Pulse Valve

1 u y t r e w q i r e IN w IN q t y u i o !0 u y t o i !0 Component Parts Component Parts No. Description Material 1 Body ADC 2 Main valve Resin 3 O-ring NBR 4 Bonnet ADC 5 Seal NBR 6 Washer Fe (Chromated) 7 Compression nut ADC 8 Hexagon bolt Stainless steel No. Description Material No.

10

MPa 120 120 80 80 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 60 60 0.4 MPa 0.3 MPa 80 80 0.4 MPa 0.3 MPa 40 40 0.3 MPa 0.3 MPa 0.2 MPa 40 40 0.2 MPa 0.2 MPa 20 20 0.2 MPa 20 40 60 80 100 120 0 40 80 120 160 200 0 0 0 40 80 120 160 20 40 60 80 100 120 140 Gripping point distance R [mm] Gripping point distance R [mm] Gripping point distance R [mm] Gripping point distance R [mm] Step 2 Check the gripping

ZMA

80 80 80 Vacuum pressure (kPa) Vacuum pressure (kPa) Air consumption Air consumption Vacuum pressure (kPa) Vacuum pressure (kPa) 65 65 100 65 100 65 Air consumption Air consumption Air consumption Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure 80 80 53 53 53 53 60 40 60 40 40 40 40 27 27 27 40 27 Suction flow rate Suction flow rate Suction flow rate Suction

Process Valve

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N

WRF100

Standardized T-type arms and S-type arms Shape selectable to meet specifications/application.

KB

T Connecting thread KBB1-M5 KBB1-M6 KBB3-R1 KBB4-R2 Rc(PT)1 4 Rc(PT)1 8 M6 X 1 M5 X 0.8 T Connecting thread Part No.

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

t l t t RR1 m m m m d Dd9 d Dd9 0.1 0.3 NX +0.2 0 A1 U1 L 7 12 Material: Pin and snap ring both SUS304 Material: SUS304 Material: Pin and snap ring both SUS304 Part no.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

60 90 75 40 60 Suction flow 45 20 30 15 0 0 20 40 60 80 100 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow [L/min(ANR)] Supply pressure [MPa] 256 Vacuum Pad with Ejector ZHP Series Construction A-A Component Parts t !

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Compact Guide Cylinder

mm Find the point of intersection for the load mass of 2 kg and the eccentric distance of 80 mm on graph , based on vertical mounting, 30 mm stroke, and the speed of 200 mm/s.

Series CE1

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No. No.

Magnetically Coupled Rodless Cylinder

7 t CY3R15, 20 CY3R15 Parts list No. Description No.

AS-FG/ASD-FG

T Inch size L4 L5 A1 A2 M1 Max.

VQC

B DIN rail mounting bracket [-D] VVQ1000-57A for {F, L, M, P, S (EX500) kit} VVQC1000-57A-S for {S (EX250) kit} VVQC1000-57A-T for {T, S (EX126) kit} 17 SOL. A 5 Station 7 SOL. B 18 SOL. A 6 Station 8 SOL.

Nozzle Type Ionizer

of 80 mA) ESD MONITOR Short circuit protection With short circuit protection 12 35.5 34.5 30 44 56 SMC Trigger input No-voltage input, Low level input 10 ms or more, Low level 0.4 V or less 1 T U O U O T2 T E S Indicator light (Green/Red) Enclosure IP40 Operating temperature range 5 6 7 8 10.4 16 Operating: 0 to 50C, Stored: 10 to 60C (with no freezing or condensation) 8 x M3 11 (4.5) 19.4

CY1F

Printed in Japan. 1st printing February, 2002 D-DAD P-80 (D) This catalog is printed on recycled paper with concern for the global environment.

PSxx-OMU0005CN

() PNP 2 Max.80 mA 1 V T15 V 1 k V420 mA 12 V 300 24 V 600 50 -V/-T () PNP 2 Max.80 mA 1 V -Y () -V/-T () PNP 2 Max.28 V80 mA 1 V -22No.PS-OMU0005CN-C [] 3 0.2 [] / OUT2 OUT2 OUT1 OUT1 [F10]30 () 13 35 1 (62 ) () () (27 ) (29 ) (3 ) (25 ) 3 () 3 -23No.PS-OMU0005CN-C ON OFF ON ON OFF ISE20B [P_1] OUT1 0.500 MPa [P_2] OUT2 0.500 MPa [H_1] OUT1 0.050 MPa [H_2] OUT2 0.050

VQZ1000/2000/3000

How to Order Manifold T VQZ2120 5M N7 VQC SQ How to Order Manifold VQZ2120R 5M C6 VQ0 Thread type (Cylinder port and 1(P), 3(R2), 5(R1) port) External pilot specifications VQ4 Nil Rc VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com N NPT T NPTF VQZ External pilot

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

Air Cylinder/Low Friction Series MBlQ 32, 40, 50, 63, 80, 100 How to Order MB L Q F 32 50 Standard MDB L F 32 50 Q A53 With auto switch Built-in magnet Number of auto switches S 3 n 2 1 3 n Mounting Basic/Without bracket Axial foot Front flange Rear flange Single clevis Double clevis Center trunnion B L F G C D T Bore size 32mm 40mm 50mm 63mm 80mm 100mm 32 40 50 63 80 100 Auto switch/Tie

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Note 2) 3/16", 3/8", 1/2" are made of brass (Electroless nickel plated). 15-9-78 5 Speed Controller Adjustable by Flat Head Screwdriver With One-touch Fitting, Elbow Type/Universal Type Dimensions Elbow type L5 D3 H (Hexagon width across flats) Applicable tubing O.D. d AS A L4 ASP D1 ASN L3 AQ ASV AK M1 ASS D2 T L1 ASR L2 ASF Metric Size Inch Size d T H D2 D3 L1 L2 L3 L4 L5 A M1 d T H D1