Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

6 (Effective depth 2.5) 0 -0.1 0 -0.036 7h9 10h9 13h9 17h9 21h9 76 6 (Effective depth 3) 0 -0.1 0 -0.036 106.5 10 (Effective depth 4) 0 -0.1 0 -0.043 134 15 (Effective depth 7) 0 -0.1 0 -0.043 M8 x 1.25 169 17 (Effective depth 8.5) 19.5 0 -0.1 0 -0.052 HA, HB 2H9 2.5H9 4H9 5H9 6H9 HC 2 4 5 5 6 HD HE JA JB 3 3.5 5 7 8 KA 20.3 7.6 14.5 24.5 24.1 KB 1.6 2.2 2.8 3 2.5 LA M2 x 0.4 LB 28.4 37 53

ML1C

OO PP QQ RR SS TT UU VV Model Applicable gasket ML1C25 ML1C32 ML1C40 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C11.2 17 23.5 12.5 10 53 40 34 26 C14 A B C D E F G H I J K L M N O P Q R S T U V W Y Z Model ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 M5 x 0.8 8.5 M6 x 1 9.5 11 M8 x 1.25 322 306 161 160 108 131 101 99.5 64 92 118

MLGC

25 32 40 M8 x 1.25 depth14 80 5.5 60 3.5 93 M5 x 0.8 54 4 4 35 105 50 25 M6 x 1 14 26 M10 x 1.5 depth18 95 9 70 4 103 M5 x 0.8 62 7 7 40 125 60 32 M8 x 1.25 14 31 M10 x 1.5 depth18 95 9 70 4 104 Rc 1/8 Rc 1/8 62 7 7 40 125 60 32 M8 x 1.25 13 38 M12 x 1.75 depth 21 115 11 82.5 4 115 67 8 8 45 150 75 38 M8 x 1.25 14 47 WH W X Y T U V W Z Bore size (mm) 20 25 32 40 30 23 30 112 146 182 16 53

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

QL 6 13.5 Prepared hole diameter 3.3 2-M3 x 0.5 (Plug: M-3P) 6 (fitting seat surface dimension) 170.05 M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port 2-M3 x 0.5 A 5 5.5 A 3.2 J 2.4 Z Section AA 3.5 Depth 2 2.5 +0.030 0 7 +0.030 0 Depth 2 2.5 Q QL 11-/22-MXPJ6-10 4M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8 5 44 11-/22-MXPJ6-51 30 35 53

Clean Exhaust Filter

Hold the end of the tubing and insert it all the way in. 840 Clean Exhaust Filter SFE Series Dimensions SFE11 Gasket M5 9 4 25 SFE42/52/53/73 Dimensions (mm) C A Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 D B SFE3A 4 13.5 59 SFE4B/5C/7D AN A C Dimensions (mm) AMC Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 B AMV AMP SFE

Series CQ2

Lead wire length Internal circuits Model 3m (~9ft) 0.5m (~1 1/2ft) 53 (1.9) 10 (0.35) D-Y59A, Y69A, Y7P D-Y59A, Y69A 50 (1.8) 9 (0.3) D-Y59B, Y69B, Y7PV Dimensions (mm) DC (+) Brown [Red] 1in = 25.4mm D-Y59A, Y59B D-Y7P Mounting screw M2.5 x 4l Main switch circuit OUT Black [White] Slotted-head set screw 2.5 3.4 Indicator light 6.2 6.2 5 DC () Blue [Black] 29 (500) (3000) (5000) D-Y7P (V)

CQS

250 125 45 12 101 114 148 181 43 50 57 63 70 94 37 108 16 121 129 146 188 231 57 66 74 83 92 48 137 20 106 119 132 144 157 439 503 567 632 170 182 208 311 375 93 195 25 134 958 1116 150 166 182 197 213 564 643 721 800 229 245 277 406 485 261 Option Weights Unit: g Bore size (mm) 12 16 20 25 1.5 3 6 12 Male thread Nut Rod end thread 1 2 4 8 Rubber bumper (1) 0 1 2 3 159(153) 181(172) 55(53

CXT

NA) Cylinder form 12 16 (mm) d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 X 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 X 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 X 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90 54 9 23 55 53

MHK2

External grip: 79 Internal grip : 90 MHKL2-16D 16 14 14.6 28.6 164 MHKL2-20D 20 18 16 34 312 MHKL2-25D 25 22 19 41 562 MHKL2-12S 90 12 9 11 9 20 105 Normally open Normally closed MHKL2-16S 16 17 14 14.6 28.6 165 MHKL2-20S 20 32 18 16 34 314 MHKL2-25S 25 53 22 19 41 565 MHKL2-12C 12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

15E Port Location MHZ 120 120 MHF MHL 48 B 11 MHR MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHS 25 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port M3 x 0.5 Finger closing port M3 x 0.5 Finger opening port 25 10 MHC C MHT MHY 3-3 depth 6 +0.02 0 53

Pneumatic Purification

chromate treatment No screw threads or tie rods are required therefore removal and replacement of element is made quick and easy (AFF) Differential Pressure indicator Internal autodrain Built-in push-to-connect fitting on drain (AFF) NPT in in in in lb (cfm) 6.26 AFF2B-N02C-T 10 1/4 2.48 0.39 1.46 0.84 AFF-EL2B 6.78 AFF4B-N03C-T 26 3/8 2.99 0.39 1.46 1.21 AFF-EL4B 8.04 AFF8B-N04C-T 53

MGC

32 M8 140 75 9 9 108 92 150 134 13 15 94 32 50 105 80 MGQ 70 40 160 37 M8 165 85 12 9 125 110 176 160 16 18 107 38 60 125 95 45 194 42 M10 200 95 12 11 135 115 210 190 82.5 19 23 142 50 75 150 115 MGG Bore (mm) Z Y X W WH W V U T S R Q O P MGC 20 25 32 40 50 140 80 30 30 23 36 40 86 12 26 12 21 M6 X 1 M5 X 0.8 MGF 153 80 37 30 25 44 47 98 13 31 12 21 M6 X 1 M5 X 0.8 161 82 37 25 28.5 50 53

Wedge Cam Operation Provides

External hold: 79 Internal hold: 90 MHKL2-16D 16 14 14.6 28.6 164 Double acting MRHQ MHKL2-20D 20 18 16 34 312 Auto switch MHKL2-25D 25 22 19 41 562 MHKL2-12S 90 105 20 9 11 12 9 Normally open Normally closed MHKL2-16S 165 28.6 14.6 14 16 17 MHKL2-20S 314 34 16 18 20 32 MHKL2-25S 565 41 19 22 25 53 L1 Single acting MHKL2-12C 105 20 9 11 12 11 L2 MHKL2-16C 166 28.6 14.6 14 16 22 MHKL2-20C

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

Auto switch A 3-M3 X 0.5 thread depth 6 (Thread for mounting attachment) A 5 4.7 Model MHR3-10R MDHR3-10R SMDHR3, #1 2.3-22 Series MHR3/MDHR3 15 Without Auto Switch: MHR3-15R 3-M3 X 0.5 thread depth 6 P.C.D29 (Mounting thread) 120 120 25 M3 X 0.5 Finger opening port M3 X 0.5 Finger closing port 25 53 34 12h9 0 -0.043 1.5 5 20 43.5 (47) 2 2 3.5e8 0.020 0.038 Open: 13.5 Closed: 9.5 8 0 0.05

MLGC

32 40 4 4 5.5 M6 X 1 3.5 60 25 26 54 M8 X 1.25 depth14 35 80 105 50 93 12 M5 X 0.8 MGP 7 7 9 4 70 32 31 62 40 95 60 12 M10 X 1.5 depth18 125 M8 X 1.25 103 M5 X 0.8 Rc(PT)1/8 Rc(PT)1/8 7 7 9 4 70 32 38 62 40 95 60 12 M10 X 1.5 depth18 125 M8 X 1.25 104 MGQ 8 8 11 4 38 47 67 45 75 12 150 M8 X 1.25 115 M12 X 1.75 depth 21 82.5 115 MGG Bore size (mm) WH U W Y T V Wq Z X 20 25 32 40 23 50 16 53

MXW

Data Symbol Specifications Anti-corrosive specifications for guide unit (N) -X42 Operating pressure (MPa) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) 0.7 0.6 0.5 0.4 0.3 0.2 71 61 51 40 30 20 101 R 4 8 53 45 38 30 23 15 75 L 158 136 113 90 68 45 226 R 6 12 119 102 85 68 51 34 170 L 281 241 201 161 121 80 402 R 8 16 211 181 151 121 91 60 302 L 440 377 314 251 188 126

VT317

PVT317-53-1A 1 pc.

VHK

(mm) Model H 1(P) 2(A) L3 L4 L5 L6 Q L1 L2 M1 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-M5-04F VHK-M5-06F 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 3.5 11 18 41 16.5 VHK-01S-04F VHK-01S-06F VHK-01S-08F 62.2 26.2 36 18.7 31 58 17 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 3.4 1.2 21 51 11 23 53 13 4 6

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

SET SET button Use this button to set the value or the set mode. y DOWN button ( button) Use to change the mode or decrease the set value. 53 Digital Flow Switch Series PF2D For Deionized Water and Chemicals Functions/PF2D Refer to the Instruction Manual for information on setting and operating.

SMC Basic Pneumatics

Cyl.Dia Mass (kg) T 60" 45' 30' e u 0.01 po.2 p 0.01 It 0.2 p 0.01 p 0.2 tr 0,01 It 0.2 25 100 50 25 12.5 51.8 (87.2) 80 40 20 1 0 32 180 90 45 22.5 54.9 (s5.6) 47.8 53 78.4 39.2 4 2.2 '| .