A B B A B A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 4.5 8 6 10 9 3 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 4.5 8 6 10 9 3 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 5.5 9 7 11 10 4 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30) 23 (32) 19.5 (28.5) 40 10 13.5 35 37.5 38
White Black Black Red Red Red Black Black White 1 station SOL. 2 stations 2 SOL. 3 3 stations SOL. 4 stations 4 SOL. 5 5 stations SOL. 6 stations 6 SOL. 7 7 stations SOL. 8 stations 8 (a) SOL. 9 9 stations (2) SOL. 10 stations 10 SOL. 11 11 stations (b) (1) Black White SOL. 12 stations 12 SOL. 13 13 stations SOL. 14 stations 14 SOL. 15 15 stations SOL. 16 stations 16 How to Calculate the
Description Material Note Body A Handle Body B Needle Needle guide Seat ring No.
TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100
IN side, OUT side 4 10 20 30 50 75 75 Weight (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 Unrestricted 360 piping tube mounting on the IN side 6 6 8 8 10 Metric size Easily replaced filter element Easy installation and removal with One-touch fittings ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 22 22 30 40 62 20 20
7.4 9.0 7.5/7.7 8.8/9.3 12 14 14/14 15/16 Cv 0.86 0.88 0.80/0.86 1.0/1.0 2.0 2.4 1.9/2.1 2.3/2.4 3.1 3.8 3.5/3.5 3.8/4.0 C [dm3/(sbar)] 2.9 3.2 2.9/3.0 2.7/3.6 6.9 8.8 7.9/7.4 9.2/8.8 12 15 14/13 15/15 Cv 0.83 0.92 0.83/0.83 0.86/0.88 1.7 2.2 1.9/1.8 2.1/2.0 3.1 3.7 3.2/3.2 3.6/3.7 C [dm3/(sbar)] 3.5 4.4 3.5/3.5 4.1/3.9 7.5 9.3 7.4/7.3 9.2/9.1 13 16 14/14 15/15 Cv 0.93 1.1 0.89/0.89 1.0/
M5 X 0.8 (Finger opening port) Auto switch mounting groove (4 locations) 4-M5 X 0.8 44 (Piston rod and rack screw) 5.5 H M5 X 0.8 18.2 (Finger closing port) 12.4 0.5 9 8 8.4 16.8 15 31 Width across 12.5 A flats 8 (4 locations) (46) 20 15 15 7 Closed 7 7 34 20 10 10 Open G 4-M4 X 0.7 through (Thread for mounting attachment) Model MHL2-10D MHL2-10D1 MHL2-10D2 J 80 108 146 A B C D E F G H 38
A D E Q C F G C M N L P K 4 x 13 In case of IDFA3E IDFA4E to 15E1 Dimensions (mm) B C D E F G K L M N P Q A Model Port size IDFA3E IDFA4E IDFA6E IDFA8E IDFA11E IDFA15E1 15 Rc 3/8 226 410 473 67 125 304 33 36 154 21 330 13 Rc 1/2 453 498 283 275 455 270 31 42 80 240 80 15 15 Rc 3/4 485 568 355 300 300 314 41 54 87 43 101 16 603 578 396 380 Rc 1 Meaning the foot dimensions for the IDFA3E.
A A A B A B P1 B B Section A-A (ejector) Section B-B (solenoid valve) Replacement parts list Parts list No. 1 2 3 4 5 6 7 8 Description Material No. Description Part No.
L size 19 248 18 235.5 17 223 16 210.5 15 198 14 185.5 13 173 12 160.5 11 148 No. L size 20 260.5 30 385.5 29 373 28 360.5 27 348 26 335.5 25 323 24 310.5 23 298 22 285.5 21 273 No. L size Blank plate with 2 screws and gasket 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. L size 40 510.5 2.9-15
VZA VTA VPA342 VPA542 VGA VPA VPA 21.5 28 VPA3 15 22 1563 3 Port/Air Operated Valve Base Mounted/Single Unit VPA300/500/700 Series How to Order VPA 3 4 4 1 01 A Series 3 5 7 VPA300 series Type of actuation A B N.C. (Normally closed) N.O.
Refer to pages 15 and 16 for detailed selection procedures.
Max.operating vacuum pressure 100kPa Proof pressure 3.0MPa Ambient and fluid temperature 5 to 60C (No freezing) Kl Thread portion JIS B 0203 (Taper pipe thread) Thread JIS B 0209, Class 2 (Metric coarse thread) Ml Nut JIS B 0211, Class 2 (Metric fine thread) Sealant (Male thread) With sealant (standard) Hl Copper-free specification All brass parts electroless nickel plated (standard) Component
A B B A B A B 18 (26) A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 6 9 3 8 10 6.5 4.5 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 18 (26) 16 (24) 25 6 9 3 8 10 6.5 4.5 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 19 (27) 17 (25) 32 7 10 4 9 11 7.5 5.5 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30)
Note 1) 20 16 17 Elbow for piping port/IZN10D B C 180 10 (mm) B Model C 16 D 11.5 IZN10-16 (mm) IZN10-17 (inch) 22 24.5 18.5 12 Female threads for piping (Rc1/8)/IZN10-11 16 Rc1/8 13 Width across flats 14 456 Ionizer IZN10 Series Dimensions L-bracket/IZN10-B1 IZS (Mounting angle adjustable range) 40 7.5 17 IZN IZN 2 x R10 3.4 2 x M3 2 x 3.4 IZF 25 40 5 ZVB 50 Internal mounting IZD IZE 20.5
View A PFW31(-M) PFW3-B DIN rail type 8-M3 3 x 7.2 (= 21.6) 36 2-3.4 6.4 15 1 2 3 4 6.5 26 FLOW SWITCH SMC 35.5 30 56 (4.5) 44 UNIT RESET SET 5 6 7 8 29 38 15.2 26
B Locking ' Special Order option t Consult factory for availability NVF 1100-ODO{IT (drx ) Lamp and Sorga Protec-tion Z rv/Lamp/Surge Protection S dsurqe Protection Onlv L.mp and S dsurge Only BRACKET (Sutfix "F') .[ otMEr{stoNs A B c D E F 1.35 (34.41 1.34 (34.11 0.61 115.4) 0.83 Q 1 t 1.76 1.77 (44.9) Millamte.s in Parenthe$s rxfENsroNs A B c D E F G H J K It N o P o R 64.7) 0.83 (21) l.t
A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].;NPTF with 0.26 (1 Air and inert 20-100 PSI (15/cm'1 pressure vAc-1 l0Torr External pilot pressure 20-'100PSl(15 "7ks{/cm'?) Max. 120"F (50'C) 20ms or less (7OPS|) 600 cpm Nonlocking push type, (std-) Slotted locking type, Knob type (opt.)
4 A 4 A 4 A 4 A R 62 41.5 (58) 39.5 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 25.5 1 21 44.5 63.5 P = 17.5 2n-C4,C6,C8 A, B port Dimensions Formulae L1 = 17.5n + 52 L2 = 17.5n + 74.5 n: Stations (max. 16 stations) L n 1 69.5 92 112.5 123 2 87 109.5 137.5 148 3 104.5 127 150 160.5 4 122 144.5 175 185.5 5 139.5 162 187.5 198 6 157 179.5 200 210.5 7 174.5 197 225 235.5 8 192 214.5 237.5 248 9 209.5