High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Auto Switch Guide

When a load, such as a relay or solenoid, which generates surge is directly driven, use a type of switch with a built-in surge absorbing element. 8.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

23 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 10 10 14 14 22 22 23 23 30 30 42 42 U CX L Z + Stroke RR ZZ + Stroke Double clevis/(D) Port Cushion valve Double clevis CDH10 (mm) Bore size (mm) Stroke range H10 CX +0.3 ZZ Z U RR L CD +0.1 CZ 32 40 50 63 80 100 164.5 169 197 197 251 251 154 158 182 182 228 228 13 13 17 17 26 26 14 14 20 20 30 30 10.5 11 15 15 23 23 up to 500

MHZ2/MHZJ2

on one side is a breathing hole.

MY1

Seal guide B Slide plate Spacer 21 22 Side seal unit MYMK-16-A MYMK-16-A MYMK-25-A MYMK-25-A MYMK-25-A 23 24 Hexagon socket head cap screw Chromated Chromium molybdenum steel 25 Replacement Parts: Seal Kit 20 40 50 25 32 63 16 No.

Direct Solenoid

..p s y. itrdu.r* 6p,{r) res$dtsLdi.O oF .td d 16, (1) indaaiorrigtrtGdrbry.b r 7 a 1 8, (1) d.t 19, (21 dsi 13, l2l (H 121. and O )dol7 {valw tvDe'F1 1 3 2 1 5 AXT333-16 1 5 1 1 1 a E K l9 I oao) 4.aa t122) 3.25 (43) 136) L0a (23) en 1.09 (23) 06j 1.63 0) 136) axl3i,t12-2 2 Hold ddn bolls r'd bd(waBlm I&s2 !

CUJ

Although a zener diode for surge protection is connected at the output side of a solid state auto switch, damage may still occur if the surge is applied repeatedly. When a load, such as a relay or solenoid, which generates surge is directly driven, use a type of switch having a built-in surge absorbing element. 8.

Digital pressure switch for energy-saving control ejector

This can be prevented by inserting a noise filter, such as a line noise filter and ferrite core, between the switch-mode power supply and the product, or by using a series power supply instead of a switch-mode power supply.

5 Port Air Operated Valve

A), 2 (B) port] (4) 26.4 5 5 B 2 B 2 26.4 12 12 1/8 (Pilot port: Upward) 1/8 (Pilot port: Upward) 4 A 4 A 5 (1.6) 11.5 45.5 (6) 40.5 55.5 1502 VFA1000/3000/5000 Series 5 Port Air Operated Valve Body Ported/Single Unit Dimensions: VFA3000 Series/Body Ported 2 position single VFA3130(-F)(-P) 01 02 2 position double VFA3230(-P) 01 02 63.5 23 1/8, 1/4 [4 (A), 2 (B) port] 1/8, 1/4 [4(A), 2(B)port

MQQ

Air filter (5m or less) When using a solenoid valve, use a metal seal type (series VQ, VQZ, SQ, etc.).

RQ

Part no.: RQB32-47 A special tube is manufactured for a 47mm stroke.

Solid State Auto Switches

Please contact SMC when the AC welding current exceeds 16000 A.

MXW

: M-5P) 74 36 59 5 32 8 Operating port M5 x 0.8 33 34 33 (Y) (Y) Operating direction (B) 6H9 +0.030 depth 5.5 0 39 125 (Plug: M-5P) Operating direction (A) 10.5 (B) 9.5 10 20 20 18 A 10.5 43 31 23 21.5 Z A 3 Cross section AA 4-M6 x 1 thread depth 12 3 x H G Bottom through-hole 5.1 H 7 depth 5.5 6H9 +0.030 0 F E 6H9 +0.030 depth 5.5 0 (mm) Model Z E F G H MXW16-75 270 83 112 71.5 45 MXW16-

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

Multi-Axis Step Motor Controller

A B-1 A A-1 B B-2 B A-2 COM-A/COM B-3 COM-B/ A-3 Cable type Nil Robotic cable (Flexible cable) S Standard cable Cable color Connector D terminal no.

MLU

HS 40, 50 25, 32 D-A73C D-A80C D-J79C Approx. 30.5 Approx. 26.6 A A A A 25, 32 40, 50 D-A79W D-F7WV D-F7V D-F7BAVL Approx. 30.5 Approx. 22 A A A A 40, 50 D-P5DW Approx. 31 A A Approx.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

38 35 42 40.5 A 33 32.5 34 31 38 36.5 49.5 48.5 A B A B A B A B 20 25 32 40 50 63 80 100 B 24 (32) 24.5 (32.5) 25 (33) 27 (36) 32 (44) 33.5 (45.5) B 14.5 (22.5) 15 (23) 15.5 (23.5) 17.5 (26.5) 22.5 (34.5) 24 (36) 29 (43) 30 (44) B 20 (28) 20.5 (28.5) 21 (29) 23 (32) 28 (40) 29.5 (41.5) B 16 (24) 16.5 (24.5) 17 (25) 19 (28) 24 (36) 25.5 (37.5) 30.5 (44.5) 31.5 (45.5) Hs 27.5 30 33.5

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Use 0.3 to 0.7 times the thrust (differs depending on the operating speed) as a guide for actual use. g: Gravitational acceleration Dynamic moment Mounting orientation Dynamic load FE Horizontal Ceiling Wall Vertical Z M 1.4 100 x a x mn x g 1 3 a a ME x FE x Z Dynamic moment ME Dynamic moment ME does not occur. 1 3 mn x g ME M3 ME x FE x Y mn x g ME FE FE Note) Regardless of the mounting

Clamp Cylinder with Lock Series CLK1

Hs 71.5 77 84 A B 0 1.5 1.5 D-A4 23 24.5 24.5 Approx.

Air Slide Table Series MXQ

14 16.5 1.0 Allowable moment coefficient 0.7 0.5 Note) For A, A, A and A, there is no difference in the corrected values due to the stroke.