQ

CC MVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions RB A A E E Symbol Symbol DB DB Bore size (mm) Bore size (mm) Stroke Stroke J Up to 50 st Over 50 st 30 st or less 30 st or less Over 30 st Over 30 st Up to 50 st Over 50 st 12 12 39 0 8 43 4 16 6 55 D16 16 43 0 10 49 6 22 8 65 20 20 0 14.5 12 10 57 47 61.5 27 10 74 -X 20Data 10-16-7 8 Valve Mounted

Stroke Reading Cylinder and Counter

75 100 125 150 175 200 300 500 25 50 75 100 250 400 12 20 32 40 50 63 12 equivalent 25 to 150 1 to 150 20 equivalent 25 to 300 1 to 300 Strokes other than standard strokes are available upon request.

TABLE OF CONTENTS

DC Series 50 5.4 to 575 VAC 50-60 HZ. 3.0 to 300V DC Series 70 12 to 1050 VAC 50-60 HZ. 2.5 to 220V DC 2.39 (60.7) 1.69 (42.9) Nominal Power: 1/2 NPT Series D.C.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Note 1) Actuation Voltage Electrical entry Light/surge voltage suppressor Sonic conductance C [dm3/(sbar)] 2 position 3 position DC AC 100 V 50/60 Hz 110 V 50/60 Hz 200 V 50/60 Hz 220 V 50/60 Hz M plug connector L plug connector 24 V Note 4) Series M8 connector Pressure center 12 V DIN terminal { } 4/25/3 (A/BEA/EB) Closed center Exhaust center

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

"n" pcs. 90 75 120 Same side (n 4) 2 (n 4) 2 (n 2) 2 15 + 50 90 + 50 120 + 50 Different sides D-B5, D-B6 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n =4 , 8, 12, 16 120 + 5 (n 2) 75 + 50 (n 2) 90 + 50 (n 2) Same side n = 2, 4, 6, 8 n = 2, 3, 4 n = 2, 4, 6, 8 10 1 pc. 120 90 Different sides 20 90 120 2 pcs. "n" pcs.

MK

Clamp stroke Manufacturable Range of Body Options Clamp stroke 10 mm 20 mm 50 mm Applicable bore (mm) 12 to 40 12 to 63 50 to 63 Symbol 10 20 50 Bore size (mm) 12, 16 20 to 63 FN MF N F M Nil Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CY1

40 34 12 10 3 6.5 10 12 33 14 25.5 PA (N) JxK PB PW Q S ta tb TT T QW W Z LD L Model CY1S6 CDY1S6 M4 x 0.7 x 6.5 40 3.5 10 25 25 50 52 16 42 10 16 46 68 CY1S10 CDY1S10 M5 x 0.8 x 9.5 45 4.3 9.5 25 38 60 60 24 47 12.5 20.5 0.5 1.0 58 80 PA dimensions are for split from center.