SMC Corporation of America
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Downtime Costs Production downtime is so costly that when your line is down, every minute counts. A major benefit of our Serial Network products is reduced downtime, which gives you an overall lower cost of ownership. Status LEDs on the serial unit tell at a glance whether the I/O point in question is on or off.

2 ID 85 130 Rc 1/2 440 260 560 540 297 330 315 470 325 530 IDUS6E 315 130 605 540 Rc 3/4 325 355 515 485 325 575 285 110 AMG Note: The diagram above is drawn base on IDUS3E dimension with scale 1:6.

S With auto switch unit Nil Nominal size (torque) For 1 piece, a right hand auto switch is installed.

LEFS40 Speed 1000mm/sec 0 [/min] 50 [/min] 10,000,000 80 [/min] 100 [/min] ISO CLASS4 ISO CLASS5 ISO CLASS6 1,000,000 Particle concentration [particles/m3] 100,000 10,000 1,000 100 10 1 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter [m] Clean class Amount of recommended vacuum aspiration (/min(ANR)) Type Speed mm/s) ISO 14644-1 Fed.Std.209E 6 1000 5 5 100 10 4 10 30 6 1000 5 5 100 10 4 10 30

3 PA 0.54 13 0.8 4 1/4 (8A) 3/8 (10A) 1/2 (15A) 1/4: 0.42 3/8: 0.40 1/2: 0.49 VCS3 3 0.80 19 0.5 5 1.0 PAX 1.4 33 0.2 7 2.1 50 0.1 10 PB 0.35 8.4 1.0 3 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 1/4: 0.58 3/8: 0.55 1/2: 0.62 3/4: 0.78 0.60 14 1.0 4 0.85 20 0.7 5 VCS4 1.0 4 1.4 33 0.3 7 2.1 50 0.12 10 Note 1) Refer to page 17-2-42 in model selection regarding port size and orifice size combinations

Output Specifications 25(L) 1 output NPN open collector 30 V, 80 mA or less ZSE4 ZSE4B 26(L) Analog output (1 to 5 V) 67(L) 1 output PNP open collector 80 mA or less 26(L) Analog output (1 to 5 V) 27(L) 2 outputs NPN open collector 30 V, 80 mA or less ZSE4E 67(L) 2 outputs PNP open collector 80 mA or less 13-7-6 7 Multistage Ejector Series ZL Construction q t e !

7 8.5 9 10 D-H7C D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL 4 4 4.5 5 6 45 D-G59F D-G5NBL 5 35 5 40 5.5 40 Since this is a guideline including hysteresis, not meant to be guaranteed.

7 8.5 9 10 D-H7C D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL 4 4 4.5 5 6 45 D-G59F D-G5NBL 5 35 5 40 5.5 40 Since this is a guideline including hysteresis, not meant to be guaranteed.

Lubrication Temperature Allowable voltage fluctuation Not required (Use turbine oil Class 1 ISO VG32, if lubricated.) 5 to 50C (Air operated type: 60C) Note 1) SGC 35C or less (when rated voltage is applied.) 50C or less (when rated voltage is applied.)

VKF How to Order Valve Manifold Assembly VQZ Ordering example VZ Stations 5 4 3 2 1 Valve (N.C.) V114-5GZ VS VFN 2 1 3 2 Blank plate assembly V100-77-1A Manifold base (5 stations) VV100-S41-05-M5 VV100-S41-05-M5 1 set (Type S41, 5 station manifold base part no.)

Jumping of pressure compensating mechanism Be aware that the amount of jumping that is shown in Fig. (5) applies to the pressure compensation mechanism during the operation of the cylinder. Jumping is a condition in which the cylinder operates without control at a speed that is higher than the control speed. Skip valve 1.

Refer to the page 58 for details. 4.5 5 5 Circuit Diagram Power supply terminal block PCW-EC16Z00 PCW-EC16Z01 20 18 16 14 12 10 8 6 4 2 Input/output connector (CS0) 0 1 2 3 4 5 6 7 19 17 15 13 11 9 7 5 3 1 Green Red F E D C B A 9 8 9 8 7 6 5 4 3 2 1 0 F E D C B A 4 3 2 1 CN1 4 3 2 1 CN2 4 3 2 1 CN3 4 3 2 1 CN4 4 3 2 1 CN5 4 3 2 1 CN6 4 3 2 1 CN7 4 3 2 1 CN8 4 3 2 1 CN9 4 3 2 1 CNA 4 3 2 1

S Z Nil 14 1 2 1 20 2 Indicator light is not available for grommet type.

ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 <1> When this signal is OFF, an alarm is being generated for the actuator/controller. ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 Universal type 3.2 6 8 10 12 3.2 6 10 4 6 8 JIS Symbol 4 4 8 10 12 Metric size 6 10 Tubing O.D. 1/8" 5/32" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 5/16" 3/16" 1/4" 1/8" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow Direction Symbols on Body Meter-out type Meter-in

Red LERR LED is flashing 1 3 4 1 2 Content Err (Default setting) 5 2.5 Mbps 625 kbps Content 5 Mbps CC-Link version Node number 2.00 2.00 2.00 2.00 1.10 1.10 1.10 1.10 64 1 : 8 7 9 6 Number of occupied nodes x10 x1 0 5 4 4 Pin number 1 Address 2 3 5 3 1 4 2 3 2 1 1 4 3 2 1 (2) (3) Content 8 7 9 6 6 Number of occupied nodes SI unit output data size 4 byte (Default setting) 0 5 4 1 2 3 Signal

7 t16-20 718 1.54 . 1 8 9 5/16 1t8 1/2-20 1/2 . 1 4 .220 5/r 6 'l 14 1t2-20 9/16 1.32 .220 5/16 318 'lt2-20 1 1 / 1 6t.!

Limited warranty and Disclaimer 1.The warranty period of the product is 1 year in service or 1.5 years after the product is delivered,whichever is first.2) Also, the product may have specified durability, running distance or replacement parts. Please consult your nearest sales branch. 2.

(Ex.: AN200-N02) AN600-10 270 1 1 1 AN700-12 440 1 4 AN800-14 590 1 2 AN900-20 960 2 Note) NPT thread is also available. Specify N after ANm00-.