T (NPTF)

Aluminum High Vacuum Angle Valve

D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 41 113 40 38 30 35 17 23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97 66 121.5 154.5 40 96 113 87 66.5 38 30 35 17 23 50 121.5 138.5 89.5 69 48 40 40 26 25.5 458 XL Series Common Option 1 Heater Valve heaters are common for

Environment

1 y qw t r e u !2 !3 !4 !6 @3 @2 !0 #4#5 #6 #7 @6 #1 #3 #9 #8 When rod end male thread selected Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

MNB

4 @3 #3 #5 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !

MNB

m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-6-6 7 Model Selection Series MNB Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 1000 1000 500 400 300 500 400 300 100 100 80 80 200 200 63 63 100 100 50 50 40 40 80 80 100 100 Load weight: m (kg) Load weight: m (kg) CL 63 63 50 40 30 50 40 30 32 32 50 50 40 40 CL1 20 20 32 32 MLGC 10 10 CNG

Single Axis Electric Actuator Series LJ1H

depth 8 8-M5 x 0.8 thread depth 8 45 20 Cable entry side Body mounting reference plane 5H10 depth 6 Z section detail 100 201 60 50 Z section 43 Stroke + 125 (table movement range) 192 3.3 30 90 A section 83 5.8 1.7 4.8 80 Stroke + 360 A section detail (Switch groove) 11.5 40 (T-slot pitch) 36 45 3-5H10 depth 5 9.4 18 4.5 10 Stroke + 145 80 40 30 T-slot dimensions The body mounting reference

2 Phase Stepper Motor/Without Motor Brake Series LXP

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

4 r t y u i !5 !6 No.

Slider Type Ball Screw Drive/11-LEFS Series

16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load

Cylinder with Lock

6 er uy t !9 #4@6!7!2 #6 #3#2#9 $3 80, 100 Component Parts Component Parts No. Description Material Qty.

10

M6 x 1 6 12.2 10 40 30 27 52 22 38 16 35 13 14 51 8 M6 x 1 6 14.2 14 50 35 32 65 27 46.5 20 40 14 15.5 58 11 M8 x 1.25 7 19 18 63 35 32 75 27 56.5 20 45 14 16.5 58 11 M8 x 1.25 7 19 18 80 40 37 95 32 72 25 45 20 19 72 13 M10 x 1.5 10 23 22 100 40 37 114 41 89 30 55 20 19 72 16 M10 x 1.5 10 27 26 [mm] Bore size [mm] MA MB MM N P S* V W ZZ* 32 16 4 M10 x 1.25 27 1/8 84 4 6.5 178 40 16 4 M14

MNB

6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

XL

200 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type Model 140 140 120 120 100 100 80 80 T msec T msec T msec O-ring seal 60 60 40 40 20 20 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size Valve type XLD Normally closed Model Exhaust Initial exhaust valve 1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

detail (Switch groove) 11.5 40 (T-slot pitch) 36 45 9.4 3-5H10 depth 5 4.5 10 18 Stroke + 145 80 40 30 T-slot dimensions The body mounting reference plane and work piece mounting reference plane should be used as standards when mounting onto equipment.

CRQ2

2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

C95

40 45 45 55 32 40 50 63 80 100 Refer to pages 6-12-8 to 6-12-11 for dimensions with mounting bracket and accessories. 6-12-15 16 Refer to page 6-16-1 for details on auto switches.

Cylinder with Lock

6 !0!1 !7 @1@0 @2 @6 @3 @5@8 @4@9 #5 #7 #9 #8#6#4 #0#1 $1 $0 t !9 #3 #2 @7 Component Parts Component Parts No. Description Material Qty.

CJ2

Construction (The cylinder cannot be disassembled) Component Parts No. q w e r t y u i o !0 No. !1 !2 !3 !4 !5 !6 !7 !8 !

RSQ

6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

Air Slide Table

Plate (Aluminum material) Lr F t MXQ6(A)-Z MXQ6(A)-Z MXQ6(A)-Z Lr = 40 mm 0.030 ST 10, 20 ST 20 to 50 0.003 ST 50 0.025 Table displacement [mm] Table displacement [mm] Table displacement [mm] 0.020 ST 40 0.002 ST 30 to 50 ST 10 0.001 0.015 ST 30 0.010 0.001 ST 20 ST 40, 50 0.005 ST 10 ST 10 to 30 0.000 0.000 0.000 0 2 4 6 8 0 2 4 6 8 0 2 4 6 8 Load [N] Load [N] Load [N] (Plate size: t = 8