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A digital pressure gauge is recommended for such situation or as deemed necessary. 451 AR10-A to AR40-A Series Flow Rate Characteristics (Representative values) Condition: Inlet pressure 0.7 MPa AR10-A M5 AR20-A Rc1/4 0.6 0.6 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 25 50 75 100 125 150 0 200 400 600 800 Flow rate L/min (ANR) Flow rate L/min

Safety cannot be assured in the case of unexpected malfunction. 7 3 5 6 9 1 2 4 8 10 0 Blue : 24 VDC (for input and controlling) 118.5 76.5 97.5 108 139.5 55.5 66 87 129 150 L1 45 4 3 Black : 0 V (for input and controlling) 236.8 152.8 194.8 215.8 278.8 L2 110.8 131.8 173.8 257.8 299.8 89.8 Power supply connector Provide grounding to assure the safety and noise resistance of the Fieldbus

Doc.No.LV50***-OMQ0002-G Product Name Electromagnetic Digital Flow Switch Model/ Series/ Product Number LFE# SMC Corporation No.LV50***-OMQ0002-G Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product Parts 13 Definitions and Terminology 14 Mounting and Installation 16 Installation 18 Piping Method 19 Wiring 21 Flow Setting 24 Function Settings 26 Default Setting

Doc.No.LFE*-OMZ0012 Product Name Electromagnetic Digital Flow Switch Remote Type Model/ Series/ Product Number LFE#(Z) SMC Corporation Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product Parts 13 Definition and Terminology 14 Mounting and Installation 15 Installation 17 Piping Method 18 Wiring 20 Maintenance and Inspection 22 Troubleshooting 23 Specifications

1 Check Valve Series AK Large flow capacity Low cracking pressure: 0.02 MPa A wide variation of models Model Model Effective area (mm2) Port size Weight (g) 1 8 AK2000-01 25 105 1 4 AK2000-02 27.5 100 1 4 AK4000-02 47 155 3 8 AK4000-03 85 150 1 2 AK4000-04 95 140 3 4 AK6000-06 200 345 AK6000-10 230 315 1 Specifications AS Fluid Air Proof pressure 1.5 MPa ASP Maximum operating pressure 1 MPa

(mm) 10 9 8 7 6 5 4 3 Manifold stations n L1 L2 2 180 165 150 135 120 105 90 75 60 235.5 223 198 185.5 173 160.5 148 123 110.5 8 Series ITV0 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage. These instructions indicate the level of potential hazard by labels of "Caution", "Warning" or "Danger".

Male thread Proper tightening torque Nm Width across flats mm Nominal size of adjustable angle wrench mm M5 1/6 turn after hand tightening 8 100 12 17 19 24 7 to 9 12 to 14 22 to 24 28 to 30 1/8 1/4 3/8 1/2 150 200 200 200 Lock Nut Tightening Torque Caution 1. The proper tightening torque for the hexagon lock nut is as shown in the table.

Pilot pressure range Ambient and fluid temperature (C) 0 to 60 (No freezing) Lubrication Required (Turbine oil, Class 1 lSO VG32 equivalent) VPA3165-06 VPA3145-03 Free Mounting orientation Impact resistance/Vibration resistance (m/s2) Note) 150/50 Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when

VS3135 XT019-6 XT013-13-2 XT010-15 Description VS3145 No. Cap AXT103-4 XT021-12 XT103-5 XT010-20 XT010-21 XT041-1 Resin Resin Bushing Spring Rubber plug for wire Round head combination screw Plug for cover r t y u i o Gasket XT013-31-2 NBR NXT030-8 !

Blanking plate (With gasket, screw) Note) DXT060-51-13 A B Accessory for Applicable Solenoid Description Part no. Function plate (With gasket) Note) DXT152-14-1 Mounting screw NXT013-3 Qty. 1 pc. 2 pcs. A B Note) DXT060-51-13B, DXT152-14-1B are for energizing continuously.

Mounting orientation Free Impact/Vibration resistance (m/s2) (2) 150/50 Note 1) Use turbine oil Class 1 (ISO VG32). Note 2) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal is ON and OFF .

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-11 132 300 223 M15 x 1.5 15 151 150 48 25 4-Rc 3/4, 1 3 (R) 40 5-8-12 7 Hand Valve Series VH Dimensions: Panel Mounted VH21-02 VH31-02/03 ( ): Long handle type 4 (B) 2 (A) 25 25 (32) 25 4 (B) SA 1 (P) 3 (R) 1 (P) 74 62 62 49 VA 2 (A) SA 49 4-5.5

Use a tishrenirE toqu of 0.05-0.rN.m(05-1.o2kgl.cm)-As a rcuqh guide, tishten the screw thrcush a flrih. 9d after teelins a tisht screv, (M2.5 x 4x ) Compact Guide Cylinder : Series MGQ XBII long stroke 32, 40. 50, 63, 80, 100 Same specifrcations as page 1. 125 ,150 ,17 5,20A MGQM . MGQL Common Dimensions

MXY12max. stroke 400 mm ERIES VARIATION ERIES VARIATION SERIES VARIATION S Series Variation Piping and Switch mounting options Stroke Stroke adjuster options Bore (mm) Switch rail, centralized piping on one side. 50 100 400 350 250 150 Shock absorber Metal stopper Rubber stopper 300 200 6 8 12 Scale:100% % Scale:100% S S l 100% S l 100% Scale:100% Scale:100% Scale:100% Scale:100% Scale:100%

(mm) 10 9 8 7 6 5 4 3 Manifold stations n L1 L2 2 180 165 150 135 120 105 90 75 60 235.5 223 198 185.5 173 160.5 148 123 110.5 8

excessive impact, which may result in the damage to the devices. 6 10 Bore size (mm) 6 Operating piston speed (m/s) 0.05 to 0.5 L Allowable kinetic energy (J) 0.012 0.035 100 5st 10st 15st W 100 80 Load weight W (g) 10 10 60 6 Load weight (kg) L 40 1 W 20 0.1 00 5 10 15 20 0.01 0.01 1.0 0.1 Eccentric distance L (mm) Maximum speed (m/s) 10 300 5st 10st 15st 20st 250 Load weight W (g) 200 150

Description Material Note New PFA Body 1 PVDF Valve guide 2 PPS Bonnet 3 PVDF Spacer 4 FPM Pilot diaphragm 5 PP Diaphragm support 6 FPM Withstand pressure diaphragm B 7 With plug-in reducer PTFE Diaphragm 8 PTFE Valve diaphragm 9 FPM Withstand pressure diaphragm A 10 SUS304 Fluoro resin coating Spring holder 11 SUS304 Fluoro resin coating Valve spring 12 New PFA Fitting 13 3 Series SRF30

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated

Vacuum sensor unit 5 Nozzle 6 Diffuser 7 Detent plug P397110 Other than vacuum switch 8 Lead wire cover P397176 Vacuum switch specifications Front cover B With valve 12 Valve plate With valve 13 Needle With valve 14 Supply valve (N.C.) With valve SYJ514 15 Release valve (N.C.)